Claims
- 1. A heat treatment apparatus comprising:
- means for supporting a flat object to be processed with a processing surface thereof facing in a first direction;
- a flat resistor heat generating source having a plural number of ring-shaped heating units of different diameters arranged concentrically on and suspended from a heat retention material so as to face in a direction opposite said first direction and be parallel with said object to be processed;
- a heat control portion which performs independent control of said plural number of ring-shaped heating units;
- a heat baffle member provided between said flat resistor heat generating source and said means for supporting an object to be processed, said heat baffle member having a central portion and peripheral portions, wherein, in a direction perpendicular to said processing surface of said object, said central portion thereof is relatively thicker than said peripheral portions thereof;
- a process tube which houses said means for supporting an object to be processed and an object supported thereon, said process tube being arranged to extend below said heat generating source; and
- a movement mechanism which brings said means for supporting an object to be processed and said flat resistor heat generating source into a position of relative proximity wherein, through said baffle member, said processing surface entirely opposes said heat generating source.
- 2. The heat treatment apparatus of claim 1, wherein said heat baffle member is made of SiC.
Priority Claims (4)
Number |
Date |
Country |
Kind |
3-229694 |
Aug 1991 |
JPX |
|
3-229695 |
Aug 1991 |
JPX |
|
3-229696 |
Aug 1991 |
JPX |
|
3-229698 |
Aug 1991 |
JPX |
|
Parent Case Info
This application is a continuation of Ser. No. 928,111 filed Aug. 11, 1992, now abandoned.
US Referenced Citations (13)
Foreign Referenced Citations (13)
Number |
Date |
Country |
60-123025 |
Jul 1985 |
JPX |
60-170233 |
Sep 1985 |
JPX |
63-186424 |
Aug 1988 |
JPX |
64-11324 |
Jan 1989 |
JPX |
1-256117 |
Oct 1989 |
JPX |
2-125610 |
May 1990 |
JPX |
2-174115 |
Jul 1990 |
JPX |
3-132014 |
Jun 1991 |
JPX |
4-51538 |
Feb 1992 |
JPX |
5-121341 |
May 1993 |
JPX |
5-121342 |
May 1993 |
JPX |
5-144758 |
Jun 1993 |
JPX |
9219790 |
Nov 1992 |
WOX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
928111 |
Aug 1992 |
|