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Ryuichi Tanimoto
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer edge polishing apparatus and method
Patent number
11,559,869
Issue date
Jan 24, 2023
Sumco Corporation
Makoto Ando
B24 - GRINDING POLISHING
Information
Patent Grant
Method of double-side polishing silicon wafer
Patent number
11,170,988
Issue date
Nov 9, 2021
Sumco Corporation
Ryuichi Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer polishing method
Patent number
11,075,085
Issue date
Jul 27, 2021
Sumco Corporation
Takashi Nishitani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer polishing apparatus and polishing head used for same
Patent number
10,710,209
Issue date
Jul 14, 2020
Sumco Corporation
Ryoya Terakawa
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing composition and polishing method using the same
Patent number
10,344,187
Issue date
Jul 9, 2019
Nitta Haas Incorporated
Masashi Teramoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for polishing workpiece
Patent number
9,707,659
Issue date
Jul 18, 2017
Sumco Corporation
Shinichi Ogata
B24 - GRINDING POLISHING
Information
Patent Grant
Method for polishing silicon wafer and polishing liquid therefor
Patent number
8,932,952
Issue date
Jan 13, 2015
Sumco Corporation
Shinichi Ogata
B24 - GRINDING POLISHING
Information
Patent Grant
Method of polishing a silicon wafer
Patent number
8,877,643
Issue date
Nov 4, 2014
Sumco Corporation
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Grant
Method of polishing silicon wafer
Patent number
8,147,295
Issue date
Apr 3, 2012
Sumco Corporation
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
WAFER POLISHING METHOD AND APPARATUS
Publication number
20200258735
Publication date
Aug 13, 2020
SUMCO CORPORATION
Takashi NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DOUBLE-SIDE POLISHING SILICON WAFER
Publication number
20200185215
Publication date
Jun 11, 2020
SUMCO CORPORATION
Ryuichi TANIMOTO
B24 - GRINDING POLISHING
Information
Patent Application
WAFER POLISHING METHOD
Publication number
20190333775
Publication date
Oct 31, 2019
SUMCO CORPORATION
Takashi NISHITANI
B24 - GRINDING POLISHING
Information
Patent Application
WAFER EDGE POLISHING APPARATUS AND METHOD
Publication number
20190299354
Publication date
Oct 3, 2019
SUMCO CORPORATION
Makoto ANDO
B24 - GRINDING POLISHING
Information
Patent Application
WAFER POLISHING APPARATUS AND POLISHING HEAD USED FOR SAME
Publication number
20180311783
Publication date
Nov 1, 2018
SUMCO CORPORATION
Ryoya TERAKAWA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME
Publication number
20150083962
Publication date
Mar 26, 2015
NITTA HAAS INCORPORATED
Masashi TERAMOTO
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME
Publication number
20140030897
Publication date
Jan 30, 2014
SUMCO CORPORATION
Masashi Teramoto
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING WORKPIECE
Publication number
20130337723
Publication date
Dec 19, 2013
SUMCO CORPORATION
Ryuichi Tanimoto
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR POLISHING SILICON WAFER, AND POLISHING SOLUTION FOR USE...
Publication number
20130109180
Publication date
May 2, 2013
SUMCO CORPORATION
Ryuichi Tanimoto
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD FOR POLISHING SILICON WAFER
Publication number
20130095660
Publication date
Apr 18, 2013
SUMCO CORPORATION
Ryuichi Tanimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR POLISHING SILICON WAFER AND POLISHING LIQUID THEREFOR
Publication number
20130032573
Publication date
Feb 7, 2013
SUMCO CORPORATION
Shinichi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF POLISHING SILICON WAFER AS WELL AS SILICON WAFER
Publication number
20120080775
Publication date
Apr 5, 2012
Shuhei Matsuda
B24 - GRINDING POLISHING
Information
Patent Application
METHOD OF POLISHING SILICON WAFER
Publication number
20090298394
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20090293919
Publication date
Dec 3, 2009
SUMCO CORPORATION
Takeo Katoh
H01 - BASIC ELECTRIC ELEMENTS