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Satoshi Inada
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Nishishirakawa-gun, JP
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last 30 patents
Information
Patent Grant
Method of measuring contamination amount of vapor phase growth appa...
Patent number
9,437,505
Issue date
Sep 6, 2016
Shin-Etsu Handotai Co., Ltd.
Takeshi Arai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing equipment and heater structural connection
Patent number
8,796,594
Issue date
Aug 5, 2014
NuFlare Technology, Inc.
Hideki Arai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor-phase epitaxial growth method and vapor-phase epitaxy apparatus
Patent number
8,007,588
Issue date
Aug 30, 2011
NuFlare Technology, Inc.
Hideki Ito
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF MEASURING CONTAMINATION AMOUNT OF VAPOR PHASE GROWTH APPA...
Publication number
20150243566
Publication date
Aug 27, 2015
Shin-Etsu Handotai Co., Ltd.
Takeshi Arai
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor manufacturing equipment and heater
Publication number
20070221657
Publication date
Sep 27, 2007
NuFLARE TECHNOLOGY, INC.
Hideki Arai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vapor-phase epitaxial growth method and vapor-phase epitaxy apparatus
Publication number
20070218664
Publication date
Sep 20, 2007
NuFLARE TECHNOLOGY, INC.
Hideki Ito
C30 - CRYSTAL GROWTH
Information
Patent Application
Vapor phase deposition apparatus and vapor phase deposition method
Publication number
20070023869
Publication date
Feb 1, 2007
NuFLARE TECHNOLOGY, INC.
Hiroshi Furutani
C30 - CRYSTAL GROWTH