Satoshi Shibata

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Elemental analysis method and semiconductor device manufacturing me...
- Patent number 8,088,632
- Issue date Jan 3, 2012
- Panasonic Corporation
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of a semiconductor device
- Patent number 7,737,012
- Issue date Jun 15, 2010
- Panasonic Corporation
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for thermal processing with a RTP process using temperature...
- Patent number 7,560,367
- Issue date Jul 14, 2009
- Panasonic Corporation
- Fumitoshi Kawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating electronic device
- Patent number 7,319,061
- Issue date Jan 15, 2008
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating electronic device
- Patent number 7,282,416
- Issue date Oct 16, 2007
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light irradiation heat treatment method and light irradiation heat...
- Patent number 7,103,271
- Issue date Sep 5, 2006
- Matsushita Electric Industrial Co., Ltd.
- Emi Kanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring temperature, annealing method and method for f...
- Patent number 7,037,733
- Issue date May 2, 2006
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method for predicting temperature, test wafer for use in temperatur...
- Patent number 6,799,888
- Issue date Oct 5, 2004
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method for predicting temperature, test wafer for use in temperatur...
- Patent number 6,666,577
- Issue date Dec 23, 2003
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method for predicting temperature and test wafer for use in tempera...
- Patent number 6,616,331
- Issue date Sep 9, 2003
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring temperature, method of taking samples for tempe...
- Patent number 6,475,815
- Issue date Nov 5, 2002
- Matsushita Electric Industrial Co., Ltd.
- Yuko Nambu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELEMENTAL ANALYSIS METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING ME...
- Publication number 20100003770
- Publication date Jan 7, 2010
- Satoshi SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of a semiconductor device
- Publication number 20070054444
- Publication date Mar 8, 2007
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating electronic device
- Publication number 20070048918
- Publication date Mar 1, 2007
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for thermal processing
- Publication number 20060186354
- Publication date Aug 24, 2006
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Fumitoshi Kawase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating electronic device
- Publication number 20060079044
- Publication date Apr 13, 2006
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Satoshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Light irradiation heat treatment method and light irradiation heat...
- Publication number 20050173386
- Publication date Aug 11, 2005
- Matsushita Electric Industrial Co., Ltd.
- Emi Kanazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for predicting temperature, test wafer for use in temperatur...
- Publication number 20040109489
- Publication date Jun 10, 2004
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Application
Method for predicting temperature, test wafer for use in temperatur...
- Publication number 20040047394
- Publication date Mar 11, 2004
- Matsushita Electric Industrial Co., Ltd.
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Application
Temperature measuring method, heat treating method, and semiconduct...
- Publication number 20040023421
- Publication date Feb 5, 2004
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Application
Method for predicting temperature and test wafer for use in tempera...
- Publication number 20020075936
- Publication date Jun 20, 2002
- Satoshi Shibata
- G01 - MEASURING TESTING
Information Patent Application
Method for predicting temperature, test wafer for use in temperatur...
- Publication number 20020051481
- Publication date May 2, 2002
- Satoshi Shibata
- G01 - MEASURING TESTING

Satoshi Shibata

Person

Patents Grantslast 30 patents

Elemental analysis method and semiconductor device manufacturing me...

Manufacturing method of a semiconductor device

Method for thermal processing with a RTP process using temperature...

Method for fabricating electronic device

Method for fabricating electronic device

Light irradiation heat treatment method and light irradiation heat...

Method for measuring temperature, annealing method and method for f...

Method for predicting temperature, test wafer for use in temperatur...

Method for predicting temperature, test wafer for use in temperatur...

Method for predicting temperature and test wafer for use in tempera...

Method of measuring temperature, method of taking samples for tempe...

Patents Applicationslast 30 patents

ELEMENTAL ANALYSIS METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING ME...

Manufacturing method of a semiconductor device

Method for fabricating electronic device

Apparatus and method for thermal processing

Method for fabricating electronic device

Light irradiation heat treatment method and light irradiation heat...

Method for predicting temperature, test wafer for use in temperatur...

Method for predicting temperature, test wafer for use in temperatur...

Temperature measuring method, heat treating method, and semiconduct...

Method for predicting temperature and test wafer for use in tempera...

Method for predicting temperature, test wafer for use in temperatur...