Satish ACHANTA

Person

Leuven, BE

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus
- Patent number 12,117,736
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder and a method of manufacturing a device
- Patent number 11,086,234
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder and a method of manufacturing a substrate holder
- Patent number 10,719,019
- Issue date Jul 21, 2020
- ASML Holding N.V.
- Thomas Poiesz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table and lithographic apparatus
- Patent number 10,192,772
- Issue date Jan 29, 2019
- ASML Netherlands B.V.
- Satish Achanta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder, lithographic apparatus, device manufacturing method,...
- Patent number 9,798,251
- Issue date Oct 24, 2017
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis LaFarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A LITHOGRAPHIC APPARATUS
- Publication number 20220342315
- Publication date Oct 27, 2022
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
- Publication number 20220082953
- Publication date Mar 17, 2022
- ASML Holding N.V.
- Matthew LIPSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
- Publication number 20210053177
- Publication date Feb 25, 2021
- ASML NETHERLANDS B.V.
- Bert Dirk SCHOLTEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20200292947
- Publication date Sep 17, 2020
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
- Publication number 20190332015
- Publication date Oct 31, 2019
- ASML NETHERLANDS B.V.
- Thomas POIESZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20180308740
- Publication date Oct 25, 2018
- ASML NETHERLANDS B.V.
- Satish ACHANTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD,...
- Publication number 20160018744
- Publication date Jan 21, 2016
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis LAFARRE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Satish ACHANTA

Person

Patents Grantslast 30 patents

Lithographic apparatus

Substrate holder and a method of manufacturing a device

Substrate holder and a method of manufacturing a substrate holder

Substrate table and lithographic apparatus

Object holder, lithographic apparatus, device manufacturing method,...

Patents Applicationslast 30 patents

A LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD

SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT

SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A DEVICE

A SUBSTRATE HOLDER AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER

SUBSTRATE TABLE AND LITHOGRAPHIC APPARATUS

OBJECT HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD,...