Salvador P. Umotoy

Person

Antioch, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 10,280,509
- Issue date May 7, 2019
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 9,587,310
- Issue date Mar 7, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 9,017,776
- Issue date Apr 28, 2015
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled lid assembly for tungsten nitride deposition
- Patent number 8,821,637
- Issue date Sep 2, 2014
- Applied Materials, Inc.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,747,556
- Issue date Jun 10, 2014
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 8,342,119
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,291,857
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for atomic layer deposition
- Patent number 8,293,015
- Issue date Oct 23, 2012
- Applied Materials, Inc.
- Hyman W. H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Solar panel edge deletion module
- Patent number 8,231,431
- Issue date Jul 31, 2012
- Applied Materials, Inc.
- Dhruv Gajaria
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for cyclical depositing of thin films
- Patent number 8,123,860
- Issue date Feb 28, 2012
- Applied Materials, Inc.
- Randhir P. S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 7,905,959
- Issue date Mar 15, 2011
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support having brazed plates and resistance heater
- Patent number 7,705,275
- Issue date Apr 27, 2010
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cyclical deposition of thin films
- Patent number 7,175,713
- Issue date Feb 13, 2007
- Applied Materials, Inc.
- Randhir P. S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for a processing system to facilitate sequential depos...
- Patent number 6,878,206
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead assembly for a processing chamber
- Patent number 6,827,815
- Issue date Dec 7, 2004
- Applied Materials, Inc.
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lift pin actuating mechanism for semiconductor processing chamber
- Patent number 6,767,176
- Issue date Jul 27, 2004
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic substrate support
- Patent number 6,730,175
- Issue date May 4, 2004
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 6,589,352
- Issue date Jul 8, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support including purge ring having inner edge aligned to...
- Patent number 6,521,292
- Issue date Feb 18, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap assembly
- Patent number 6,517,592
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten chamber with stationary heater
- Patent number 6,503,331
- Issue date Jan 7, 2003
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced contact area
- Patent number 6,461,435
- Issue date Oct 8, 2002
- Applied Materials, Inc.
- Karl A. Littau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled gas distribution plate
- Patent number 6,379,466
- Issue date Apr 30, 2002
- Applied Materials, Inc.
- Turgut Sahin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for preventing edge deposition
- Patent number 6,375,748
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature chemical vapor deposition chamber
- Patent number 6,364,954
- Issue date Apr 2, 2002
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
One-piece dual gas faceplate for a showerhead in a semiconductor wa...
- Patent number 6,302,964
- Issue date Oct 16, 2001
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dispersion plate for flowing vaporizes compounds used in chemical v...
- Patent number 6,302,965
- Issue date Oct 16, 2001
- Applied Materials, Inc.
- Salvador Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fastening device for a purge ring
- Patent number 6,223,447
- Issue date May 1, 2001
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated temperature controlled exhaust and cold trap assembly
- Patent number 6,206,971
- Issue date Mar 27, 2001
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20170241020
- Publication date Aug 24, 2017
- Applied Materials, Inc.
- Gwo-Chuan TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20140190411
- Publication date Jul 10, 2014
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20140087091
- Publication date Mar 27, 2014
- Applied Materials, Inc.
- Hyman W.H. Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM
- Publication number 20140076234
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20130008984
- Publication date Jan 10, 2013
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20120000422
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...
- Publication number 20110114020
- Publication date May 19, 2011
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION
- Publication number 20100003406
- Publication date Jan 7, 2010
- Applied Materials, Inc.
- Hyman Lam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLAR PANEL EDGE DELETION MODULE
- Publication number 20090221217
- Publication date Sep 3, 2009
- Applied Materials, Inc.
- DHRUV GAJARIA
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD OF MOUNTING AND SUPPORTING A SOLAR PANEL
- Publication number 20090205703
- Publication date Aug 20, 2009
- Applied Materials, Inc.
- Salvador P. Umotoy
- F24 - HEATING RANGES VENTILATING
Information Patent Application
APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS
- Publication number 20090056626
- Publication date Mar 5, 2009
- APPLIED MATERIALS, INC.
- RANDHIR P.S. THAKUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION
- Publication number 20080202425
- Publication date Aug 28, 2008
- APPLIED MATERIALS, INC.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...
- Publication number 20080206987
- Publication date Aug 28, 2008
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT
- Publication number 20080072823
- Publication date Mar 27, 2008
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS
- Publication number 20070095285
- Publication date May 3, 2007
- Randhir P.S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate support having brazed plates and resistance heater
- Publication number 20070040265
- Publication date Feb 22, 2007
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for generating plasma by RF power
- Publication number 20060130971
- Publication date Jun 22, 2006
- APPLIED MATERIALS, INC.
- Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual gas faceplate for a showerhead in a semiconductor wafer proces...
- Publication number 20060021703
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for a processing system to facilitate sequential depos...
- Publication number 20050115675
- Publication date Jun 2, 2005
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self aligning non contact shadow ring process kit
- Publication number 20040003780
- Publication date Jan 8, 2004
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Aluminum oxide chamber and process
- Publication number 20030198754
- Publication date Oct 23, 2003
- Ming Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for cyclical deposition of thin films
- Publication number 20030172872
- Publication date Sep 18, 2003
- APPLIED MATERIALS, INC.
- Randhir P.S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for low pressure CVD deposition of tungsten an...
- Publication number 20030140857
- Publication date Jul 31, 2003
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ceramic substrate support
- Publication number 20030136520
- Publication date Jul 24, 2003
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Showerhead assembly for a processing chamber
- Publication number 20030132319
- Publication date Jul 17, 2003
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual-gas delivery system for chemical vapor deposition processes
- Publication number 20030124842
- Publication date Jul 3, 2003
- APPLIED MATERIALS, INC.
- Mark M. Hytros
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for a processing system to facilitate sequential depos...
- Publication number 20030010451
- Publication date Jan 16, 2003
- APPLIED MATERIALS, INC.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing chamber
- Publication number 20030000647
- Publication date Jan 2, 2003
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lift pin actuating mechanism for semiconductor processing chamber
- Publication number 20030000775
- Publication date Jan 2, 2003
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION CHAMBER
- Publication number 20010054381
- Publication date Dec 27, 2001
- SALVADOR P UMOTOY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Salvador P. Umotoy

Person

Patents Grantslast 30 patents

Lid assembly for a processing system to facilitate sequential depos...

Lid assembly for a processing system to facilitate sequential depos...

Apparatuses and methods for atomic layer deposition

Temperature controlled lid assembly for tungsten nitride deposition

Apparatuses and methods for atomic layer deposition

Self aligning non contact shadow ring process kit

Apparatuses and methods for atomic layer deposition

Apparatuses and methods for atomic layer deposition

Solar panel edge deletion module

Apparatus for cyclical depositing of thin films

Lid assembly for a processing system to facilitate sequential depos...

Substrate support having brazed plates and resistance heater

Apparatus for cyclical deposition of thin films

Lid assembly for a processing system to facilitate sequential depos...

Showerhead assembly for a processing chamber

Lift pin actuating mechanism for semiconductor processing chamber

Ceramic substrate support

Resonant chamber applicator for remote plasma source

Self aligning non contact shadow ring process kit

Substrate support including purge ring having inner edge aligned to...

Cold trap assembly

Tungsten chamber with stationary heater

Showerhead with reduced contact area

Temperature controlled gas distribution plate

Method and apparatus for preventing edge deposition

High temperature chemical vapor deposition chamber

One-piece dual gas faceplate for a showerhead in a semiconductor wa...

Dispersion plate for flowing vaporizes compounds used in chemical v...

Fastening device for a purge ring

Integrated temperature controlled exhaust and cold trap assembly

Patents Applicationslast 30 patents

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

MULTI CHAMBER PROCESSING SYSTEM

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOS...

APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION

SOLAR PANEL EDGE DELETION MODULE

APPARATUS AND METHOD OF MOUNTING AND SUPPORTING A SOLAR PANEL

APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS

TEMPERATURE CONTROLLED LID ASSEMBLY FOR TUNGSTEN NITRIDE DEPOSITION

PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED...

SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT

APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS

Substrate support having brazed plates and resistance heater

Apparatus for generating plasma by RF power

Dual gas faceplate for a showerhead in a semiconductor wafer proces...

Lid assembly for a processing system to facilitate sequential depos...

Self aligning non contact shadow ring process kit

Aluminum oxide chamber and process

Apparatus for cyclical deposition of thin films

Apparatus and method for low pressure CVD deposition of tungsten an...

Ceramic substrate support

Showerhead assembly for a processing chamber

Dual-gas delivery system for chemical vapor deposition processes

Lid assembly for a processing system to facilitate sequential depos...

Substrate processing chamber

Lift pin actuating mechanism for semiconductor processing chamber

HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION CHAMBER