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Plasma reactor with a deposition shield
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Patent number 6,360,686
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Issue date Mar 26, 2002
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Tegal Corporation
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Stephen P. DeOrnellas
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma reactor with a deposition shield
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Patent number 6,173,674
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Issue date Jan 16, 2001
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Tegal Corporation
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Stephen P. DeOrnellas
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma reactor with a deposition shield
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Patent number 6,170,431
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Issue date Jan 9, 2001
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Tegal Corporation
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Stephen P. DeOrnellas
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma reactor with a deposition shield
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Patent number 6,006,694
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Issue date Dec 28, 1999
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Tegal Corporation
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Stephen P. DeOrnellas
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...