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Robert Sunier
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Zurich, CH
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Patents Grants
last 30 patents
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Patent Grant
Membrane-based sensor device with non-dielectric etch-stop layer ar...
Patent number
9,224,658
Issue date
Dec 29, 2015
Sensirion AG
Robert Sunier
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing an intergrated pressure sensor
Patent number
8,815,623
Issue date
Aug 26, 2014
Sensirion AG
Johannes Bühler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor having a chamber and a method for fabricating the same
Patent number
7,704,774
Issue date
Apr 27, 2010
Sensirion Holding AG
Felix Mayer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonator-based magnetic field sensor
Patent number
7,696,749
Issue date
Apr 13, 2010
Sensirion Holding AG
Robert Sunier
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CHEMICAL SENSOR AND METHOD FOR MANUFACTURING SUCH A CHEMICAL SENSOR
Publication number
20140225202
Publication date
Aug 14, 2014
Felix MAYER
G01 - MEASURING TESTING
Information
Patent Application
MEMBRANE-BASED SENSOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20140210036
Publication date
Jul 31, 2014
Robert SUNIER
G01 - MEASURING TESTING
Information
Patent Application
Method for manufacturing an intergrated pressure sensor
Publication number
20100055821
Publication date
Mar 4, 2010
Johannes Bühler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONATOR-BASED MAGNETIC FIELD SENSOR
Publication number
20090015250
Publication date
Jan 15, 2009
Robert Sunier
G01 - MEASURING TESTING
Information
Patent Application
Method for fabricating a pressure sensor using SOI wafers
Publication number
20070275495
Publication date
Nov 29, 2007
Sensirion AG
Felix Mayer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pressure sensor having a chamber and a method for fabricating the same
Publication number
20070275494
Publication date
Nov 29, 2007
Felix Mayer
B81 - MICRO-STRUCTURAL TECHNOLOGY