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Robert H. Chatham III
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Scotts Valley, CA, US
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last 30 patents
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Patent Grant
Method and system for in-situ cleaning of semiconductor manufacturi...
Patent number
6,544,345
Issue date
Apr 8, 2003
ASML US, Inc.
Bruce E. Mayer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Gas manifold valve cluster
Publication number
20070028838
Publication date
Feb 8, 2007
Craig Bercaw
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Uniform batch film deposition process and films so produced
Publication number
20070010072
Publication date
Jan 11, 2007
AVIZA TECHNOLOGY, INC.
Robert Jeffrey Bailey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Nitridation of high-k dielectrics
Publication number
20060051506
Publication date
Mar 9, 2006
Yoshihide Senzaki
H01 - BASIC ELECTRIC ELEMENTS