Rudolf Latz

Person

Rodgau, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for controlling a reactive sputtering process
- Patent number 5,556,520
- Issue date Sep 17, 1996
- Leybold Aktiengesellschaft
- Rudolf Latz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave-enhanced sputtering configuration
- Patent number 5,531,877
- Issue date Jul 2, 1996
- Leybold Aktiengesellschaft
- Rudolf Latz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma sputtering installation with microwave enhancement
- Patent number 5,478,459
- Issue date Dec 26, 1995
- Leybold Aktiengesellschaft
- Rudolf Latz
- G11 - INFORMATION STORAGE
Information Patent Grant
Arrangement for generating a plasma by means of cathode sputtering
- Patent number 5,417,834
- Issue date May 23, 1995
- Leybold Aktiengesellschaft
- Rudolf Latz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for generating a plasma by means of cathode sputtering and m...
- Patent number 5,397,448
- Issue date Mar 14, 1995
- Leybold Aktiengesellschaft
- Roland Gesche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transport and heat treatment of substrates
- Patent number 5,244,559
- Issue date Sep 14, 1993
- Leybold Aktiengesellschaft
- Rudolf Latz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for the reactive coating of a substrate
- Patent number 5,169,509
- Issue date Dec 8, 1992
- Leybold Aktiengesellschaft
- Rudolf Latz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for coating a substrate
- Patent number 5,167,789
- Issue date Dec 1, 1992
- Leybold Aktiengesellschaft
- Rudolf Latz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for coating a substrate
- Patent number 5,026,471
- Issue date Jun 25, 1991
- Leybold Aktiengesellschaft
- Rudolf Latz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave cathode sputtering arrangement
- Patent number 5,006,219
- Issue date Apr 9, 1991
- Leybold Aktiengesellschaft
- Rudolf Latz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for etching substrates with a luminous discharge
- Patent number 4,954,201
- Issue date Sep 4, 1990
- Leybold Aktiengesellschaft
- Rudolf Latz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for coating a substrate with dielectrics
- Patent number 4,931,169
- Issue date Jun 5, 1990
- Leybold Aktiengesellschaft
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rudolf Latz

Person

Patents Grantslast 30 patents

Method for controlling a reactive sputtering process

Microwave-enhanced sputtering configuration

Plasma sputtering installation with microwave enhancement

Arrangement for generating a plasma by means of cathode sputtering

Device for generating a plasma by means of cathode sputtering and m...

Apparatus for transport and heat treatment of substrates

Apparatus for the reactive coating of a substrate

Apparatus for coating a substrate

Device for coating a substrate

Microwave cathode sputtering arrangement

Apparatus for etching substrates with a luminous discharge

Apparatus for coating a substrate with dielectrics