TREA

Robert C. Vail

Follow

Person

  • Windsor, CA, US
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma etch reactor and method
    • Publication number 20050164513
    • Publication date Jul 28, 2005
    • Tegal Corporation
    • Stephen P. DeOrnellas
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etch reactor and method
    • Publication number 20020139665
    • Publication date Oct 3, 2002
    • Tegal Corporation
    • Stephen P. DeOrnellas
    • H01 - BASIC ELECTRIC ELEMENTS