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Sadayuki Okudaira
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Ome-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor integrated circuit arrangement fabrication method
Patent number
RE39895
Issue date
Oct 23, 2007
Renesas Technology Corp.
Takafumi Tokunaga
438 - Semiconductor device manufacturing: process
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
6,767,782
Issue date
Jul 27, 2004
Renesas Technology Corp.
Takeshi Saikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit arrangement fabrication method
Patent number
6,309,980
Issue date
Oct 30, 2001
Hitachi, Ltd.
Takafumi Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit arrangement fabrication method
Patent number
6,074,958
Issue date
Jun 13, 2000
Hitachi, Ltd.
Takafumi Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit arrangement fabrication method
Patent number
5,962,347
Issue date
Oct 5, 1999
Hitachi, Ltd.
Takafumi Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit arrangement fabrication method
Patent number
5,874,013
Issue date
Feb 23, 1999
Hitachi, Ltd.
Takafumi Tokunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,705,029
Issue date
Jan 6, 1998
Hitachi, Ltd.
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,643,473
Issue date
Jul 1, 1997
Hitachi, Ltd.
Shinichi Tachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating method and apparatus and plasma processing method...
Patent number
5,580,420
Issue date
Dec 3, 1996
Hitachi, Ltd.
Katsuya Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,354,416
Issue date
Oct 11, 1994
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
5,147,500
Issue date
Sep 15, 1992
Hitachi, Ltd.
Shinichi Tachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Continuous etching process and apparatus therefor
Patent number
5,127,987
Issue date
Jul 7, 1992
Kokusai Electric Co., Ltd.
Sadayuki Okudaira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dry etching method
Patent number
4,992,136
Issue date
Feb 12, 1991
Hitachi, Ltd.
Shinichi Tachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of dry etching
Patent number
4,986,877
Issue date
Jan 22, 1991
Hitachi, Ltd.
Shinichi Tachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching by alternately etching and depositing
Patent number
4,985,114
Issue date
Jan 15, 1991
Hitachi, Ltd.
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
4,943,344
Issue date
Jul 24, 1990
Hitachi, Ltd.
Shinichi Tachi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for surface treatment
Patent number
4,857,137
Issue date
Aug 15, 1989
Hitachi, Ltd.
Shinichi Tachi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of and apparatus for etching
Patent number
4,844,767
Issue date
Jul 4, 1989
Hitachi, Ltd.
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for microwave plasma processing
Patent number
4,705,595
Issue date
Nov 10, 1987
Hitachi, Ltd.
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry-processing apparatus
Patent number
4,624,214
Issue date
Nov 25, 1986
Hitachi, Ltd.
Keizo Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for monitoring etching
Patent number
4,609,426
Issue date
Sep 2, 1986
Hitachi, Ltd.
Yoshifumi Ogawa
G01 - MEASURING TESTING
Information
Patent Grant
Thin film deposition
Patent number
4,599,135
Issue date
Jul 8, 1986
Hitachi, Ltd.
Sukeyoshi Tsunekawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for surface treatment by plasma
Patent number
4,579,623
Issue date
Apr 1, 1986
Hitachi, Ltd.
Keizo Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for plasma process
Patent number
4,563,240
Issue date
Jan 7, 1986
Hitachi, Ltd.
Fumio Shibata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma etching apparatus
Patent number
4,559,100
Issue date
Dec 17, 1985
Hitachi, Ltd.
Ken Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for growing silicon-including film by employing plasma depos...
Patent number
4,481,229
Issue date
Nov 6, 1984
Hitachi, Ltd.
Keizo Suzuki
C30 - CRYSTAL GROWTH
Information
Patent Grant
Microwave plasma etching
Patent number
4,462,863
Issue date
Jul 31, 1984
Hitachi, Ltd.
Shigeru Nishimatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform etching of silicon (doped and undoped) utilizing ions
Patent number
4,436,581
Issue date
Mar 13, 1984
Hitachi, Ltd.
Sadayuki Okudaira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma source
Patent number
4,433,228
Issue date
Feb 21, 1984
Hitachi, Ltd.
Shigeru Nishimatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma etching apparatus having fan-shaped discharge
Patent number
4,430,138
Issue date
Feb 7, 1984
Hitachi, Ltd.
Keizo Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Manufacturing method of semiconductor device
Publication number
20020168827
Publication date
Nov 14, 2002
Hitachi, Ltd.
Takeshi Saikawa
H01 - BASIC ELECTRIC ELEMENTS