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Rudy Jan Maria Pellens
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last 30 patents
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Patent Grant
Device manufacturing method and substrate comprising multiple resis...
Patent number
7,892,903
Issue date
Feb 22, 2011
ASML Netherlands B.V.
Rudy Jan Maria Pellens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method and patterning device
Patent number
7,879,514
Issue date
Feb 1, 2011
ASML Netherlands B.V.
Geoffrey Norman Phillipps
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
7,626,681
Issue date
Dec 1, 2009
ASML Netherlands B.V.
Budiman Sutedja
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder and device manufacturing method
Patent number
7,494,828
Issue date
Feb 24, 2009
ASML Netherlands B.V.
Keith Frank Best
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110273679
Publication date
Nov 10, 2011
ASML NETHERLANDS B.V.
Thijs Egidius Johannes KNAAPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100157260
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Thijs Egidius Johannes KNAAPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD, APPARATUS AND CONTROLLER
Publication number
20100104959
Publication date
Apr 29, 2010
ASML NETHERLANDS B.V.
Rik Teodoor Vangheluwe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20090237635
Publication date
Sep 24, 2009
ASML NETHERLANDS B.V.
Keith Frank Best
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20090153825
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Remi Daniel Marie EDART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method
Publication number
20090128792
Publication date
May 21, 2009
ASML NETHERLANDS B.V.
Rudy Jan, Maria Pellens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and method
Publication number
20080118876
Publication date
May 22, 2008
ASML NETHERLANDS B.V.
Cheng-Qun Gui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic method and patterning device
Publication number
20080032203
Publication date
Feb 7, 2008
ASML NETHERLANDS B.V.
Geoffrey Norman Phillipps
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device, lithographic apparatus and device manufacturing method
Publication number
20070238261
Publication date
Oct 11, 2007
ASML NETHERLANDS B.V.
Johannes Wilhelmus Maria Krikhaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY