Sarah BOBEK

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 12,234,549
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design with improved chucking and arcing perfor...
- Patent number 12,211,728
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 12,131,913
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,112,949
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 12,014,927
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for minimizing substrate backside damage
- Patent number 11,756,819
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Liangfa Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 11,742,185
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment for high-temperature cleans
- Patent number 11,699,577
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 11,694,902
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design with improved chucking and arcing perfor...
- Patent number 11,682,574
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 11,674,222
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Targeted heat control systems
- Patent number 11,600,470
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 11,584,994
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 11,469,107
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of hardmask
- Patent number 10,923,334
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly etch selective amorphous carbon film
- Patent number 10,727,059
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Sarah Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL INSPECTION OF WAFERS IN MANUFACTURING SYSTEMS
- Publication number 20250060321
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Elias Anthony Martinez
- G01 - MEASURING TESTING
Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING A DOPED HARDMASK
- Publication number 20240021433
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Scott FALK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20230402261
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE
- Publication number 20230386883
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Liangfa HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...
- Publication number 20230317463
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Krishna NITTALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...
- Publication number 20230298922
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IN SITU CERAMIC COATING DEPOSITION
- Publication number 20230272525
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230203659
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20230120710
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20230041963
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20230029929
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT FOR HIGH-TEMPERATURE CLEANS
- Publication number 20220384161
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20220310360
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...
- Publication number 20220262643
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Krishna NITTALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER DEPOSITION CONFINEMENT
- Publication number 20220130650
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IN SITU CERAMIC COATING DEPOSITION
- Publication number 20220098728
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED HEAT CONTROL SYSTEMS
- Publication number 20210202218
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE
- Publication number 20200365441
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Liangfa HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20200357640
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Rajesh PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCKING PROCESS
- Publication number 20200328063
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND TOOL FOR ELECTROSTATIC CHUCKING
- Publication number 20200249263
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...
- Publication number 20200234932
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20200224310
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...
- Publication number 20200176296
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER COMPONENT CLEANING METHOD
- Publication number 20200140999
- Publication date May 7, 2020
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF HARDMASK
- Publication number 20190341227
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Satya THOKACHICHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM
- Publication number 20190172714
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Sarah BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sarah BOBEK

Person

Patents Grantslast 30 patents

Method of in situ ceramic coating deposition

Electrostatic chuck design with improved chucking and arcing perfor...

Processing chamber deposition confinement

Methods, systems, and apparatus for processing substrates using one...

Highly etch selective amorphous carbon film

Highly etch selective amorphous carbon film

Pedestal for substrate processing chambers

Heated pedestal design for improved heat transfer and temperature u...

Methods and apparatus for minimizing substrate backside damage

Uniform in situ cleaning and deposition

Treatment for high-temperature cleans

Methods, systems, and apparatus for processing substrates using one...

Electrostatic chuck design with improved chucking and arcing perfor...

Method of in situ ceramic coating deposition

Targeted heat control systems

Pedestal for substrate processing chambers

Highly etch selective amorphous carbon film

Selective deposition of hardmask

Highly etch selective amorphous carbon film

Patents Applicationslast 30 patents

OPTICAL INSPECTION OF WAFERS IN MANUFACTURING SYSTEMS

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

FORMING A DOPED HARDMASK

UNIFORM IN SITU CLEANING AND DEPOSITION

METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...

ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...

METHOD OF IN SITU CERAMIC COATING DEPOSITION

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

TREATMENT FOR HIGH-TEMPERATURE CLEANS

UNIFORM IN SITU CLEANING AND DEPOSITION

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...

PROCESSING CHAMBER DEPOSITION CONFINEMENT

METHOD OF IN SITU CERAMIC COATING DEPOSITION

TARGETED HEAT CONTROL SYSTEMS

METHODS AND APPARATUS FOR MINIMIZING SUBSTRATE BACKSIDE DAMAGE

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM

ELECTROSTATIC CHUCKING PROCESS

METHOD AND TOOL FOR ELECTROSTATIC CHUCKING

HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...

PROCESS CHAMBER COMPONENT CLEANING METHOD

SELECTIVE DEPOSITION OF HARDMASK

HIGHLY ETCH SELECTIVE AMORPHOUS CARBON FILM