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Satoshi Kawachi
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Yokohama, JP
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last 30 patents
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Patent Grant
Heat treatment method
Patent number
5,662,469
Issue date
Sep 2, 1997
Tokyo Electron Tohoku Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method and apparatus thereof
Patent number
5,651,670
Issue date
Jul 29, 1997
Tokyo Electron Sagami Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment apparatus utilizing flat heating elements for treati...
Patent number
5,536,918
Issue date
Jul 16, 1996
Tokyo Electron Sagami Kabushiki Kaisha
Wataru Ohkase
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Heat treatment method and apparatus thereof
Patent number
5,429,498
Issue date
Jul 4, 1995
Tokyo Electron Sagami Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH