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Robert Rafilevitch Gayazov
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Troitsk, RU
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last 30 patents
Information
Patent Grant
Lithographic apparatus, radiation system and device manufacturing m...
Patent number
8,018,574
Issue date
Sep 13, 2011
ASML Netherlands B.V.
Robert Rafilevitch Gayazov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
Patent number
7,528,395
Issue date
May 5, 2009
ASML Netherlands B.V.
Konstantin Nikolaevitch Koshelev
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Electromagnetic radiation source, lithographic apparatus, device ma...
Patent number
7,462,851
Issue date
Dec 9, 2008
ASML Netherlands B.V.
Vadim Yevgenyevich Banine
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
Patent number
7,335,900
Issue date
Feb 26, 2008
ASML Netherlands B.V.
Konstantin Nikolaevitch Koshelev
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
Patent number
7,208,746
Issue date
Apr 24, 2007
ASML Netherlands B.V.
Konstantin Nikolaevitch Koshelev
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Electromagnetic radiation source, lithographic apparatus, device ma...
Publication number
20070069159
Publication date
Mar 29, 2007
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus, radiation system and device manufacturing m...
Publication number
20070001126
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Robert Rafilevitch Gayazov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation generating device, lithographic apparatus, device manufac...
Publication number
20060071180
Publication date
Apr 6, 2006
ASML NETHERLANDS B.V.
Konstantin Nikolaevitch Koshelev
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation generating device, lithographic apparatus, device manufac...
Publication number
20060011864
Publication date
Jan 19, 2006
ASML NETHERLANDS B.V.
Konstantin Nikolaevitch Koshelev
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation source, lithographic apparatus and device manufacturing m...
Publication number
20040105082
Publication date
Jun 3, 2004
ASML NETHERLANDS B.V.
Konstantin Nikolaevitch Koshelev
F28 - HEAT EXCHANGE IN GENERAL