Rodney C. Smedt

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for measuring a sample by x-ray reflectance scatt...
- Patent number 11,874,237
- Issue date Jan 16, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,764,050
- Issue date Sep 19, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,430,647
- Issue date Aug 30, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,910,208
- Issue date Feb 2, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,859,519
- Issue date Dec 8, 2020
- NOVA MEASURING INSTRUMENTS, INC.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,636,644
- Issue date Apr 28, 2020
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,481,112
- Issue date Nov 19, 2019
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,403,489
- Issue date Sep 3, 2019
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 10,119,925
- Issue date Nov 6, 2018
- Nova Measuring Instruments Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 10,056,242
- Issue date Aug 21, 2018
- Nova Measuring Instruments Inc.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for measuring periodic structures using multi-a...
- Patent number 9,588,066
- Issue date Mar 7, 2017
- ReVera, Incorporated
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for fabricating platelets of a monochromator fo...
- Patent number 9,297,771
- Issue date Mar 29, 2016
- ReVera, Incorporated
- Jeffrey T. Fanton
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for characterizing a film by X-ray photoelectron...
- Patent number 9,240,254
- Issue date Jan 19, 2016
- Revera, Incorporated
- Bruno W. Schueler
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,502,979
- Issue date Aug 6, 2013
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 8,179,530
- Issue date May 15, 2012
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining a critical dimension and overla...
- Patent number 7,751,046
- Issue date Jul 6, 2010
- KLA-Tencor Technologies Corp.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Grant
Backside contamination inspection device
- Patent number 7,724,357
- Issue date May 25, 2010
- KLA-Tencor Corporation
- Rodney C. Smedt
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching and damping measuremen...
- Patent number 7,663,746
- Issue date Feb 16, 2010
- KLA-Tencor Techologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,436,506
- Issue date Oct 14, 2008
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring periodic structures
- Patent number 7,433,037
- Issue date Oct 7, 2008
- KLA-Tencor Technologies Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Backside contamination inspection device
- Patent number 7,209,227
- Issue date Apr 24, 2007
- KLA-Tencor Corporation
- Rodney C. Smedt
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of overlay using diffraction gratings when overlay exce...
- Patent number 7,193,715
- Issue date Mar 20, 2007
- Tokyo Electron Limited
- Rodney Smedt
- G01 - MEASURING TESTING
Information Patent Grant
Backside contamination inspection device
- Patent number 7,038,771
- Issue date May 2, 2006
- KLA-Tencor Corporation
- Rodney G Smedt
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,009,696
- Issue date Mar 7, 2006
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Accurate small-spot spectrometry systems and methods
- Patent number 6,870,617
- Issue date Mar 22, 2005
- Therma-Wave, Inc.
- Adam Norton
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for determining at least one characteristic of...
- Patent number 6,806,951
- Issue date Oct 19, 2004
- KLA-Tencor Technologies Corp.
- Dan Wack
- G01 - MEASURING TESTING
Information Patent Grant
Accurate small-spot spectrometry instrument
- Patent number 6,738,136
- Issue date May 18, 2004
- Therma-Wave, Inc.
- Adam Norton
- G01 - MEASURING TESTING
Information Patent Grant
Systems for measuring periodic structures
- Patent number 6,721,052
- Issue date Apr 13, 2004
- KLA-Technologies Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Edge handling wafer chuck
- Patent number 6,702,302
- Issue date Mar 9, 2004
- KLA-Tencor Corporation
- Rodney G Smedt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 6,686,996
- Issue date Feb 3, 2004
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...
- Publication number 20240345006
- Publication date Oct 17, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20240087869
- Publication date Mar 14, 2024
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20230091625
- Publication date Mar 23, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20210305037
- Publication date Sep 30, 2021
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...
- Publication number 20210164924
- Publication date Jun 3, 2021
- NOVA MEASURING INSTRUMENTS LTD.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20200258733
- Publication date Aug 13, 2020
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20200088656
- Publication date Mar 19, 2020
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20190385831
- Publication date Dec 19, 2019
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20190086342
- Publication date Mar 21, 2019
- Nova Measuring Instruments, Inc.
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20180330935
- Publication date Nov 15, 2018
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20180025897
- Publication date Jan 25, 2018
- ReVera, Incorporated
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20170176354
- Publication date Jun 22, 2017
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...
- Publication number 20150204802
- Publication date Jul 23, 2015
- Heath A. Pois
- G01 - MEASURING TESTING
Information Patent Application
Methods and Systems for Fabricating Platelets of a Monochromator fo...
- Publication number 20150052723
- Publication date Feb 26, 2015
- Jeffrey T. Fanton
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Methods and Systems for Determining a Critical Dimension and Overla...
- Publication number 20130314710
- Publication date Nov 28, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON...
- Publication number 20130077742
- Publication date Mar 28, 2013
- Bruno W. Schueler
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20130039460
- Publication date Feb 14, 2013
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...
- Publication number 20100271621
- Publication date Oct 28, 2010
- KLA-Tencor Technologies Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching and damping measuremen...
- Publication number 20090040514
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Backside contamination inspection device
- Publication number 20070188745
- Publication date Aug 16, 2007
- KLA-Tencor Corporation
- Rodney C. Smedt
- G01 - MEASURING TESTING
Information Patent Application
System for Measuring Periodic Structures
- Publication number 20060290931
- Publication date Dec 28, 2006
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20060232770
- Publication date Oct 19, 2006
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Backside contamination inspection device
- Publication number 20060187445
- Publication date Aug 24, 2006
- KLA-Tencor Corporation
- Rodney C. Smedt
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20050099627
- Publication date May 12, 2005
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Backside contamination inspection device
- Publication number 20050073676
- Publication date Apr 7, 2005
- Rodney C. Smedt
- G01 - MEASURING TESTING
Information Patent Application
Methods and systems for determining a critical dimension and overla...
- Publication number 20040235205
- Publication date Nov 25, 2004
- KLA-Tencor, Inc.
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Accurate small-spot spectrometry systems and methods
- Publication number 20040174524
- Publication date Sep 9, 2004
- Adam Norton
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20040145733
- Publication date Jul 29, 2004
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
System for measuring periodic structures
- Publication number 20040141177
- Publication date Jul 22, 2004
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Measurement of overlay using diffraction gratings when overlay exce...
- Publication number 20040137651
- Publication date Jul 15, 2004
- Rodney Smedt
- G01 - MEASURING TESTING

Rodney C. Smedt

Person

Patents Grantslast 30 patents

System and method for measuring a sample by x-ray reflectance scatt...

Systems and approaches for semiconductor metrology and surface anal...

Systems and approaches for semiconductor metrology and surface anal...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

Systems and approaches for semiconductor metrology and surface anal...

Methods and systems for measuring periodic structures using multi-a...

Methods and systems for fabricating platelets of a monochromator fo...

System and method for characterizing a film by X-ray photoelectron...

Methods and systems for determining a critical dimension and overla...

Methods and systems for determining a critical dimension and overla...

Methods and systems for determining a critical dimension and overla...

Backside contamination inspection device

Method and apparatus for scanning, stitching and damping measuremen...

Method and apparatus for scanning, stitching, and damping measureme...

System for measuring periodic structures

Backside contamination inspection device

Measurement of overlay using diffraction gratings when overlay exce...

Backside contamination inspection device

Method and apparatus for scanning, stitching, and damping measureme...

Accurate small-spot spectrometry systems and methods

Methods and systems for determining at least one characteristic of...

Accurate small-spot spectrometry instrument

Systems for measuring periodic structures

Edge handling wafer chuck

Method and apparatus for scanning, stitching, and damping measureme...

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEM AND METHOD FOR MEASURING A SAMPLE BY X-RAY REFLECTANCE SCATT...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-A...

Methods and Systems for Fabricating Platelets of a Monochromator fo...

Methods and Systems for Determining a Critical Dimension and Overla...

SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

METHODS AND SYSTEMS FOR DETERMINING A CRITICAL DIMENSION AND OVERLA...

Method and apparatus for scanning, stitching and damping measuremen...

Backside contamination inspection device

System for Measuring Periodic Structures

Method and apparatus for scanning, stitching, and damping measureme...

Backside contamination inspection device

System for measuring periodic structures

Backside contamination inspection device

Methods and systems for determining a critical dimension and overla...

Accurate small-spot spectrometry systems and methods

Method and apparatus for scanning, stitching, and damping measureme...

System for measuring periodic structures

Measurement of overlay using diffraction gratings when overlay exce...