SOFT CONDUCTIVE POLYMER PROCESSING PAD AND METHOD FOR FABRICATING THE SAME

Abstract

Embodiments of the invention generally provide a conductive processing pad and a method for fabricating the same. In one embodiment the conductive processing pad includes a grid of conductive material disposed in a polymer layer. A plurality of perforations is formed through the polymer in the open area defined by the grid such that the side walls of the perforations do not expose the conductive grid. In another embodiment, a method for forming a conductive pad is provided. In one embodiment, the method includes the steps of pressing a conductive grid into a polymer sheet at a temperature greater than the polymer's last transition temperature but lower than the melting point of the material comprising the conductive grid and perforating the polymer sheet through the open area defined by the grid without exposing the conductive grid.

Description

DESCRIPTION OF THE DRAWINGS

A more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.

FIG. 1 is a sectional view of an electrochemical processing (ECMP) having one embodiment of a conductive processing pad assembly;

FIG. 2 is a partial sectional view of the conductive processing pad assembly of FIG. 1;

FIG. 3 is a partial sectional view of another embodiment of a conductive processing pad assembly;

FIG. 4 is a top view of one embodiment of a conductive grid;

FIG. 5 is a top view of the conductive processing pad assembly of FIG. 1;

FIG. 6 is a partial sectional view of another embodiment of a conductive processing pad assembly; and

FIGS. 7A-C depicts one embodiment of a sequence for fabricating a conductive layer of a processing pad assembly.

Claims

1. A conductive processing pad assembly comprising: a polymer layer;a grid of conductive material disposed in a polymer layer; anda plurality of perforations formed through the polymer layer in an open area defined by the grid such that side walls of the perforations do not expose the conductive grid.

2. The conductive processing pad assembly of claim 1, wherein the polymer layer further comprises: a material having a wear rate substantially equal to a wear rate of the conductive grid when moved against a conductive surface of a substrate.

3. The conductive processing pad assembly of claim 1, wherein the polymer layer further comprises: a material having a wear rate substantially equal to a wear rate of the conductive grid when moved against at least one of a copper or a tungsten surface of a substrate.

4. The conductive processing pad assembly of claim 1, wherein the polymer layer further comprises: a material that is semi-soluble when exposed to at least one of a polishing solution, cleaning solution or water solution.

5. The conductive processing pad assembly of claim 1, wherein the polymer layer further comprises: a semi-soluble upper surface; anda underlying non-soluble bulk material.

6. The conductive processing pad assembly of claim 1 further comprising: a conductive electrode layer coupled to a side of the polymer layer opposite the conductive grid.

7. The conductive processing pad assembly of claim 6, wherein the conductive electrode layer further comprises: independently biasable segments.

8. The conductive processing pad assembly of claim 6 further comprising: a dielectric subpad sandwiched between the polymer layer and the conductive electrode layer.

9. The conductive processing pad assembly of claim 6 further comprising: a dielectric subpad coupled to a side of the conductive electrode layer opposite the polymer layer.

10. The conductive processing pad assembly of claim 1, wherein the conductive grid is fabricated from at least one of a metal, tin, nickel, stainless steel, conductive polymer or graphite.

11. The conductive processing pad assembly of claim 1, wherein the conductive grid further comprises: openings having a rectangular, circular or polygonal profile.

12. The conductive processing pad assembly of claim 11, wherein polymer layer extends into the openings formed in the conductive grid.

13. The conductive processing pad assembly of claim 12, wherein a portion of the polymer layer disposed in the opening of the conductive grid has at least one of the plurality of perforations extending therethrough.

14. The conductive processing pad assembly of claim 13 further comprising: a conductive electrode layer coupled to the polymer layer and exposed through the perforations.

15. A conductive processing pad assembly comprising: a polymer layer having a plurality of perforations formed therethrough;a grid of conductive material disposed in a polymer layer and exposed on a top surface of the polymer layer; anda conductive electrode layer coupled to the polymer layer and exposed from the top surface through the perforations.

16. The conductive processing pad assembly of claim 15, wherein the polymer layer further comprises: a material having a wear rate substantially equal to a wear rate of the conductive grid when moved against at least one of a copper or a tungsten surface of a substrate.

17. The conductive processing pad assembly of claim 15, wherein the polymer layer further comprises: a material that is semi-soluble when exposed to at least one of a polishing solution, cleaning solution or water solution.

18. The conductive processing pad assembly of claim 15, wherein the polymer layer further comprises: a semi-soluble upper surface comprising the top surface; anda underlying non-soluble bulk material.

19. The conductive processing pad assembly of claim 15, wherein the conductive electrode layer further comprises: independently biasable segments.

20. A method for fabricating a conductive processing pad assembly, comprising: pressing a conductive grid into a polymer sheet at a temperature greater than the polymer's last transition temperature but lower than the melting point of the material comprising the conductive grid; andperforating the polymer sheet through the open area defined by the grid without exposing the conductive grid.