Roger Patrick

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma initiating assembly
- Patent number 6,062,163
- Issue date May 16, 2000
- LSI Logic Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for igniting low pressure inductively coupled plasma
- Patent number 5,639,519
- Issue date Jun 17, 1997
- LSI Logic Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coil configurations for improved uniformity in inductively coupled...
- Patent number 5,578,165
- Issue date Nov 26, 1996
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power control and delivery in plasma processing equipment
- Patent number 5,556,549
- Issue date Sep 17, 1996
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for via formation and filling
- Patent number 5,532,516
- Issue date Jul 2, 1996
- LSI Logic Corportion
- Nicholas F. Pasch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform and repeatable plasma processing
- Patent number 5,474,648
- Issue date Dec 12, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for via formation and filling
- Patent number 5,471,091
- Issue date Nov 28, 1995
- LSI Logic Corporation
- Nicholas F. Pasch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for igniting low pressure inductively coupled plasma
- Patent number 5,468,296
- Issue date Nov 21, 1995
- LSI Logic Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
End-point detection in plasma etching by monitoring radio frequency...
- Patent number 5,407,524
- Issue date Apr 18, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coil configurations for improved uniformity in inductively coupled...
- Patent number 5,401,350
- Issue date Mar 28, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of uniform dimension conductive lines on a semiconductor...
- Patent number 5,354,706
- Issue date Oct 11, 1994
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Densifying and polishing glass layers
- Patent number 5,217,566
- Issue date Jun 8, 1993
- LSI Logic Corporation
- Nicholas F. Pasch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization process
- Patent number 4,879,257
- Issue date Nov 7, 1989
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS

Roger Patrick

Person

Patents Grantslast 30 patents

Plasma initiating assembly

Method for igniting low pressure inductively coupled plasma

Coil configurations for improved uniformity in inductively coupled...

Power control and delivery in plasma processing equipment

Techniques for via formation and filling

Uniform and repeatable plasma processing

Techniques for via formation and filling

Apparatus for igniting low pressure inductively coupled plasma

End-point detection in plasma etching by monitoring radio frequency...

Coil configurations for improved uniformity in inductively coupled...

Formation of uniform dimension conductive lines on a semiconductor...

Densifying and polishing glass layers

Planarization process