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Rolf Bremensdorfer
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Patents Grants
last 30 patents
Information
Patent Grant
Workpiece processing apparatus with thermal processing systems
Patent number
12,183,558
Issue date
Dec 31, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support structure for thermal processing systems
Patent number
12,176,241
Issue date
Dec 24, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Nitrogen injection for arc lamps
Patent number
12,120,780
Issue date
Oct 15, 2024
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arc lamp with forming gas for thermal processing systems
Patent number
12,119,216
Issue date
Oct 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support plate for localized heating in thermal processing systems
Patent number
12,080,568
Issue date
Sep 3, 2024
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rapid thermal processing system with cooling system
Patent number
12,068,177
Issue date
Aug 20, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with thermal processing systems
Patent number
12,046,489
Issue date
Jul 23, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
Patent number
11,955,388
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,837,447
Issue date
Dec 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing system with transmission switch plate
Patent number
11,812,523
Issue date
Nov 7, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Michael X. Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Transmission-based temperature measurement of a workpiece in a ther...
Patent number
11,610,824
Issue date
Mar 21, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
G01 - MEASURING TESTING
Information
Patent Grant
Support plate for localized heating in thermal processing systems
Patent number
11,521,868
Issue date
Dec 6, 2022
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing of closed shape workpieces
Patent number
11,193,178
Issue date
Dec 7, 2021
Beijing E-Town Semiconductor Technology Co., Ltd.
Rolf Bremensdorfer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Nitrogen injection for ARC lamps
Patent number
10,966,286
Issue date
Mar 30, 2021
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing a calibration wafer
Patent number
7,169,717
Issue date
Jan 30, 2007
Mattson Thermal Products GmbH
Christoph Merkl
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20240387205
Publication date
Nov 21, 2024
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20240379390
Publication date
Nov 14, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20240347356
Publication date
Oct 17, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
Publication number
20240290664
Publication date
Aug 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
G01 - MEASURING TESTING
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20240055242
Publication date
Feb 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arc Lamp With Forming Gas For Thermal Processing Systems
Publication number
20230352294
Publication date
Nov 2, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael X. Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
Publication number
20230230887
Publication date
Jul 20, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Michael Storek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20230098442
Publication date
Mar 30, 2023
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20220208572
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Support For A Thermal Processing System
Publication number
20220205478
Publication date
Jun 30, 2022
Mattson Technology, Inc.
Manuel Sohn
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Workpiece Processing Apparatus with Vacuum Anneal Reflector Control
Publication number
20220199376
Publication date
Jun 23, 2022
Mattson Technology, Inc.
Michael Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Gas Showerhead Assembly
Publication number
20220195601
Publication date
Jun 23, 2022
Mattson Technology, Inc.
Michael Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
Publication number
20220189747
Publication date
Jun 16, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20220187021
Publication date
Jun 16, 2022
Mattson Technology, Inc.
Manuel Sohn
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
Thermal Processing of Closed Shape Workpieces
Publication number
20220090221
Publication date
Mar 24, 2022
Mattson Technology, Inc.
Rolf Bremensdorfer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20220059363
Publication date
Feb 24, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Rapid Thermal Processing System With Cooling System
Publication number
20220059371
Publication date
Feb 24, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Nitrogen Injection for ARC Lamps
Publication number
20210307115
Publication date
Sep 30, 2021
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Structure for Thermal Processing Systems
Publication number
20210272839
Publication date
Sep 2, 2021
Mattson Technology, Inc.
Manuel Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transmission-Based Temperature Measurement of a Workpiece in a Ther...
Publication number
20210272858
Publication date
Sep 2, 2021
Mattson Technology, Inc.
Michael Storek
G01 - MEASURING TESTING
Information
Patent Application
Thermal Processing System With Transmission Switch Plate
Publication number
20200396798
Publication date
Dec 17, 2020
Mattson Technology, Inc.
Michael X. Yang
G02 - OPTICS
Information
Patent Application
Systems And Methods For Thermal Processing And Temperature Measurem...
Publication number
20200064198
Publication date
Feb 27, 2020
Mattson Technology, Inc.
Rolf Bremensdorfer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20190295869
Publication date
Sep 26, 2019
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal Processing of Closed Shape Workpieces
Publication number
20190127818
Publication date
May 2, 2019
Mattson Technology, Inc.
Rolf Bremensdorfer
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Nitrogen Injection for ARC Lamps
Publication number
20170196046
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrode Tip for ARC Lamp
Publication number
20170194133
Publication date
Jul 6, 2017
Mattson Technology, Inc.
Markus Lieberer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of producing a calibration wafer
Publication number
20060040478
Publication date
Feb 23, 2006
Christoph Merkl
G01 - MEASURING TESTING