Satoru MURATA

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Separator of substrate processing apparatus
- Patent number D982537
- Issue date Apr 4, 2023
- Kokusai Electric Corporation
- Shinya Morita
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Adiabatic plate for substrate processing appratus
- Patent number D981972
- Issue date Mar 28, 2023
- Kokusai Electric Corporation
- Shinya Morita
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Reaction tube structure and substrate processing apparatus
- Patent number 11,359,283
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Tetsuya Marubayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,124,872
- Issue date Sep 21, 2021
- Kokusai Electric Corporation
- Mikio Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas inlet attachment for wafer processing apparatus
- Patent number D901564
- Issue date Nov 10, 2020
- Kokusai Electric Corporation
- Satoru Murata
- D15 - Machines not elsewhere specified
Information Patent Grant
Sealing material ring for a semiconductor manufacturing apparatus
- Patent number D862404
- Issue date Oct 8, 2019
- Kokusai Electric Corporation
- Satoru Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate treatment apparatus including reaction tube with opened l...
- Patent number 10,351,951
- Issue date Jul 16, 2019
- Kokusai Electric Corporation
- Keishin Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Nozzle Adapter, Method of Manufactu...
- Publication number 20220298640
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Hironobu SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210348275
- Publication date Nov 11, 2021
- Kokusai Electric Corporation
- Tomoyuki KURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200312631
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Tetsuya MARUBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus
- Publication number 20190256974
- Publication date Aug 22, 2019
- Kokusai Electric Corporation
- Mikio OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180142353
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya MARUBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, REACTION TUBE AND SEMICONDUCTOR DEVI...
- Publication number 20170335452
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Keishin YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Satoru MURATA

Person

Patents Grantslast 30 patents

Separator of substrate processing apparatus

Adiabatic plate for substrate processing appratus

Reaction tube structure and substrate processing apparatus

Substrate processing apparatus

Gas inlet attachment for wafer processing apparatus

Sealing material ring for a semiconductor manufacturing apparatus

Substrate treatment apparatus including reaction tube with opened l...

Patents Applicationslast 30 patents

Substrate Processing Apparatus, Nozzle Adapter, Method of Manufactu...

GAS SUPPLY STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

REACTION TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Substrate Processing Apparatus

REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE TREATMENT APPARATUS, REACTION TUBE AND SEMICONDUCTOR DEVI...