Schubert S. CHU

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for cleaning high aspect ratio structures
- Patent number 12,170,196
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and material engineering methods for optoelectronic devic...
- Patent number 12,015,042
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Papo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool platform configuration with reduced f...
- Patent number 11,996,307
- Issue date May 28, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing susceptor
- Patent number 11,848,226
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Anhthu Ngo
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 11,821,088
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature calibration with band gap absorption method
- Patent number 11,815,401
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Zhepeng Cong
- G01 - MEASURING TESTING
Information Patent Grant
Overlap susceptor and preheat ring
- Patent number 11,781,212
- Issue date Oct 10, 2023
- Applied Material, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming silicon-phosphorous materials
- Patent number 11,649,560
- Issue date May 16, 2023
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
- Patent number 11,649,559
- Issue date May 16, 2023
- Applied Materials, Inc.
- Xinyu Bao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for metal silicide deposition
- Patent number 11,615,986
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for cleaning high aspect ratio structures
- Patent number 11,605,544
- Issue date Mar 14, 2023
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked pixel structure formed using epitaxy
- Patent number 11,411,039
- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Papo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature calibration with band gap absorption method
- Patent number 11,359,972
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Zhepeng Cong
- G01 - MEASURING TESTING
Information Patent Grant
Purged viewport for quartz dome in epitaxy reactor
- Patent number 11,189,508
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Ji-Dih Hu
- G01 - MEASURING TESTING
Information Patent Grant
Wafer spot heating with beam width modulation
- Patent number 11,177,144
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Diode laser for wafer heating for EPI processes
- Patent number 11,171,023
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated system for semiconductor process
- Patent number 11,164,767
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Xinyu Bao
- C30 - CRYSTAL GROWTH
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 11,164,737
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for metal silicide deposition
- Patent number 11,152,221
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing metallic iridium and iridium silicide
- Patent number 11,124,874
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lamp infrared radiation profile control by lamp filament design and...
- Patent number 11,057,963
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Zhepeng Cong
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
- Patent number 11,049,719
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
In-situ integrated chambers
- Patent number 11,037,838
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in epi
- Patent number 11,021,795
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Liner for processing chamber
- Patent number 11,021,790
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20240304492
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Hui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20240258137
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20240112945
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Anhthu NGO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
OVERLAP SUSCEPTOR AND PREHEAT RING
- Publication number 20240026522
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS
- Publication number 20230243068
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- C30 - CRYSTAL GROWTH
Information Patent Application
BATCH THERMAL PROCESS CHAMBER
- Publication number 20230230859
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Adel George TANNOUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
- Publication number 20230167581
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Kartik Bhupendra SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES
- Publication number 20230170228
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAP SUSCEPTOR AND PREHEAT RING
- Publication number 20220325400
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD
- Publication number 20220268634
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20220199436
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...
- Publication number 20220157604
- Publication date May 19, 2022
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES
- Publication number 20220093418
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD
- Publication number 20220082445
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- G01 - MEASURING TESTING
Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20220076988
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Hui CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220059342
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION
- Publication number 20220005705
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Xuebin LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION
- Publication number 20220005704
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Xuebin LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED PIXEL STRUCTURE FORMED USING EPITAXY
- Publication number 20210366976
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Papo CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20210324514
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Zhiyuan YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20210285105
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
STRUCTURE & MATERIAL ENGINEERING METHODS FOR OPTOELECTRONIC DEVICES...
- Publication number 20210265416
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Papo CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING SUSCEPTOR
- Publication number 20210175115
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Anhthu NGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20210028075
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS
- Publication number 20200399784
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION
- Publication number 20200266068
- Publication date Aug 20, 2020
- Applied Materials, Inc.
- Xuebin LI
- H01 - BASIC ELECTRIC ELEMENTS

Schubert S. CHU

Person

Patents Grantslast 30 patents

Methods and systems for cleaning high aspect ratio structures

Substrate processing monitoring

Integrated epitaxy and preclean system

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Structure and material engineering methods for optoelectronic devic...

Semiconductor processing tool platform configuration with reduced f...

Low temperature deposition of iridium containing films

Thermal processing susceptor

Multi zone spot heating in EPI

Temperature calibration with band gap absorption method

Overlap susceptor and preheat ring

Method for forming silicon-phosphorous materials

Method of utilizing a degassing chamber to reduce arsenic outgassin...

Low temperature deposition of iridium containing films

Methods and apparatus for metal silicide deposition

Methods and systems for cleaning high aspect ratio structures

Stacked pixel structure formed using epitaxy

Temperature calibration with band gap absorption method

Purged viewport for quartz dome in epitaxy reactor

Wafer spot heating with beam width modulation

Diode laser for wafer heating for EPI processes

Integrated system for semiconductor process

Integrated epitaxy and preclean system

Methods and apparatus for metal silicide deposition

Methods for depositing metallic iridium and iridium silicide

Lamp infrared radiation profile control by lamp filament design and...

Epitaxy system integrated with high selectivity oxide removal and h...

In-situ integrated chambers

Multi zone spot heating in epi

Liner for processing chamber

Patents Applicationslast 30 patents

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

THERMAL PROCESSING SUSCEPTOR

OVERLAP SUSCEPTOR AND PREHEAT RING

METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS

BATCH THERMAL PROCESS CHAMBER

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER

METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES

OVERLAP SUSCEPTOR AND PREHEAT RING

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES

TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION

METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION

STACKED PIXEL STRUCTURE FORMED USING EPITAXY

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

MULTI ZONE SPOT HEATING IN EPI

STRUCTURE & MATERIAL ENGINEERING METHODS FOR OPTOELECTRONIC DEVICES...

THERMAL PROCESSING SUSCEPTOR

SUBSTRATE PROCESSING MONITORING

METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS

METHODS AND APPARATUS FOR METAL SILICIDE DEPOSITION