Robert Kaim

Person

Brookline, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon implantation in substrates and provision of silicon precurs...
- Patent number 11,062,906
- Issue date Jul 13, 2021
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon materials for carbon implantation
- Patent number 10,497,569
- Issue date Dec 3, 2019
- Entegris, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for enhanced lifetime and performance of ion s...
- Patent number 9,754,786
- Issue date Sep 5, 2017
- Entegris, Inc.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower dose rate ion implantation using a wider ion beam
- Patent number 9,748,072
- Issue date Aug 29, 2017
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 9,685,304
- Issue date Jun 20, 2017
- Entegris, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Boron ion implantation using alternative fluorinated boron precurso...
- Patent number 9,455,147
- Issue date Sep 27, 2016
- Entegris, Inc.
- W. Karl Olander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Medium current ribbon beam for ion implantation
- Patent number 9,269,528
- Issue date Feb 23, 2016
- ADAVANCED ION BEAM TECHNOLOGY, INC.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enriched silicon precursor compositions and apparatus and processes...
- Patent number 9,171,725
- Issue date Oct 27, 2015
- Entegris, Inc.
- James J. Mayer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid storage and dispensing system including dynamic fluid monitor...
- Patent number 9,170,246
- Issue date Oct 27, 2015
- Entegris, Inc.
- James Dietz
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 9,142,387
- Issue date Sep 22, 2015
- Entegris, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Ion implantation system and method
- Patent number 9,111,860
- Issue date Aug 18, 2015
- Entegris, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for enhanced lifetime and performance of ion s...
- Patent number 9,012,874
- Issue date Apr 21, 2015
- Entegris, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Ion implantation system and method
- Patent number 8,796,131
- Issue date Aug 5, 2014
- Advanced Technology Materials, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for enhanced lifetime and performance of ion s...
- Patent number 8,785,889
- Issue date Jul 22, 2014
- Advanced Technology Materials, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Enriched silicon precursor compositions and apparatus and processes...
- Patent number 8,779,383
- Issue date Jul 15, 2014
- Advanced Technology Materials, Inc.
- James J. Mayer
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Cleaning of semiconductor processing systems
- Patent number 8,603,252
- Issue date Dec 10, 2013
- Advanced Technology Materials, Inc.
- Frank Dimeo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,598,022
- Issue date Dec 3, 2013
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluid storage and dispensing system including dynamic fluid monitor...
- Patent number 8,555,705
- Issue date Oct 15, 2013
- Advanced Technology Materials, Inc.
- James Dietz
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method and apparatus for enhanced lifetime and performance of ion s...
- Patent number 8,399,865
- Issue date Mar 19, 2013
- Advanced Technology Materials, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Boron ion implantation using alternative fluorinated boron precurso...
- Patent number 8,389,068
- Issue date Mar 5, 2013
- Advanced Technology Materials, Inc.
- W. Karl Olander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for enhanced lifetime and performance of ion s...
- Patent number 8,237,134
- Issue date Aug 7, 2012
- Advanced Technology Materials, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,138,071
- Issue date Mar 20, 2012
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Isotopically-enriched boron-containing compounds, and methods of ma...
- Patent number 8,062,965
- Issue date Nov 22, 2011
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluid storage and dispensing system including dynamic fluid monitor...
- Patent number 7,966,879
- Issue date Jun 28, 2011
- Advanced Technology Materials, Inc.
- James Dietz
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Boron ion implantation using alternative fluorinated boron precurso...
- Patent number 7,943,204
- Issue date May 17, 2011
- Advanced Technology Materials, Inc.
- W. Karl Olander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for cleaning ion implanter components
- Patent number 7,819,981
- Issue date Oct 26, 2010
- Advanced Technology Materials, Inc.
- Frank DiMeo, Jr.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radial scan arm and collimator for serial processing of semiconduct...
- Patent number 7,057,192
- Issue date Jun 6, 2006
- Robert E. Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for flowing gases into a manifold at high pote...
- Patent number 5,996,528
- Issue date Dec 7, 1999
- Novellus Systems, Inc.
- Donald W. Berrian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium nitride and multilayers formed by chemical vapor depositio...
- Patent number 5,595,784
- Issue date Jan 21, 1997
- Robert Kaim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for high efficiency scanning in an ion implanter
- Patent number 4,980,562
- Issue date Dec 25, 1990
- Varian Associates, Inc.
- Donald W. Berrian
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CARBON MATERIALS FOR CARBON IMPLANTATION
- Publication number 20200051819
- Publication date Feb 13, 2020
- Entegris, Inc.
- Joseph D. SWEENEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20170330756
- Publication date Nov 16, 2017
- Entegris, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
CARBON MATERIALS FOR CARBON IMPLANTATION
- Publication number 20170069499
- Publication date Mar 9, 2017
- Entegris, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...
- Publication number 20160211137
- Publication date Jul 21, 2016
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...
- Publication number 20160046849
- Publication date Feb 18, 2016
- Entegris, Inc.
- James J. Mayer
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...
- Publication number 20160041136
- Publication date Feb 11, 2016
- Entegris, Inc.
- James Dietz
- G01 - MEASURING TESTING
Information Patent Application
ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...
- Publication number 20160013018
- Publication date Jan 14, 2016
- Entegris, Inc.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER DOSE RATE ION IMPLANTATION USING A WIDER ION BEAM
- Publication number 20150371857
- Publication date Dec 24, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Zhimin WAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20150357152
- Publication date Dec 10, 2015
- Entegris, Inc.
- Edward E. Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20150228486
- Publication date Aug 13, 2015
- Entegris, Inc.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEDIUM CURRENT RIBBON BEAM FOR ION IMPLANTATION
- Publication number 20150102233
- Publication date Apr 16, 2015
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Robert KAIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20140342538
- Publication date Nov 20, 2014
- Advanced Technology Materials, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20140326896
- Publication date Nov 6, 2014
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...
- Publication number 20140322903
- Publication date Oct 30, 2014
- James J. Mayer
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...
- Publication number 20140090598
- Publication date Apr 3, 2014
- Advanced Technology Materials, Inc.
- Robert Kaim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...
- Publication number 20140041440
- Publication date Feb 13, 2014
- Advanced Technology Materials, Inc.
- James DIETZ
- G01 - MEASURING TESTING
Information Patent Application
ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...
- Publication number 20130264492
- Publication date Oct 10, 2013
- James J. Mayer
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ION IMPLANTER SYSTEM INCLUDING REMOTE DOPANT SOURCE, AND METHOD COM...
- Publication number 20130251913
- Publication date Sep 26, 2013
- Advanced Technology Materials, Inc.
- W. Karl Olander
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20130206788
- Publication date Aug 15, 2013
- Advanced Technology Materials, Inc.
- Robert Kaim
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
BORON ION IMPLANTATION USING ALTERNATIVE FLUORINATED BORON PRECURSO...
- Publication number 20130137250
- Publication date May 30, 2013
- Advanced Technology Materials, Inc.
- W. Karl Olander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON MATERIALS FOR CARBON IMPLANTATION
- Publication number 20130078790
- Publication date Mar 28, 2013
- Advanced Technology Materials, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20120313047
- Publication date Dec 13, 2012
- Advanced Technology Materials, Inc.
- Robert KAIM
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20120252195
- Publication date Oct 4, 2012
- Advanced Technology Materials, Inc.
- Edward E. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...
- Publication number 20120142174
- Publication date Jun 7, 2012
- Advanced Technology Materials, Inc.
- Robert KAIM
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...
- Publication number 20120108044
- Publication date May 3, 2012
- Advanced Technology Materials, Inc.
- Robert KAIM
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20120058252
- Publication date Mar 8, 2012
- Advanced Technology Materials, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20110259366
- Publication date Oct 27, 2011
- Advanced Technology Materials, Inc.
- Joseph D. Sweeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...
- Publication number 20110252883
- Publication date Oct 20, 2011
- Advanced Technology Materials, Inc.
- James Dietz
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...
- Publication number 20110159671
- Publication date Jun 30, 2011
- Advanced Technology Materials, Inc.
- Robert KAIM
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...
- Publication number 20110097882
- Publication date Apr 28, 2011
- Advanced Technology Materials, Inc.
- Robert Kaim
- C01 - INORGANIC CHEMISTRY

Robert Kaim

Person

Patents Grantslast 30 patents

Silicon implantation in substrates and provision of silicon precurs...

Carbon materials for carbon implantation

Method and apparatus for enhanced lifetime and performance of ion s...

Lower dose rate ion implantation using a wider ion beam

Isotopically-enriched boron-containing compounds, and methods of ma...

Boron ion implantation using alternative fluorinated boron precurso...

Medium current ribbon beam for ion implantation

Enriched silicon precursor compositions and apparatus and processes...

Fluid storage and dispensing system including dynamic fluid monitor...

Isotopically-enriched boron-containing compounds, and methods of ma...

Ion implantation system and method

Method and apparatus for enhanced lifetime and performance of ion s...

Ion implantation system and method

Method and apparatus for enhanced lifetime and performance of ion s...

Enriched silicon precursor compositions and apparatus and processes...

Cleaning of semiconductor processing systems

Isotopically-enriched boron-containing compounds, and methods of ma...

Fluid storage and dispensing system including dynamic fluid monitor...

Method and apparatus for enhanced lifetime and performance of ion s...

Boron ion implantation using alternative fluorinated boron precurso...

Method and apparatus for enhanced lifetime and performance of ion s...

Isotopically-enriched boron-containing compounds, and methods of ma...

Isotopically-enriched boron-containing compounds, and methods of ma...

Fluid storage and dispensing system including dynamic fluid monitor...

Boron ion implantation using alternative fluorinated boron precurso...

Methods for cleaning ion implanter components

Radial scan arm and collimator for serial processing of semiconduct...

Method and apparatus for flowing gases into a manifold at high pote...

Titanium nitride and multilayers formed by chemical vapor depositio...

Method and apparatus for high efficiency scanning in an ion implanter

Patents Applicationslast 30 patents

CARBON MATERIALS FOR CARBON IMPLANTATION

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

CARBON MATERIALS FOR CARBON IMPLANTATION

SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURS...

ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...

FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...

ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...

LOWER DOSE RATE ION IMPLANTATION USING A WIDER ION BEAM

ION IMPLANTATION SYSTEM AND METHOD

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

MEDIUM CURRENT RIBBON BEAM FOR ION IMPLANTATION

ION IMPLANTATION SYSTEM AND METHOD

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...

ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...

FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...

ENRICHED SILICON PRECURSOR COMPOSITIONS AND APPARATUS AND PROCESSES...

ION IMPLANTER SYSTEM INCLUDING REMOTE DOPANT SOURCE, AND METHOD COM...

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

BORON ION IMPLANTATION USING ALTERNATIVE FLUORINATED BORON PRECURSO...

CARBON MATERIALS FOR CARBON IMPLANTATION

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

ION IMPLANTATION SYSTEM AND METHOD

METHOD AND APPARATUS FOR ENHANCED LIFETIME AND PERFORMANCE OF ION S...

ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...

ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS

ION SOURCE CLEANING IN SEMICONDUCTOR PROCESSING SYSTEMS

FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITOR...

ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...

ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MA...