Membership
Tour
Register
Log in
Ryoichi Hirano
Follow
Person
Yokohama-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Inspection method and inspection apparatus
Patent number
11,004,193
Issue date
May 11, 2021
NuFlare Technology, Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Inspection device, inspection method, and storage medium
Patent number
10,997,713
Issue date
May 4, 2021
Kabushiki Kaisha Toshiba
Takeshi Morino
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron beam inspection apparatus and multiple electron b...
Patent number
10,984,978
Issue date
Apr 20, 2021
NuFlare Technology, Inc.
Hiromu Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection method and pattern inspection apparatus
Patent number
10,984,525
Issue date
Apr 20, 2021
NuFlare Technology, Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
10,846,846
Issue date
Nov 24, 2020
NuFlare Technology, Inc.
Masataka Shiratsuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
10,775,326
Issue date
Sep 15, 2020
NuFlare Technology, Inc.
Hideo Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
10,712,295
Issue date
Jul 14, 2020
NUFLARE TECHNOLOGY, INC.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
8,442,320
Issue date
May 14, 2013
Kabushiki Kaisha Toshiba
Ikunao Isomura
G01 - MEASURING TESTING
Information
Patent Grant
Ultrafine lithography pattern inspection using multi-stage TDI imag...
Patent number
8,254,663
Issue date
Aug 28, 2012
Kabushiki Kaisha Toshiba
Akira Kataoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Reticle defect inspection apparatus and inspection method using the...
Patent number
8,049,897
Issue date
Nov 1, 2011
Kabushiki Kaisha Toshiba
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Reticle defect inspection apparatus and reticle defect inspection m...
Patent number
7,894,051
Issue date
Feb 22, 2011
Kabushiki Kaisha Toshiba
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for forming pattern
Patent number
7,036,980
Issue date
May 2, 2006
Kabushiki Kaisha Toshiba
Ryoichi Hirano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measuring method in pattern drawing apparatus
Patent number
6,676,289
Issue date
Jan 13, 2004
Kabushiki Kaisha Toshiba
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Vacuum processing apparatus and ion pump capable of suppressing lea...
Patent number
6,411,023
Issue date
Jun 25, 2002
Toshiba Machine Co., Ltd.
Katsuhito Ogura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample transferring method and sample transfer supporting apparatus
Patent number
6,281,510
Issue date
Aug 28, 2001
Kabushiki Kaisha Toshiba
Shusuke Yoshitake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for emitting a beam to a sample used for manufacturing a...
Patent number
6,239,443
Issue date
May 29, 2001
Kabushiki Kaisha Toshiba
Toru Tojo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming apparatus
Patent number
6,182,369
Issue date
Feb 6, 2001
Kabushiki Kaisha Toshiba
Ryoichi Hirano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sample transferring method and sample transfer supporting apparatus
Patent number
6,090,176
Issue date
Jul 18, 2000
Kabushiki Kaisha Toshiba
Shusuke Yoshitake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Position measuring apparatus
Patent number
6,080,990
Issue date
Jun 27, 2000
Kabushiki Kaisha Topcon
Shinya Watanabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam exposure system
Patent number
5,912,468
Issue date
Jun 15, 1999
Kabushiki Kaisha Toshiba
Ryoichi Hirano
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Registration method and apparatus therefor
Patent number
5,442,445
Issue date
Aug 15, 1995
Kabushiki Kaisha Toshiba
Kyoichi Tatsuno
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and an apparatus for measuring a displacement between two ob...
Patent number
5,151,754
Issue date
Sep 29, 1992
Kabushiki Kaisha Toshiba
Yoriyuki Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for aligning two objects, and method and appar...
Patent number
5,100,234
Issue date
Mar 31, 1992
Kabushiki Kaisha Toshiba
Yoriyuki Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for aligning two objects, and method and appar...
Patent number
4,988,197
Issue date
Jan 29, 1991
Kabushiki Kaisha Toshiba
Yoriyuki Ishibashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for setting a gap between first and second obj...
Patent number
4,838,693
Issue date
Jun 13, 1989
Kabushiki Kaisha Toshiba
Norio Uchida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MULTI-ELECTRON BEAM INSPECTION DEVICE AND MULTI-ELECTRON BEAM INSPE...
Publication number
20230170183
Publication date
Jun 1, 2023
NuFlare Technology, Inc.
Riki OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20230018318
Publication date
Jan 19, 2023
NuFlare Technology, Inc.
Ryoichi HIRANO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTIPLE ELECTRON BEAM INSPECTION APPARATUS AND MULTIPLE ELECTRON B...
Publication number
20200161082
Publication date
May 21, 2020
NuFlare Technology, Inc.
Hiromu INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Beam Inspection Apparatus and Electron Beam Inspection Method
Publication number
20190369035
Publication date
Dec 5, 2019
NUFLARE TECHNOLOGY, INC.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20190346769
Publication date
Nov 14, 2019
NuFlare Technology, Inc.
Hideaki Hashimoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON BEAM INSPECTION APPARATUS AND ELECTRON BEAM INSPECTION METHOD
Publication number
20190277782
Publication date
Sep 12, 2019
NuFlare Technology, Inc.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE, INSPECTION METHOD, AND STORAGE MEDIUM
Publication number
20190279349
Publication date
Sep 12, 2019
KABUSHIKI KAISHA TOSHIBA
Takeshi MORINO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
Publication number
20190279348
Publication date
Sep 12, 2019
NuFlare Technology, Inc.
Ryoichi Hirano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20190213726
Publication date
Jul 11, 2019
NuFlare Technology, Inc.
Ryoichi Hirano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20190066286
Publication date
Feb 28, 2019
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFECT INSPECTION APPARATUS, MANAGEMENT METHOD OF DEFECT INSPECTION...
Publication number
20160275669
Publication date
Sep 22, 2016
Kabushiki Kaisha Toshiba
Ryoichi HIRANO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD AND DEFECT IN...
Publication number
20150041645
Publication date
Feb 12, 2015
Kabushiki Kaisha Toshiba
Susumu IIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN INSPECTION APPARATUS
Publication number
20120081538
Publication date
Apr 5, 2012
Kabushiki Kaisha Toshiba
Riki Ogawa
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20110229009
Publication date
Sep 22, 2011
Advanced Mask Inspection Technology Inc.
Ikunao ISOMURA
G01 - MEASURING TESTING
Information
Patent Application
ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAG...
Publication number
20090238446
Publication date
Sep 24, 2009
Advanced Mask Inspection Technology, Inc.
Akira Kataoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
RETICLE DEFECT INSPECTION APPARATUS AND INSPECTION METHOD USING THE...
Publication number
20080259328
Publication date
Oct 23, 2008
Advanced Mask Inspection Technology Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Application
RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION M...
Publication number
20080259323
Publication date
Oct 23, 2008
Advanced Mask Inspection Technology Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Application
Appartus and method for forming pattern
Publication number
20060147822
Publication date
Jul 6, 2006
TOSHIBA MACHINE CO., LTD.
Ryoichi Hirano
B82 - NANO-TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR FORMING PATTERN
Publication number
20060034344
Publication date
Feb 16, 2006
TOSHIBA MACHINE CO.,LTD
Ryoichi Hirano
B82 - NANO-TECHNOLOGY
Information
Patent Application
Temperature measuring method in pattern drawing apparatus
Publication number
20020027945
Publication date
Mar 7, 2002
Ryoichi Hirano
G01 - MEASURING TESTING