Robin A. Gardiner

Person

Bethel, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metal complex source reagents for chemical vapor deposition
- Patent number 6,126,996
- Issue date Oct 3, 2000
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method of forming metal films on a substrate by chemical vapor depo...
- Patent number 6,110,529
- Issue date Aug 29, 2000
- Robin A. Gardiner
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Growth of BaSrTiO.sub.3 using polyamine-based precursors
- Patent number 5,919,522
- Issue date Jul 6, 1999
- Advanced Technology Materials, Inc.
- Thomas H. Baum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complex source reagents for chemical vapor deposition
- Patent number 5,840,897
- Issue date Nov 24, 1998
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Precursor compositions for chemical vapor deposition, and ligand ex...
- Patent number 5,820,664
- Issue date Oct 13, 1998
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source reagent liquid delivery apparatus, and chemical vapor deposi...
- Patent number 5,711,816
- Issue date Jan 27, 1998
- Advanced Technolgy Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method for refractory materials
- Patent number 5,705,443
- Issue date Jan 6, 1998
- Advanced Technology Materials, Inc.
- Gregory Stauf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for flash vaporization delivery of reagents
- Patent number 5,536,323
- Issue date Jul 16, 1996
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal complex source reagents for MOCVD
- Patent number 5,453,494
- Issue date Sep 26, 1995
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for protection of pumps used for delivery of a...
- Patent number 5,431,957
- Issue date Jul 11, 1995
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivering reagents in vapor form to a CVD...
- Patent number 5,362,328
- Issue date Nov 8, 1994
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for protection of pumps used for delivery of a...
- Patent number 5,337,651
- Issue date Aug 16, 1994
- Advanced Technology Materials, Inc.
- Robin A. Gardiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a superconducting oxide layer by MOCVD
- Patent number 5,280,012
- Issue date Jan 18, 1994
- Advanced Technology Materials Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source reagent compounds for MOCVD of refractory films containing g...
- Patent number 5,225,561
- Issue date Jul 6, 1993
- Advanced Technology Materials, Inc.
- Peter S. Kirlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robin A. Gardiner

Person

Patents Grantslast 30 patents

Metal complex source reagents for chemical vapor deposition

Method of forming metal films on a substrate by chemical vapor depo...

Growth of BaSrTiO.sub.3 using polyamine-based precursors

Metal complex source reagents for chemical vapor deposition

Precursor compositions for chemical vapor deposition, and ligand ex...

Source reagent liquid delivery apparatus, and chemical vapor deposi...

Etching method for refractory materials

Apparatus for flash vaporization delivery of reagents

Metal complex source reagents for MOCVD

Apparatus and method for protection of pumps used for delivery of a...

Apparatus and method for delivering reagents in vapor form to a CVD...

Apparatus and method for protection of pumps used for delivery of a...

Method of forming a superconducting oxide layer by MOCVD

Source reagent compounds for MOCVD of refractory films containing g...