Robert Andrew Poitras

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Beverly, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Force sensing system for substrate lifting apparatus
- Patent number 9,108,322
- Issue date Aug 18, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Ion beam incidence angle and beam divergence monitor
- Patent number 6,690,022
- Issue date Feb 10, 2004
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS
- Publication number 20140324221
- Publication date Oct 30, 2014
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Mask position detection
- Publication number 20080073569
- Publication date Mar 27, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Charles A. Teodorczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In situ ion beam incidence angle and beam divergence monitor
- Publication number 20020121889
- Publication date Sep 5, 2002
- Varian Semiconductor Equipment Associates, Inc.
- Grant Kenji Larsen
- H01 - BASIC ELECTRIC ELEMENTS