SATISH RADHAKRISHNAN

Person

SAN JOSE, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of using a segmented showerhead for uniform delivery of mul...
- Patent number 12,043,895
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for providing multiple materials to a process chamber
- Patent number 11,970,775
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Prashanth Kothnur
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Segmented showerhead for uniform delivery of multiple precursors
- Patent number 11,834,743
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporator chamber for forming films on substrates
- Patent number 11,692,261
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cover wafer for semiconductor processing chamber
- Patent number 11,682,544
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Targeted heat control systems
- Patent number 11,600,470
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermally controlled lid stack components
- Patent number 11,515,176
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation shield modification for improving substrate temperature u...
- Patent number 11,515,129
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming films on substrates
- Patent number 11,505,863
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlling a flow process material to a d...
- Patent number 11,393,703
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THERMAL CHOKE PLATE
- Publication number 20240186121
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Vellaichamy Nagappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
- Publication number 20230356354
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
DUAL CHANNEL SHOWERHEAD ASSEMBLY
- Publication number 20230294116
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Prahallad Iyengar
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
BASE PLATE FOR HEATER PEDESTAL
- Publication number 20230207345
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRE-CURSORS
- Publication number 20230092987
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CHOKE PLATE
- Publication number 20230069317
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20230042777
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PEDESTAL WITH IMPROVED UNIFORMITY
- Publication number 20220367236
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
- Publication number 20220351988
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20220122822
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMALLY CONTROLLED LID STACK COMPONENTS
- Publication number 20210320018
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Siva Chandrasekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED HEAT CONTROL SYSTEMS
- Publication number 20210202218
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...
- Publication number 20210166921
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EVAPORATOR CHAMBER FOR FORMING FILMS ON SUBSTRATES
- Publication number 20210025048
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Alexander N. LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20200378000
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...
- Publication number 20200234932
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRECURSORS
- Publication number 20200087790
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FOR PROVIDING MULTIPLE MATERIALS TO A PROCESS CHAMBER
- Publication number 20200048767
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- PRASHANTH KOTHNUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
- Publication number 20190382890
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

SATISH RADHAKRISHNAN

Person

Patents Grantslast 30 patents

Systems and methods for substrate support temperature control

Methods of using a segmented showerhead for uniform delivery of mul...

Showerhead for providing multiple materials to a process chamber

Segmented showerhead for uniform delivery of multiple precursors

Heated pedestal design for improved heat transfer and temperature u...

Evaporator chamber for forming films on substrates

Cover wafer for semiconductor processing chamber

Targeted heat control systems

Thermally controlled lid stack components

Radiation shield modification for improving substrate temperature u...

Methods for forming films on substrates

Apparatus and method for controlling a flow process material to a d...

Patents Applicationslast 30 patents

THERMAL CHOKE PLATE

COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM

DUAL CHANNEL SHOWERHEAD ASSEMBLY

BASE PLATE FOR HEATER PEDESTAL

SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRE-CURSORS

THERMAL CHOKE PLATE

METHODS FOR FORMING FILMS ON SUBSTRATES

HEATER PEDESTAL WITH IMPROVED UNIFORMITY

APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...

COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

THERMALLY CONTROLLED LID STACK COMPONENTS

TARGETED HEAT CONTROL SYSTEMS

RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...

EVAPORATOR CHAMBER FOR FORMING FILMS ON SUBSTRATES

METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES

HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...

SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRECURSORS

SHOWERHEAD FOR PROVIDING MULTIPLE MATERIALS TO A PROCESS CHAMBER

APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...