Sang Jun Cho

Follow

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reducing damage to low-K materials during photoresist stripping
- Patent number 8,815,745
- Issue date Aug 26, 2014
- Lam Research Corporation
- Sean S. Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Trilayer resist organic layer etch
- Patent number 8,124,516
- Issue date Feb 28, 2012
- Lam Research Corporation
- Sean S. Kang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REDUCING VARIATIONS IN MASK TOPOGRAPHY
- Publication number 20250054769
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Hsu-Cheng HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING DAMAGE TO LOW-K MATERIALS DURING PHOTORESIST STRIPPING
- Publication number 20090197422
- Publication date Aug 6, 2009
- LAM RESEARCH CORPORATION
- Sean S. KANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING INCLUDING ETCHED LAYER PASSIVATION USING S...
- Publication number 20080064214
- Publication date Mar 13, 2008
- LAM RESEARCH CORPORATION
- Taejoon Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trilayer resist organic layer etch
- Publication number 20080044995
- Publication date Feb 21, 2008
- Lam Research Corporation
- Sean S. Kang
- H01 - BASIC ELECTRIC ELEMENTS