Ryoichi INANAMI

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of designing a template pattern, method of manufacturing a t...
- Patent number RE48815
- Issue date Nov 9, 2021
- Kioxia Corporation
- Ryoichi Inanami
Information Patent Grant
Imprint recipe creating device and imprint device
- Patent number RE47271
- Issue date Mar 5, 2019
- TOSHIBA MEMORY CORPORATION
- Shinji Mikami
Information Patent Grant
Imprint pattern forming method
- Patent number RE47093
- Issue date Oct 23, 2018
- TOSHIBA MEMORY CORPORATION
- Hiroshi Tokue
Information Patent Grant
Drop recipe creating method, database creating method and medium
- Patent number RE46901
- Issue date Jun 19, 2018
- TOSHIBA MEMORY CORPORATION
- Yasuo Matsuoka
Information Patent Grant
Pattern transfer mold and pattern formation method
- Patent number 9,957,630
- Issue date May 1, 2018
- Kabushiki Kaisha Toshiba
- Yongfang Li
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Pattern forming method, processing method, and processing apparatus
- Patent number RE46390
- Issue date May 2, 2017
- Kabushiki Kaisha Toshiba
- Masafumi Asano
Information Patent Grant
Imprint pattern forming method
- Patent number RE46191
- Issue date Nov 1, 2016
- Kabushiki Kaisha Toshiba
- Hiroshi Tokue
Information Patent Grant
Pattern formation method, mask for exposure, and exposure apparatus
- Patent number 9,329,490
- Issue date May 3, 2016
- Kabushiki Kaisha Toshiba
- Takashi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, pattern transfer apparatus, and patter...
- Patent number 9,188,879
- Issue date Nov 17, 2015
- Kabushiki Kaisha Toshiba
- Kentaro Kasa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and process apparatus
- Patent number 9,021,983
- Issue date May 5, 2015
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint recipe creating device and imprint device
- Patent number 8,740,377
- Issue date Jun 3, 2014
- Kabushiki Kaisha Toshiba
- Shinji Mikami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cleaning reticle, method for cleaning reticle stage, and method for...
- Patent number 8,728,711
- Issue date May 20, 2014
- Kabushiki Kaisha Toshiba
- Yumi Nakajima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Template and method of manufacturing a semiconductor device
- Patent number 8,647,106
- Issue date Feb 11, 2014
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Drop recipe creating method, database creating method and medium
- Patent number 8,560,977
- Issue date Oct 15, 2013
- Kabushiki Kaisha Toshiba
- Yasuo Matsuoka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of designing a template pattern, method of manufacturing a t...
- Patent number 8,468,480
- Issue date Jun 18, 2013
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Imprint pattern forming method
- Patent number 8,444,889
- Issue date May 21, 2013
- Kabushiki Kaisha Toshiba
- Hiroshi Tokue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method, processing method, and processing apparatus
- Patent number 8,420,422
- Issue date Apr 16, 2013
- Kabushiki Kaisha Toshiba
- Masafumi Asano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Transferring pattern onto semiconductor substrate using optimum tra...
- Patent number 8,392,855
- Issue date Mar 5, 2013
- Kabushiki Kaisha Toshiba
- Hiroyuki Morinaga
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Template inspection method and manufacturing method for semiconduct...
- Patent number 8,227,267
- Issue date Jul 24, 2012
- Kabushiki Kaisha Toshiba
- Ikuo Yoneda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Flare correction method, method for manufacturing mask for lithogra...
- Patent number 8,227,151
- Issue date Jul 24, 2012
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective mask and manufacturing method for reflective mask
- Patent number 8,071,263
- Issue date Dec 6, 2011
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark forming method and method for manufacturing semiconductor device
- Patent number 7,972,932
- Issue date Jul 5, 2011
- Kabushiki Kaisha Toshiba
- Takashi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 7,914,958
- Issue date Mar 29, 2011
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam writing data creating method and electron beam writin...
- Patent number 7,683,352
- Issue date Mar 23, 2010
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method of character projection syste...
- Patent number 7,459,705
- Issue date Dec 2, 2008
- Kabushiki Kaisha Toshiba
- Tetsuro Nakasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus, electron beam exposure method and...
- Patent number 7,449,700
- Issue date Nov 11, 2008
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing method, electron beam writing apparatus and s...
- Patent number 7,368,737
- Issue date May 6, 2008
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing electron beam writing data, program of producin...
- Patent number 7,301,161
- Issue date Nov 27, 2007
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method and method for producing char...
- Patent number 7,102,147
- Issue date Sep 5, 2006
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for producing semiconductor devices
- Patent number 7,079,994
- Issue date Jul 18, 2006
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
MASK AND PATTERN FORMING METHOD
- Publication number 20150253659
- Publication date Sep 10, 2015
- Kabushiki Kaisha Toshiba
- RYOICHI Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMATION METHOD, MASK FOR PATTERN FORMATION, METHOD FOR MA...
- Publication number 20150053867
- Publication date Feb 26, 2015
- Kabushiki Kaisha Toshiba
- Ryoichi INANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMATION METHOD, MASK FOR EXPOSURE, AND EXPOSURE APPARATUS
- Publication number 20150055113
- Publication date Feb 26, 2015
- Kabushiki Kaisha Toshiba
- Takashi SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN TRANSFER MOLD AND PATTERN FORMATION METHOD
- Publication number 20150021191
- Publication date Jan 22, 2015
- Kabushiki Kaisha Toshiba
- Yongfang LI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDING APPARATUS, PATTERN TRANSFER APPARATUS, AND PATTER...
- Publication number 20130222782
- Publication date Aug 29, 2013
- Kentaro KASA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS
- Publication number 20130077066
- Publication date Mar 28, 2013
- Ryoichi INANAMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING APPARATUS
- Publication number 20130080991
- Publication date Mar 28, 2013
- Ryoichi Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS AND PROCESS APPARATUS
- Publication number 20130014360
- Publication date Jan 17, 2013
- Ryoichi INANAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ORGANIC THIN FILM SOLAR CELL
- Publication number 20120214272
- Publication date Aug 23, 2012
- Tsukasa Azuma
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
DROP RECIPE CREATING METHOD, DATABASE CREATING METHOD AND MEDIUM
- Publication number 20120131056
- Publication date May 24, 2012
- Yasuo MATSUOKA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINTING METHOD, IMPRINTING APPARATUS AND MEDIUM
- Publication number 20120129279
- Publication date May 24, 2012
- Yasuo MATSUOKA
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINTING METHOD, SEMICONDUCTOR INTEGRATED CIRCUIT MANUFACTURING M...
- Publication number 20120072003
- Publication date Mar 22, 2012
- Yasuo MATSUOKA
- B82 - NANO-TECHNOLOGY
Information Patent Application
NANOIMPRINT TEMPLATE AND PATTERN TRANSCRIPTION APPARATUS
- Publication number 20120068372
- Publication date Mar 22, 2012
- Akiko Mimotogi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND IMPRINT METHOD
- Publication number 20120049417
- Publication date Mar 1, 2012
- Ryoichi INANAMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND PATTERN FORMING DEVICE
- Publication number 20120049396
- Publication date Mar 1, 2012
- Tomohiro Tsutsui
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT RECIPE CREATING DEVICE AND IMPRINT DEVICE
- Publication number 20120050441
- Publication date Mar 1, 2012
- Shinji MIKAMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
INSPECTING METHOD, TEMPLATE MANUFACTURING METHOD, SEMICONDUCTOR INT...
- Publication number 20120045854
- Publication date Feb 23, 2012
- Yasuo Matsuoka
- G11 - INFORMATION STORAGE
Information Patent Application
REFLECTIVE MASK, MANUFACTURING METHOD FOR REFLECTIVE MASK, AND MANU...
- Publication number 20120040293
- Publication date Feb 16, 2012
- Kabushiki Kaisha Toshiba
- Ryoichi Inanami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING PATTERN AND A SEMICONDUCTOR DEVICE
- Publication number 20120028378
- Publication date Feb 2, 2012
- Hiroyuki MORINAGA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD, PROCESSING METHOD, AND PROCESSING APPARATUS
- Publication number 20110229988
- Publication date Sep 22, 2011
- Masafumi ASANO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CLEANING RETICLE, METHOD FOR CLEANING RETICLE STAGE, AND METHOD FOR...
- Publication number 20110159440
- Publication date Jun 30, 2011
- Yumi NAKAJIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
FLARE CORRECTION METHOD, METHOD FOR MANUFACTURING MASK FOR LITHOGRA...
- Publication number 20110065027
- Publication date Mar 17, 2011
- Ryoichi INANAMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD
- Publication number 20100308485
- Publication date Dec 9, 2010
- Ryoichi INANAMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE AND PATTERN FORMING METHOD
- Publication number 20100308513
- Publication date Dec 9, 2010
- Hiroyuki Kashiwagi
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING P...
- Publication number 20100264113
- Publication date Oct 21, 2010
- Ikuo YONEDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEMPLATE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20100252188
- Publication date Oct 7, 2010
- Ryoichi Inanami
- B32 - LAYERED PRODUCTS
Information Patent Application
IMPRINT PATTERN FORMING METHOD
- Publication number 20100244326
- Publication date Sep 30, 2010
- Hiroshi Tokue
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD OF DESIGNING A TEMPLATE PATTERN, METHOD OF MANUFACTURING A T...
- Publication number 20100237540
- Publication date Sep 23, 2010
- Ryoichi INANAMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINTING MOLD AND PATTERN FORMATION METHOD
- Publication number 20100164146
- Publication date Jul 1, 2010
- Yohko FURUTONO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TEMPLATE INSPECTION METHOD AND MANUFACTURING METHOD FOR SEMICONDUCT...
- Publication number 20100075443
- Publication date Mar 25, 2010
- Ikuo YONEDA
- G01 - MEASURING TESTING

Ryoichi INANAMI

Person

Patents Grantslast 30 patents

Method of designing a template pattern, method of manufacturing a t...

Imprint recipe creating device and imprint device

Imprint pattern forming method

Drop recipe creating method, database creating method and medium

Pattern transfer mold and pattern formation method

Pattern forming method, processing method, and processing apparatus

Imprint pattern forming method

Pattern formation method, mask for exposure, and exposure apparatus

Substrate holding apparatus, pattern transfer apparatus, and patter...

Stage apparatus and process apparatus

Imprint recipe creating device and imprint device

Cleaning reticle, method for cleaning reticle stage, and method for...

Template and method of manufacturing a semiconductor device

Drop recipe creating method, database creating method and medium

Method of designing a template pattern, method of manufacturing a t...

Imprint pattern forming method

Pattern forming method, processing method, and processing apparatus

Transferring pattern onto semiconductor substrate using optimum tra...

Template inspection method and manufacturing method for semiconduct...

Flare correction method, method for manufacturing mask for lithogra...

Reflective mask and manufacturing method for reflective mask

Mark forming method and method for manufacturing semiconductor device

Semiconductor device manufacturing method

Electron beam writing data creating method and electron beam writin...

Charged particle beam exposure method of character projection syste...

Electron beam exposure apparatus, electron beam exposure method and...

Electron beam writing method, electron beam writing apparatus and s...

Method of producing electron beam writing data, program of producin...

Charged particle beam exposure method and method for producing char...

Method and system for producing semiconductor devices

Patents Applicationslast 30 patents

MASK AND PATTERN FORMING METHOD

PATTERN FORMATION METHOD, MASK FOR PATTERN FORMATION, METHOD FOR MA...

PATTERN FORMATION METHOD, MASK FOR EXPOSURE, AND EXPOSURE APPARATUS

PATTERN TRANSFER MOLD AND PATTERN FORMATION METHOD

SUBSTRATE HOLDING APPARATUS, PATTERN TRANSFER APPARATUS, AND PATTER...

PATTERN FORMING APPARATUS

PATTERN FORMING APPARATUS

STAGE APPARATUS AND PROCESS APPARATUS

METHOD OF MANUFACTURING ORGANIC THIN FILM SOLAR CELL

DROP RECIPE CREATING METHOD, DATABASE CREATING METHOD AND MEDIUM

IMPRINTING METHOD, IMPRINTING APPARATUS AND MEDIUM

IMPRINTING METHOD, SEMICONDUCTOR INTEGRATED CIRCUIT MANUFACTURING M...

NANOIMPRINT TEMPLATE AND PATTERN TRANSCRIPTION APPARATUS

IMPRINT APPARATUS AND IMPRINT METHOD

PATTERN FORMING METHOD AND PATTERN FORMING DEVICE

IMPRINT RECIPE CREATING DEVICE AND IMPRINT DEVICE

INSPECTING METHOD, TEMPLATE MANUFACTURING METHOD, SEMICONDUCTOR INT...

REFLECTIVE MASK, MANUFACTURING METHOD FOR REFLECTIVE MASK, AND MANU...

METHOD FOR FORMING PATTERN AND A SEMICONDUCTOR DEVICE

PATTERN FORMING METHOD, PROCESSING METHOD, AND PROCESSING APPARATUS

CLEANING RETICLE, METHOD FOR CLEANING RETICLE STAGE, AND METHOD FOR...

FLARE CORRECTION METHOD, METHOD FOR MANUFACTURING MASK FOR LITHOGRA...

PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

TEMPLATE AND PATTERN FORMING METHOD

TEMPLATE, METHOD OF MANUFACTURING THE SAME, AND METHOD OF FORMING P...

TEMPLATE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

IMPRINT PATTERN FORMING METHOD

METHOD OF DESIGNING A TEMPLATE PATTERN, METHOD OF MANUFACTURING A T...

IMPRINTING MOLD AND PATTERN FORMATION METHOD

TEMPLATE INSPECTION METHOD AND MANUFACTURING METHOD FOR SEMICONDUCT...