Robert I. Greene

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gas diffusion shower head design for large area plasma enhanced che...
- Patent number 11,692,268
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffusion shower head design for large area plasma enhanced che...
- Patent number 8,795,793
- Issue date Aug 5, 2014
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for supporting a glass substrate to improve uniform depositi...
- Patent number 7,732,010
- Issue date Jun 8, 2010
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for dechucking a substrate
- Patent number 7,160,392
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution plate assembly for large area plasma enhanced chem...
- Patent number 6,942,753
- Issue date Sep 13, 2005
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for enhanced chamber cleaning
- Patent number 6,863,077
- Issue date Mar 8, 2005
- Applied Materials, Inc.
- Sheng Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for enhancing chamber cleaning
- Patent number 6,432,255
- Issue date Aug 13, 2002
- Applied Materials, Inc.
- Sheng Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition using a finger type shadow frame
- Patent number 6,355,108
- Issue date Mar 12, 2002
- Applied Komatsu Technology, Inc.
- Tae Kyung Won
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS DIFFUSION SHOWER HEAD DESIGN FOR LARGE AREA PLASMA ENHANCED CHE...
- Publication number 20140230730
- Publication date Aug 21, 2014
- Soo Young Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GAS DIFFUSION SHOWER HEAD DESIGN FOR LARGE AREA PLASMA ENHANCED CHE...
- Publication number 20090104376
- Publication date Apr 23, 2009
- SOO YOUNG CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DECHUCKING A SUBSTRATE
- Publication number 20070062454
- Publication date Mar 22, 2007
- APPLIED MATERIALS, INC.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anodized substrate support
- Publication number 20060185795
- Publication date Aug 24, 2006
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Lifting glass substrate without center lift pins
- Publication number 20050255244
- Publication date Nov 17, 2005
- APPLIED MATERIALS, INC.
- Li Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas diffusion shower head design for large area plasma enhanced che...
- Publication number 20050223986
- Publication date Oct 13, 2005
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Full glass substrate deposition in plasma enhanced chemical vapor d...
- Publication number 20050150459
- Publication date Jul 14, 2005
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anodized substrate support
- Publication number 20040221959
- Publication date Nov 11, 2004
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Gas distribution plate assembly for large area plasma enhanced chem...
- Publication number 20040206305
- Publication date Oct 21, 2004
- APPLIED MATERIALS, INC.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lifting glass substrate without center lift pins
- Publication number 20040096636
- Publication date May 20, 2004
- APPLIED MATERIALS, INC.
- Li Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for dechucking a substrate
- Publication number 20040089239
- Publication date May 13, 2004
- APPLIED MATERIALS, INC.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method for metal induced crystallization of polycrystall...
- Publication number 20030203123
- Publication date Oct 30, 2003
- APPLIED MATERIALS, INC.
- Quanyaun Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for dechucking a substrate
- Publication number 20030079691
- Publication date May 1, 2003
- APPLIED MATERIALS, INC.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for enhanced chamber cleaning
- Publication number 20020174885
- Publication date Nov 28, 2002
- Sheng Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Full glass substrate deposition in plasma enhanced chemical vapor d...
- Publication number 20020083897
- Publication date Jul 4, 2002
- APPLIED MATERIALS, INC.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert I. Greene

Person

Patents Grantslast 30 patents

Gas diffusion shower head design for large area plasma enhanced che...

Gas diffusion shower head design for large area plasma enhanced che...

Method for supporting a glass substrate to improve uniform depositi...

Method for dechucking a substrate

Gas distribution plate assembly for large area plasma enhanced chem...

Method and apparatus for enhanced chamber cleaning

Method and apparatus for enhancing chamber cleaning

Film deposition using a finger type shadow frame

Patents Applicationslast 30 patents

GAS DIFFUSION SHOWER HEAD DESIGN FOR LARGE AREA PLASMA ENHANCED CHE...

GAS DIFFUSION SHOWER HEAD DESIGN FOR LARGE AREA PLASMA ENHANCED CHE...

METHOD FOR DECHUCKING A SUBSTRATE

Anodized substrate support

Lifting glass substrate without center lift pins

Gas diffusion shower head design for large area plasma enhanced che...

Full glass substrate deposition in plasma enhanced chemical vapor d...

Anodized substrate support

Gas distribution plate assembly for large area plasma enhanced chem...

Lifting glass substrate without center lift pins

Method for dechucking a substrate

System and method for metal induced crystallization of polycrystall...

Method and apparatus for dechucking a substrate

Method and apparatus for enhanced chamber cleaning

Full glass substrate deposition in plasma enhanced chemical vapor d...