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Sasangan Ramanathan
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Blacksburg, VA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming TiSiN thin film layer by using atomic layer depo...
Patent number
9,159,608
Issue date
Oct 13, 2015
Aixtron SE
Woong Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Transient enhanced atomic layer deposition
Patent number
7,981,473
Issue date
Jul 19, 2011
Aixtron, Inc.
Gi Youl Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for introduction of solid precursors and react...
Patent number
6,951,765
Issue date
Oct 4, 2005
Novellus Systems, Inc.
Sanjay Gopinath
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for the formation of diffusion barrier
Patent number
6,887,781
Issue date
May 3, 2005
Novellus Systems, Inc.
Sang-Hyeob Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Passivation method for improved uniformity and repeatability for at...
Patent number
6,720,259
Issue date
Apr 13, 2004
Genus, Inc.
Ana R. Londergan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Forming metal-derived layers by simultaneous deposition and evapora...
Patent number
6,589,887
Issue date
Jul 8, 2003
Novellus Systems, Inc.
Jeremie Dalton
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ferroelectric thin film composites made by metalorganic decomposition
Patent number
6,071,555
Issue date
Jun 6, 2000
The United States of America as represented by the Secretary of the Army
Somnath Sengupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface modification of semiconductors using electromagnetic radiation
Patent number
6,015,759
Issue date
Jan 18, 2000
Quester Technology, Inc.
Ashraf R. Khan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Flash evaporator
Patent number
5,887,117
Issue date
Mar 23, 1999
Sharp Kabushiki Kaisha
Seshu Babu Desu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING TiSiN THIN FILM LAYER BY USING ATOMIC LAYER DEPO...
Publication number
20150050806
Publication date
Feb 19, 2015
AIXTRON SE
Woong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transient enhanced atomic layer deposition
Publication number
20080131601
Publication date
Jun 5, 2008
Gi Youl Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-single wafer processing apparatus
Publication number
20060137609
Publication date
Jun 29, 2006
Jerzy P. Puchacz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for cycle time improvements for atomic layer...
Publication number
20050016956
Publication date
Jan 27, 2005
Xinye Liu
C30 - CRYSTAL GROWTH
Information
Patent Application
PASSIVATION METHOD FOR IMPROVED UNIFORMITY AND REPEATABILITY FOR AT...
Publication number
20040023516
Publication date
Feb 5, 2004
Ana R. Londergan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for the formation of diffusion barrier
Publication number
20030194858
Publication date
Oct 16, 2003
Novellus Systems, Inc.
Sang-Hyoeb Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for the formation of diffusion barrier
Publication number
20020081845
Publication date
Jun 27, 2002
Novellus Systems, Inc.
Sang-Hyeob Lee
H01 - BASIC ELECTRIC ELEMENTS