TREA

Robert M. Vyne

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  • Gilbert, AZ, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method and device for depositing silicon onto substrates
    • Patent number 11,901,179
    • Issue date Feb 13, 2024
    • ASM IP Holding B.V.
    • John Tolle
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas distribution apparatus for improved film uniformity in an epita...
    • Patent number 10,501,866
    • Issue date Dec 10, 2019
    • ASM IP Holding B.V.
    • Stephen Dale Coomer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods for forming silicon-containing epitaxial layers and related...
    • Patent number 10,446,393
    • Issue date Oct 15, 2019
    • ASM IP Holding B.V.
    • Nupur Bhargava
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma pre-clean module and process
    • Patent number 9,514,927
    • Issue date Dec 6, 2016
    • ASM IP Holding B.V.
    • John Tolle
    • B08 - CLEANING
  • Information Patent Grant

    Plasma pre-clean module and process
    • Patent number 9,299,557
    • Issue date Mar 29, 2016
    • ASM IP Holding B.V.
    • John Tolle
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate support system for reduced autodoping and backside deposi...
    • Patent number 8,088,225
    • Issue date Jan 3, 2012
    • ASM America, Inc.
    • Matt G. Goodman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support system
    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support system for reduced autodoping and backside deposi...
    • Patent number 7,648,579
    • Issue date Jan 19, 2010
    • ASM America, Inc.
    • Matt G. Goodman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support system
    • Patent number 7,186,298
    • Issue date Mar 6, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,692,576
    • Issue date Feb 17, 2004
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,491,757
    • Issue date Dec 10, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with downstream getter plate
    • Patent number 6,464,792
    • Issue date Oct 15, 2002
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,454,866
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,343,183
    • Issue date Jan 29, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,203,622
    • Issue date Mar 20, 2001
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and system for adjusting semiconductor processing equipment
    • Patent number 6,126,744
    • Issue date Oct 3, 2000
    • ASM America, Inc.
    • Mark Richard Hawkins
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Wafer support system
    • Patent number 6,113,702
    • Issue date Sep 5, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber with inner support
    • Patent number 6,093,252
    • Issue date Jul 25, 2000
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system
    • Patent number 6,053,982
    • Issue date Apr 25, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents