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Tokyo Electron Limited
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Satoru Kawakami
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Ceramic heater
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Issue date May 1, 2001
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NGK Insulators, Ltd.
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Hideyoshi Tsuruta
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Electrostatic chuck
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Patent number 6,134,096
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Issue date Oct 17, 2000
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NGK Insulators, Ltd.
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Naohito Yamada
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Electrostatic chuck
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Patent number 5,946,183
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Issue date Aug 31, 1999
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NGK Insulators, Ltd.
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Naohito Yamada
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Ceramic articles
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Patent number 5,573,690
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Issue date Nov 12, 1996
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NGK Insulators, Ltd.
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Kazuhiro Nobori
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Leakless pump
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Patent number 4,762,461
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Issue date Aug 9, 1988
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NGK Insulators Ltd.
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Ryusuke Ushikoshi
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...