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Samuel V. Dunton
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for protecting patterned features during trench etch
Patent number
8,722,518
Issue date
May 13, 2014
Sandisk 3D LLC
Steven J. Radigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing dielectric overetch using a dielectric etch sto...
Patent number
8,008,187
Issue date
Aug 30, 2011
Sandisk 3D LLC
Samuel V Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing dielectric overetch using a dielectric etch sto...
Patent number
7,790,607
Issue date
Sep 7, 2010
Sandisk 3D LLC
Samuel V Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive hard mask to protect patterned features during trench etch
Patent number
7,575,984
Issue date
Aug 18, 2009
Sandisk 3D LLC
Steven J Radigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing dielectric overetch using a dielectric etch sto...
Patent number
7,422,985
Issue date
Sep 9, 2008
Sandisk 3D LLC
Samuel V Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nonselective unpatterned etchback to expose buried patterned features
Patent number
7,307,013
Issue date
Dec 11, 2007
Sandisk 3D LLC
Usha Raghuram
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning slurry particles from a surface polished by che...
Patent number
7,300,876
Issue date
Nov 27, 2007
Sandisk 3D LLC
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to form topography in a deposited layer above a substrate
Patent number
7,291,562
Issue date
Nov 6, 2007
Yung-Tin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to minimize formation of recess at surface planarized by che...
Patent number
7,238,607
Issue date
Jul 3, 2007
Sandisk 3D LLC
Samuel V. Dunton
G11 - INFORMATION STORAGE
Information
Patent Grant
Metal planarization system
Patent number
6,951,808
Issue date
Oct 4, 2005
LSI Logic Corporation
Jayanthi Pallinti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of testing the processing of a semiconductor wafer on a CMP...
Patent number
6,727,107
Issue date
Apr 27, 2004
LSI Logic Corporation
Samuel V. Dunton
B24 - GRINDING POLISHING
Information
Patent Grant
Structure and method for wafer comprising dielectric and semiconductor
Patent number
6,649,451
Issue date
Nov 18, 2003
Matrix Semiconductor, Inc.
Michael A. Vyvoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal planarization system
Patent number
6,586,326
Issue date
Jul 1, 2003
LSI Logic Corporation
Jayanthi Pallinti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser interferometry endpoint detection with windowless polishing p...
Patent number
6,565,416
Issue date
May 20, 2003
Koninklijke Philips Electronics N.V.
Samuel Vance Dunton
B24 - GRINDING POLISHING
Information
Patent Grant
Planarization system
Patent number
6,319,836
Issue date
Nov 20, 2001
LSI Logic Corporation
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser interferometry endpoint detection with windowless polishing p...
Patent number
6,224,460
Issue date
May 1, 2001
VLSI Technology, Inc.
Samuel Vance Dunton
B24 - GRINDING POLISHING
Information
Patent Grant
Ultrasonic transducer slurry dispenser
Patent number
6,196,900
Issue date
Mar 6, 2001
VLSI Technology, Inc.
Liming Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Removal of inorganic anti-reflective coating using fluorine etch pr...
Patent number
6,103,634
Issue date
Aug 15, 2000
VLSI Technology, Inc.
Samuel Vance Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Moisture repellant integrated circuit dielectric material combination
Patent number
6,028,013
Issue date
Feb 22, 2000
VLSI Technology, Inc.
Rao V. Annapragada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for plasma etching endpoint detection
Patent number
5,405,488
Issue date
Apr 11, 1995
VLSI Technology, Inc.
Dimitrios Dimitrelis
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR PROTECTING PATTERNED FEATURES DURING TRENCH ETCH
Publication number
20130244395
Publication date
Sep 19, 2013
SanDisk 3D LLC
Steven J. Radigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING DIELECTRIC OVERETCH USING A DIELECTRIC ETCH STO...
Publication number
20110306177
Publication date
Dec 15, 2011
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING DIELECTRIC OVERETCH USING A DIELECTRIC ETCH STO...
Publication number
20100297834
Publication date
Nov 25, 2010
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUCTIVE HARD MASK TO PROTECT PATTERNED FEATURES DURING TRENCH ETCH
Publication number
20090273022
Publication date
Nov 5, 2009
SanDisk 3D LLC
Steven J. Radigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for reducing dielectric overetch using a dielectric etch sto...
Publication number
20080254615
Publication date
Oct 16, 2008
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conductive hard mask to protect patterned features during trench etch
Publication number
20070284656
Publication date
Dec 13, 2007
SanDisk 3D LLC
Steven J. Radigan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO FORM TOPOGRAPHY IN A DEPOSITED LAYER ABOVE A SUBSTRATE
Publication number
20070134923
Publication date
Jun 14, 2007
Matrix Semiconductor, Inc.
Yung-Tin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-density nonvolatile memory array fabricated at low temperature...
Publication number
20060249753
Publication date
Nov 9, 2006
Matrix Semiconductor, Inc.
S. Brad Herner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for reducing dielectric overetch using a dielectric etch sto...
Publication number
20060216937
Publication date
Sep 28, 2006
Matrix Semiconductor, Inc.
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for cleaning slurry particles from a surface polished by che...
Publication number
20060128153
Publication date
Jun 15, 2006
Matrix Semiconductor, Inc.
Samuel V. Dunton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to minimize formation of recess at surface planarized by che...
Publication number
20060054962
Publication date
Mar 16, 2006
Matrix Semiconductor, Inc.
Samuel V. Dunton
G11 - INFORMATION STORAGE
Information
Patent Application
Nonselective unpatterned etchback to expose buried patterned features
Publication number
20060003586
Publication date
Jan 5, 2006
Matrix Semiconductor, Inc.
Usha Raghuram
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal planarization system
Publication number
20040018719
Publication date
Jan 29, 2004
LSI Logic Corporation
Jayanthi Pallinti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer surface that facilitates particle removal
Publication number
20030102528
Publication date
Jun 5, 2003
Michael A. Vyvoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal planarization system
Publication number
20020132470
Publication date
Sep 19, 2002
Jayanthi Pallinti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer surface that facilitates particle removal
Publication number
20020105057
Publication date
Aug 8, 2002
Michael A. Vyvoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser interferometry endpoint detection with windowless polishing p...
Publication number
20010009838
Publication date
Jul 26, 2001
VLSI Technology, Inc.
Samuel Vance Dunton
B24 - GRINDING POLISHING