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Robert L. Anderson II
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Fremont, CA, US
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last 30 patents
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Patent Grant
Apparatus and associated method for conditioning in chemical mechan...
Patent number
7,004,825
Issue date
Feb 28, 2006
Lam Research Corporation
Travis R. Taylor
B24 - GRINDING POLISHING
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Patent Grant
Method and apparatus for an air bearing platen with raised topography
Patent number
6,752,898
Issue date
Jun 22, 2004
Lam Research Corporation
Robert L. Anderson
B24 - GRINDING POLISHING