Robert H. Chatham III

Person

  • Scotts Valley, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Gas manifold valve cluster

    • Publication number 20070028838
    • Publication date Feb 8, 2007
    • Craig Bercaw
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Uniform batch film deposition process and films so produced

    • Publication number 20070010072
    • Publication date Jan 11, 2007
    • AVIZA TECHNOLOGY, INC.
    • Robert Jeffrey Bailey
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Nitridation of high-k dielectrics

    • Publication number 20060051506
    • Publication date Mar 9, 2006
    • Yoshihide Senzaki
    • H01 - BASIC ELECTRIC ELEMENTS