Robert W. Berner

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plating system for semiconductor materials
- Patent number 7,087,143
- Issue date Aug 8, 2006
- Semitool, Inc.
- Wayne J. Schmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 7,074,246
- Issue date Jul 11, 2006
- Semitool, Inc.
- Robert W. Berner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system with wafer container docking and lo...
- Patent number 6,960,257
- Issue date Nov 1, 2005
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,843,894
- Issue date Jan 18, 2005
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor processing system with wafer container docking and lo...
- Patent number 6,833,035
- Issue date Dec 21, 2004
- Semitool, Inc.
- Raymond F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact assembly for supplying power to workpieces during electroch...
- Patent number 6,805,778
- Issue date Oct 19, 2004
- Semitool, Inc.
- Robert W. Batz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,627,051
- Issue date Sep 30, 2003
- Semitool, Inc.
- Robert W. Berner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for plating semiconductor workpieces using a workpiece-enga...
- Patent number 6,461,494
- Issue date Oct 8, 2002
- Semitool, Inc.
- Robert W. Batz
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor plating system workpiece support having workpiece-eng...
- Patent number 6,454,926
- Issue date Sep 24, 2002
- Semitool Inc.
- Thomas L. Ritzdorf
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,440,178
- Issue date Aug 27, 2002
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,322,674
- Issue date Nov 27, 2001
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor processing using vapor mixtures
- Patent number 6,319,841
- Issue date Nov 20, 2001
- Semitool, Inc.
- Eric J. Bergman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular semiconductor workpiece processing tool
- Patent number 6,203,582
- Issue date Mar 20, 2001
- Semitool, Inc.
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor processing using vapor mixtures
- Patent number 6,162,734
- Issue date Dec 19, 2000
- Semitool, Inc.
- Eric J. Bergman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,139,703
- Issue date Oct 31, 2000
- Semitool, Inc.
- Kyle M. Hanson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Process architecture and manufacturing tool sets employing hard mas...
- Patent number 6,120,641
- Issue date Sep 19, 2000
- Semitool, Inc.
- E. Henry Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system
- Patent number 6,014,817
- Issue date Jan 18, 2000
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode current control system for a wafer electroplating apparatus
- Patent number 6,004,440
- Issue date Dec 21, 1999
- Semitool, Inc.
- Kyle M. Hanson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods for plating semiconductor workpieces using a workpiece-enga...
- Patent number 6,001,234
- Issue date Dec 14, 1999
- Semitool, Inc.
- Robert W. Batz
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor wafer processing system with immersion module
- Patent number 5,996,241
- Issue date Dec 7, 1999
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing using vapor mixtures
- Patent number 5,954,911
- Issue date Sep 21, 1999
- Semitool, Inc.
- Eric J. Bergman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing systems
- Patent number 5,882,168
- Issue date Mar 16, 1999
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system with wafer container docking and lo...
- Patent number 5,836,736
- Issue date Nov 17, 1998
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system
- Patent number 5,788,454
- Issue date Aug 4, 1998
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing systems
- Patent number 5,784,802
- Issue date Jul 28, 1998
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrierless centrifugal semiconductor processing system
- Patent number 5,784,797
- Issue date Jul 28, 1998
- Semitool, Inc.
- Gary L. Curtis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing head for semiconductor processing machines
- Patent number 5,731,678
- Issue date Mar 24, 1998
- Semitool, Inc.
- Vladimir Zila
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing systems
- Patent number 5,678,320
- Issue date Oct 21, 1997
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system with wafer container docking and lo...
- Patent number 5,660,517
- Issue date Aug 26, 1997
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer processing system
- Patent number 5,544,421
- Issue date Aug 13, 1996
- Semitool, Inc.
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plating apparatus and method
- Publication number 20050230260
- Publication date Oct 20, 2005
- Surfect Technologies, Inc.
- Martin Bleck
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20050193537
- Publication date Sep 8, 2005
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Cathode current control system for a wafer electroplating apparatus
- Publication number 20040055879
- Publication date Mar 25, 2004
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods for plating semiconductor workpieces using a workpiece-enga...
- Publication number 20040035707
- Publication date Feb 26, 2004
- Robert W. Batz
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Semiconductor processing system with wafer container docking and lo...
- Publication number 20030202871
- Publication date Oct 30, 2003
- Raymon F. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor plating system workpiece support having workpiece-eng...
- Publication number 20030029732
- Publication date Feb 13, 2003
- Thomas L. Ritzdorf
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20020194716
- Publication date Dec 26, 2002
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Cathode current control system for a wafer electroplating apparatus
- Publication number 20020003084
- Publication date Jan 10, 2002
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Modular semiconductor workpiece processing tool
- Publication number 20010030101
- Publication date Oct 18, 2001
- Robert W. Berner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Robert W. Berner

Person

Patents Grantslast 30 patents

Plating system for semiconductor materials

Modular semiconductor workpiece processing tool

Semiconductor processing system with wafer container docking and lo...

Cathode current control system for a wafer electroplating apparatus

Semiconductor processing system with wafer container docking and lo...

Contact assembly for supplying power to workpieces during electroch...

Cathode current control system for a wafer electroplating apparatus

Methods for plating semiconductor workpieces using a workpiece-enga...

Semiconductor plating system workpiece support having workpiece-eng...

Modular semiconductor workpiece processing tool

Cathode current control system for a wafer electroplating apparatus

Semiconductor processing using vapor mixtures

Modular semiconductor workpiece processing tool

Semiconductor processing using vapor mixtures

Cathode current control system for a wafer electroplating apparatus

Process architecture and manufacturing tool sets employing hard mas...

Semiconductor wafer processing system

Cathode current control system for a wafer electroplating apparatus

Methods for plating semiconductor workpieces using a workpiece-enga...

Semiconductor wafer processing system with immersion module

Semiconductor processing using vapor mixtures

Semiconductor processing systems

Semiconductor processing system with wafer container docking and lo...

Semiconductor wafer processing system

Semiconductor processing systems

Carrierless centrifugal semiconductor processing system

Processing head for semiconductor processing machines

Semiconductor processing systems

Semiconductor processing system with wafer container docking and lo...

Semiconductor wafer processing system

Patents Applicationslast 30 patents

Plating apparatus and method

Modular semiconductor workpiece processing tool

Cathode current control system for a wafer electroplating apparatus

Methods for plating semiconductor workpieces using a workpiece-enga...

Semiconductor processing system with wafer container docking and lo...

Semiconductor plating system workpiece support having workpiece-eng...

Modular semiconductor workpiece processing tool

Cathode current control system for a wafer electroplating apparatus

Modular semiconductor workpiece processing tool