Robert Lum

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Conditioning of grooving in polishing pads
- Patent number 9,486,893
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Hung Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi-phase polishing pad
- Patent number 8,133,096
- Issue date Mar 13, 2012
- Applied Materials, Inc.
- Ramin Emami
- B24 - GRINDING POLISHING
Information Patent Grant
System and method for chemical mechanical planarization
- Patent number 7,048,607
- Issue date May 23, 2006
- Applied Materials
- Li Wu
- B24 - GRINDING POLISHING
Information Patent Grant
Multi-phase polishing pad
- Patent number 6,857,941
- Issue date Feb 22, 2005
- Applied Materials, Inc.
- Ramin Emami
- B24 - GRINDING POLISHING
Information Patent Grant
Tungsten CMP with improved alignment mark integrity, reduced edge r...
- Patent number 6,468,136
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Robert T. Lum
- B24 - GRINDING POLISHING
Information Patent Grant
Tungsten silicide etch process selective to photoresist and oxide
- Patent number 5,338,398
- Issue date Aug 16, 1994
- Applied Materials, Inc.
- Chester A. Szwejkowski
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING OF GROOVING IN POLISHING PADS
- Publication number 20150336236
- Publication date Nov 26, 2015
- Applied Materials, Inc.
- Hung Chen
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Application
PAD PROPERTIES USING NANOPARTICLE ADDITIVES
- Publication number 20090278081
- Publication date Nov 12, 2009
- Applied Materials, Inc.
- Hichem M'Saad
- B24 - GRINDING POLISHING
Information Patent Application
Multi-phase polishing pad
- Publication number 20050189235
- Publication date Sep 1, 2005
- Ramin Emami
- B24 - GRINDING POLISHING
Information Patent Application
Multi-phase polishing pad
- Publication number 20020197946
- Publication date Dec 26, 2002
- APPLIED MATERIALS, INC.
- Ramin Emami
- B24 - GRINDING POLISHING