Ryo Sasaki

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 10,534,278
- Issue date Jan 14, 2020
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Evaluation method, storage medium, exposure apparatus, exposure met...
- Patent number 9,996,916
- Issue date Jun 12, 2018
- Canon Kabushiki Kaisha
- Tomohiro Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,726,981
- Issue date Aug 8, 2017
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detector, lithography apparatus, and device manufacturing...
- Patent number 9,442,398
- Issue date Sep 13, 2016
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method of device fabrication
- Patent number 9,280,050
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,250,541
- Issue date Feb 2, 2016
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus for calculation of substrate tilt, exposure a...
- Patent number 9,164,405
- Issue date Oct 20, 2015
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,152,059
- Issue date Oct 6, 2015
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus and exposure device
- Patent number 8,902,430
- Issue date Dec 2, 2014
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 8,860,949
- Issue date Oct 14, 2014
- Canon Kabushiki Kaisha
- Ko Ishizuka
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,810,774
- Issue date Aug 19, 2014
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Height measurement apparatus, exposure apparatus, and device fabric...
- Patent number 8,593,615
- Issue date Nov 26, 2013
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Measuring apparatus, exposure apparatus, and device fabrication method
- Patent number 8,233,140
- Issue date Jul 31, 2012
- Canon Kabushiki Kaisha
- Ryo Sasaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Shape measuring apparatus, shape measuring method, and exposure app...
- Patent number 7,684,050
- Issue date Mar 23, 2010
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Projection exposure apparatus using wavefront detection
- Patent number 6,831,766
- Issue date Dec 14, 2004
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Wavefront measuring method and projection exposure apparatus
- Patent number 6,597,440
- Issue date Jul 22, 2003
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20180143543
- Publication date May 24, 2018
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION METHOD, STORAGE MEDIUM, EXPOSURE APPARATUS, EXPOSURE MET...
- Publication number 20170045825
- Publication date Feb 16, 2017
- Canon Kabushiki Kaisha
- Tomohiro Hoshino
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20160091800
- Publication date Mar 31, 2016
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20140218712
- Publication date Aug 7, 2014
- Canon Kabushiki Kaisha
- Toshiki IWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20140185026
- Publication date Jul 3, 2014
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF DEVICE FABRICATION
- Publication number 20140186755
- Publication date Jul 3, 2014
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITION DETECTOR, LITHOGRAPHY APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20140055768
- Publication date Feb 27, 2014
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20120008122
- Publication date Jan 12, 2012
- Canon Kabushiki Kaisha
- Toshiki IWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERFEROMETER
- Publication number 20110299093
- Publication date Dec 8, 2011
- Canon Kabushiki Kaisha
- Ko ISHIZUKA
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS AND EXPOSURE DEVICE
- Publication number 20110176139
- Publication date Jul 21, 2011
- Canon Kabushiki Kaisha
- Wataru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...
- Publication number 20110032503
- Publication date Feb 10, 2011
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...
- Publication number 20110032504
- Publication date Feb 10, 2011
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS, MEASUREMENT METHOD, COMPUTER, PROGRAM, AND E...
- Publication number 20100125432
- Publication date May 20, 2010
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20090262323
- Publication date Oct 22, 2009
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD
- Publication number 20090091723
- Publication date Apr 9, 2009
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING
Information Patent Application
SURFACE LEVEL DETECTION METHOD, EXPOSURE APPARATUS, AND DEVICE MANU...
- Publication number 20090009738
- Publication date Jan 8, 2009
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APP...
- Publication number 20080151258
- Publication date Jun 26, 2008
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method
- Publication number 20060250598
- Publication date Nov 9, 2006
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus using wavefront detection
- Publication number 20030210388
- Publication date Nov 13, 2003
- Canon Kabushiki Kaisha
- Ryo Sasaki
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Exposure apparatus and method of manufacturing article

Evaluation method, storage medium, exposure apparatus, exposure met...

Exposure apparatus, exposure method, and device manufacturing method

Position detector, lithography apparatus, and device manufacturing...

Exposure apparatus and method of device fabrication

Exposure apparatus and device fabrication method

Measurement apparatus for calculation of substrate tilt, exposure a...

Exposure apparatus and device fabrication method

Measuring apparatus and exposure device

Interferometer

Exposure apparatus and device fabrication method

Height measurement apparatus, exposure apparatus, and device fabric...

Measuring apparatus, exposure apparatus, and device fabrication method

Shape measuring apparatus, shape measuring method, and exposure app...

Projection exposure apparatus using wavefront detection

Wavefront measuring method and projection exposure apparatus

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EVALUATION METHOD, STORAGE MEDIUM, EXPOSURE APPARATUS, EXPOSURE MET...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND METHOD OF DEVICE FABRICATION

POSITION DETECTOR, LITHOGRAPHY APPARATUS, AND DEVICE MANUFACTURING...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

INTERFEROMETER

MEASURING APPARATUS AND EXPOSURE DEVICE

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...

MEASUREMENT APPARATUS, MEASUREMENT METHOD, COMPUTER, PROGRAM, AND E...

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING...

MEASURING APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD

SURFACE LEVEL DETECTION METHOD, EXPOSURE APPARATUS, AND DEVICE MANU...

SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APP...

Exposure apparatus and method

Projection exposure apparatus using wavefront detection