Rudy F. Garcia

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 11,419,202
- Issue date Aug 16, 2022
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generation for a laser produced plasma light source
- Patent number 11,343,899
- Issue date May 24, 2022
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum actuator containment for molecular contaminant and particle...
- Patent number 11,156,926
- Issue date Oct 26, 2021
- KLA Corporation
- Zefram D. Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for cleaning optical surfaces of an extreme ultra...
- Patent number 10,953,441
- Issue date Mar 23, 2021
- KLA Corporation
- Gildardo Delgado
- B08 - CLEANING
Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 10,893,599
- Issue date Jan 12, 2021
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generation for a laser produced plasma light source
- Patent number 10,880,979
- Issue date Dec 29, 2020
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for photocathode illumination inspection
- Patent number 10,840,055
- Issue date Nov 17, 2020
- KLA Corporation
- Gildardo Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photocathode designs and methods of generating an electron beam usi...
- Patent number 10,804,069
- Issue date Oct 13, 2020
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generation and measurement
- Patent number 10,748,737
- Issue date Aug 18, 2020
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photocathode emitter system that generates multiple electron beams
- Patent number 10,741,354
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Gildardo R. Delgado
- G01 - MEASURING TESTING
Information Patent Grant
Metal protective layer for electron emitters with a diffusion barrier
- Patent number 10,714,294
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Frances Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal encapsulated photocathode electron emitter
- Patent number 10,714,295
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Neutral atom imaging system
- Patent number 10,714,307
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon electron emitter designs
- Patent number 10,607,806
- Issue date Mar 31, 2020
- KLA-Tencor Corporation
- Frances Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photocathode designs and methods of generating an electron beam usi...
- Patent number 10,535,493
- Issue date Jan 14, 2020
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- G02 - OPTICS
Information Patent Grant
Ruthenium encapsulated photocathode electron emitter
- Patent number 10,395,884
- Issue date Aug 27, 2019
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam emitters with ruthenium coating
- Patent number 10,141,155
- Issue date Nov 27, 2018
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser produced plasma light source having a target material coated...
- Patent number 10,021,773
- Issue date Jul 10, 2018
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High brightness boron-containing electron beam emitters for use in...
- Patent number 9,984,846
- Issue date May 29, 2018
- KLA-Tencor Corporation
- William G. Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for gas flow mitigation of molecular contaminatio...
- Patent number 9,874,512
- Issue date Jan 23, 2018
- KLA-Tencor Corporation
- Gildardo Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for cleaning EUV optical elements
- Patent number 9,810,991
- Issue date Nov 7, 2017
- KLA-Tencor Corporation
- Frank Chilese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generation of extreme ultraviolet light
- Patent number 9,544,984
- Issue date Jan 10, 2017
- KLA-Tencor Corporation
- Alexander Bykanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas bearing assembly for an EUV light source
- Patent number 9,422,978
- Issue date Aug 23, 2016
- KLA-Tencor Corporation
- Francis C. Chilese
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Methods and apparatus for use with extreme ultraviolet light having...
- Patent number 9,389,180
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Francis C. Chilese
- G01 - MEASURING TESTING
Information Patent Grant
Particle control near reticle and optics using showerhead
- Patent number 9,244,368
- Issue date Jan 26, 2016
- KLA-Tencor Corporation
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and systems for measuring a characteristic of a substrate o...
- Patent number 8,765,496
- Issue date Jul 1, 2014
- KLA-Tencor Technologies Corp.
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for forming an electrical conduction path thr...
- Patent number 8,618,513
- Issue date Dec 31, 2013
- KLA-Tencor Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transverse focusing action in hyperbolic field detectors
- Patent number 8,237,120
- Issue date Aug 7, 2012
- KLA-Tencor Corporation
- Gabor Toth
- G01 - MEASURING TESTING
Information Patent Grant
Structural modification using electron beam activated chemical etch
- Patent number 8,052,885
- Issue date Nov 8, 2011
- KLA-Tencor Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch selectivity enhancement in electron beam activated chemical etch
- Patent number 7,879,730
- Issue date Feb 1, 2011
- KLA-Tencor Technologies Corporation
- Mehran Naser-Ghodsi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR POSITIONING OPTICAL ISOLATOR ASSEMBLY WITH...
- Publication number 20230122832
- Publication date Apr 20, 2023
- KLA Corporation
- Yaojun Xu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20210136903
- Publication date May 6, 2021
- KLA Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE
- Publication number 20210105886
- Publication date Apr 8, 2021
- KLA Corporation
- Brian Ahr
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE...
- Publication number 20210048756
- Publication date Feb 18, 2021
- KLA Corporation
- Zefram D. Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS
- Publication number 20200279713
- Publication date Sep 3, 2020
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USI...
- Publication number 20200111637
- Publication date Apr 9, 2020
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- G02 - OPTICS
Information Patent Application
METAL ENCAPSULATED PHOTOCATHODE ELECTRON EMITTER
- Publication number 20200090895
- Publication date Mar 19, 2020
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Neutral Atom Imaging System
- Publication number 20190378684
- Publication date Dec 12, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER
- Publication number 20190362927
- Publication date Nov 28, 2019
- KLA-Tencor Corporation
- Frances Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Photocathode Illumination Inspection
- Publication number 20190295804
- Publication date Sep 26, 2019
- KLA-Tencor Corporation
- Gildardo Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USI...
- Publication number 20190108964
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUTHENIUM ENCAPSULATED PHOTOCATHODE ELECTRON EMITTER
- Publication number 20190108966
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON ELECTRON EMITTER DESIGNS
- Publication number 20190108963
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Frances Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM GENERATION AND MEASUREMENT
- Publication number 20190108967
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Katerina Ioakeimidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20190075641
- Publication date Mar 7, 2019
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electron Beam Emitters with Ruthenium Coating
- Publication number 20180174794
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Gildardo R. Delgado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH BRIGHTNESS BORON-CONTAINING ELECTRON BEAM EMITTERS FOR USE IN...
- Publication number 20180005791
- Publication date Jan 4, 2018
- KLA-Tencor Corporation
- William G. Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
- Publication number 20170142817
- Publication date May 18, 2017
- KLA-Tencor Corporation
- Alexey Kuritsyn
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Droplet Generation for a Laser Produced Plasma Light Source
- Publication number 20170131129
- Publication date May 11, 2017
- KLA-Tencor Corporation
- Brian Ahr
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Cleaning EUV Optical Elements
- Publication number 20150253675
- Publication date Sep 10, 2015
- KLA-Tencor Corporation
- Frank Chilese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS BEARING ASSEMBLY FOR AN EUV LIGHT SOURCE
- Publication number 20140376842
- Publication date Dec 25, 2014
- Francis C. Chilese
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHOD AND SYSTEM FOR GAS FLOW MITIGATION OF MOLECULAR CONTAMINATIO...
- Publication number 20140362366
- Publication date Dec 11, 2014
- Gildardo Delgado
- G01 - MEASURING TESTING
Information Patent Application
Methods and Systems for Measuring a Characteristic of a Substrate o...
- Publication number 20140291516
- Publication date Oct 2, 2014
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Cleaning Optical Surfaces of an Extreme Ultra...
- Publication number 20140261568
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Gildardo Delgado
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...
- Publication number 20140231659
- Publication date Aug 21, 2014
- Frank Chilese
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING D...
- Publication number 20140166051
- Publication date Jun 19, 2014
- KLA-Tencor Corporation
- Karl R. Umstadter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD
- Publication number 20140085618
- Publication date Mar 27, 2014
- Gildardo R. Delgado
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...
- Publication number 20120298879
- Publication date Nov 29, 2012
- Tomas PLETTNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...
- Publication number 20080264905
- Publication date Oct 30, 2008
- Mehran Nasser-Ghodsi
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH
- Publication number 20070158303
- Publication date Jul 12, 2007
- KLA-Tencor Technologies Corporation
- MEHRAN NASSER-GHODSI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rudy F. Garcia

Person

Patents Grantslast 30 patents

Laser produced plasma light source having a target material coated...

Droplet generation for a laser produced plasma light source

Vacuum actuator containment for molecular contaminant and particle...

System and method for cleaning optical surfaces of an extreme ultra...

Laser produced plasma light source having a target material coated...

Droplet generation for a laser produced plasma light source

System and method for photocathode illumination inspection

Photocathode designs and methods of generating an electron beam usi...

Electron beam generation and measurement

Photocathode emitter system that generates multiple electron beams

Metal protective layer for electron emitters with a diffusion barrier

Metal encapsulated photocathode electron emitter

Neutral atom imaging system

Silicon electron emitter designs

Photocathode designs and methods of generating an electron beam usi...

Ruthenium encapsulated photocathode electron emitter

Electron beam emitters with ruthenium coating

Laser produced plasma light source having a target material coated...

High brightness boron-containing electron beam emitters for use in...

Method and system for gas flow mitigation of molecular contaminatio...

System and method for cleaning EUV optical elements

System and method for generation of extreme ultraviolet light

Gas bearing assembly for an EUV light source

Methods and apparatus for use with extreme ultraviolet light having...

Particle control near reticle and optics using showerhead

Methods and systems for measuring a characteristic of a substrate o...

Apparatus and methods for forming an electrical conduction path thr...

Transverse focusing action in hyperbolic field detectors

Structural modification using electron beam activated chemical etch

Etch selectivity enhancement in electron beam activated chemical etch

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR POSITIONING OPTICAL ISOLATOR ASSEMBLY WITH...

Laser Produced Plasma Light Source Having a Target Material Coated...

DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE

VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE...

PHOTOCATHODE EMITTER SYSTEM THAT GENERATES MULTIPLE ELECTRON BEAMS

PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USI...

METAL ENCAPSULATED PHOTOCATHODE ELECTRON EMITTER

Neutral Atom Imaging System

METAL PROTECTIVE LAYER FOR ELECTRON EMITTERS WITH A DIFFUSION BARRIER

System and Method for Photocathode Illumination Inspection

PHOTOCATHODE DESIGNS AND METHODS OF GENERATING AN ELECTRON BEAM USI...

RUTHENIUM ENCAPSULATED PHOTOCATHODE ELECTRON EMITTER

SILICON ELECTRON EMITTER DESIGNS

ELECTRON BEAM GENERATION AND MEASUREMENT

Laser Produced Plasma Light Source Having a Target Material Coated...

Electron Beam Emitters with Ruthenium Coating

HIGH BRIGHTNESS BORON-CONTAINING ELECTRON BEAM EMITTERS FOR USE IN...

Laser Produced Plasma Light Source Having a Target Material Coated...

Droplet Generation for a Laser Produced Plasma Light Source

System and Method for Cleaning EUV Optical Elements

GAS BEARING ASSEMBLY FOR AN EUV LIGHT SOURCE

METHOD AND SYSTEM FOR GAS FLOW MITIGATION OF MOLECULAR CONTAMINATIO...

Methods and Systems for Measuring a Characteristic of a Substrate o...

System and Method for Cleaning Optical Surfaces of an Extreme Ultra...

METHODS AND APPARATUS FOR USE WITH EXTREME ULTRAVIOLET LIGHT HAVING...

APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING D...

PARTICLE CONTROL NEAR RETICLE AND OPTICS USING SHOWERHEAD

APPARATUS AND METHODS FOR FORMING AN ELECTRICAL CONDUCTION PATH THR...

METHODS AND SYSTEMS FOR MEASURING A CHARACTERISTIC OF A SUBSTRATE O...

STRUCTURAL MODIFICATION USING ELECTRON BEAM ACTIVATED CHEMICAL ETCH