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Scott G. Meikle
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Boise, ID, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inline monitoring of pad loading for CuCMP and developing an endpoi...
Patent number
8,557,132
Issue date
Oct 15, 2013
Micron Technology, Inc.
Dinesh Chopra
B24 - GRINDING POLISHING
Information
Patent Grant
Stud capacitor device and fabrication method
Patent number
8,106,438
Issue date
Jan 31, 2012
Micron Technology, Inc.
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for selectively removing conductive material from a microele...
Patent number
8,048,287
Issue date
Nov 1, 2011
Round Rock Research, LLC
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for removing metal layers formed outside an aperture of a BP...
Patent number
8,048,756
Issue date
Nov 1, 2011
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for electromechanically and/or electrochemica...
Patent number
7,972,485
Issue date
Jul 5, 2011
Round Rock Research, LLC
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Stud capacitor device and fabrication method
Patent number
7,838,381
Issue date
Nov 23, 2010
Micron Technology, Inc.
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a microelectronic structure having a conductive...
Patent number
7,700,436
Issue date
Apr 20, 2010
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for electromechanically and/or electrochemica...
Patent number
7,618,528
Issue date
Nov 17, 2009
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for selectively removing conductive material...
Patent number
7,604,729
Issue date
Oct 20, 2009
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for electrical, mechanical and/or chemical re...
Patent number
7,588,677
Issue date
Sep 15, 2009
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for electrically detecting characteristics of...
Patent number
7,560,017
Issue date
Jul 14, 2009
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Turbidity monitoring methods, apparatuses, and sensors
Patent number
7,538,880
Issue date
May 26, 2009
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor processor systems, a system configured to provide a s...
Patent number
7,530,877
Issue date
May 12, 2009
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for forming a planarizing pad having a film an...
Patent number
7,374,476
Issue date
May 20, 2008
Micron Technology, Inc.
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor processing methods of removing conductive material
Patent number
7,367,871
Issue date
May 6, 2008
Micron Technology, Inc.
Trung Tri Doan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Planarizing solutions, planarizing machines and methods for mechani...
Patent number
7,276,446
Issue date
Oct 2, 2007
Micron Technology, Inc.
Karl M. Robinson
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for electromechanically and/or electrochemica...
Patent number
7,220,166
Issue date
May 22, 2007
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for chemically, mechanically, and/or electroly...
Patent number
7,192,335
Issue date
Mar 20, 2007
Micron Technology, Inc.
Whonchee Lee
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor processors, sensors, semiconductor processing systems...
Patent number
7,180,591
Issue date
Feb 20, 2007
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for electrically and/or chemically-mechanical...
Patent number
7,160,176
Issue date
Jan 9, 2007
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for selectively removing conductive material...
Patent number
7,153,195
Issue date
Dec 26, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and apparatus for electrochemical-mechanical processing of...
Patent number
7,153,410
Issue date
Dec 26, 2006
Micron Technology, Inc.
Scott E. Moore
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for forming a planarizing pad having a film an...
Patent number
7,151,056
Issue date
Dec 19, 2006
Micron Technology, In.c
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for electrically detecting characteristics of...
Patent number
7,134,934
Issue date
Nov 14, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor workpiece processing methods
Patent number
7,118,447
Issue date
Oct 10, 2006
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor workpiece processing methods
Patent number
7,118,455
Issue date
Oct 10, 2006
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor workpiece processing methods, a method of preparing s...
Patent number
7,118,445
Issue date
Oct 10, 2006
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for electrical, mechanical and/or chemical re...
Patent number
7,112,121
Issue date
Sep 26, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Microelectronic substrate having conductive material with blunt cor...
Patent number
7,094,131
Issue date
Aug 22, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for removing adjacent conductive and nonconduc...
Patent number
7,078,308
Issue date
Jul 18, 2006
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR REMOVING ADJACENT CONDUCTIVE AND NON-CONDU...
Publication number
20100176083
Publication date
Jul 15, 2010
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR SELECTIVELY REMOVING CONDUCTIVE MATERIAL...
Publication number
20100032314
Publication date
Feb 11, 2010
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS AND APPARATUS FOR ELECTROMECHANICALLY AND/OR ELECTROCHEMICA...
Publication number
20100006428
Publication date
Jan 14, 2010
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
STUD CAPACITOR DEVICE AND FABRICATION METHOD
Publication number
20080057662
Publication date
Mar 6, 2008
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR ELECTROMECHANICALLY AND/OR ELECTROCHEMICA...
Publication number
20070111641
Publication date
May 17, 2007
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PLANARIZING PAD HAVING A FILM AN...
Publication number
20070080142
Publication date
Apr 12, 2007
Micron Technology, Inc.
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PLANARIZING PAD HAVING A FILM AN...
Publication number
20070079933
Publication date
Apr 12, 2007
Micron Technology, Inc.
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Application
Stud capacitor device and fabrication method
Publication number
20070040205
Publication date
Feb 22, 2007
Guy Blalock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for selectively removing conductive material...
Publication number
20070037490
Publication date
Feb 15, 2007
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Semiconductor processor systems, systems configured to provide a se...
Publication number
20070015443
Publication date
Jan 18, 2007
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Application
Methods and apparatus for electrically detecting characteristics of...
Publication number
20060249397
Publication date
Nov 9, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Planarization process for semiconductor substrates
Publication number
20060249723
Publication date
Nov 9, 2006
Trung T. Doan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for electrical, mechanical and/or chemical re...
Publication number
20060234604
Publication date
Oct 19, 2006
Micron Technology, Inc.
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Semiconductor processing methods of removing conductive material
Publication number
20060223425
Publication date
Oct 5, 2006
Trung Tri Doan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for removing adjacent conductive and non-condu...
Publication number
20060208322
Publication date
Sep 21, 2006
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for removing adjacent conductive and non-condu...
Publication number
20060199351
Publication date
Sep 7, 2006
Micron Technology, Inc.
Whonchee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polishing pads and planarizing machines for mechanical or chemical-...
Publication number
20050191948
Publication date
Sep 1, 2005
Vishnu K. Agarwal
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor processor control systems
Publication number
20050185180
Publication date
Aug 25, 2005
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Application
Methods of preparing semiconductor workpiece process fluid
Publication number
20050153632
Publication date
Jul 14, 2005
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Application
Planarizing solutions, planarizing machines and methods for mechani...
Publication number
20050107010
Publication date
May 19, 2005
Karl M. Robinson
B24 - GRINDING POLISHING
Information
Patent Application
Methods and apparatus for electrically and/or chemically-mechanical...
Publication number
20050035000
Publication date
Feb 17, 2005
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for forming a planarizing pad having a film an...
Publication number
20050037696
Publication date
Feb 17, 2005
Scott G. Meikle
B24 - GRINDING POLISHING
Information
Patent Application
Methods and apparatus for electrically and/or chemically-mechanical...
Publication number
20050034999
Publication date
Feb 17, 2005
Whonchee Lee
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Semiconductor processor control systems, semiconductor processor sy...
Publication number
20050026547
Publication date
Feb 3, 2005
Scott E. Moore
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for chemically, mechanically, and/or electroly...
Publication number
20050020192
Publication date
Jan 27, 2005
Whonchee Lee
B24 - GRINDING POLISHING
Information
Patent Application
Semiconductor processing methods of removing conductive material
Publication number
20040221956
Publication date
Nov 11, 2004
Trung Tri Doan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Inline monitoring of pad loading for CuCMP and developing an endpoi...
Publication number
20040206374
Publication date
Oct 21, 2004
Dinesh Chopra
B08 - CLEANING
Information
Patent Application
Inline monitoring of pad loading for CuCMP and developing an endpoi...
Publication number
20040206454
Publication date
Oct 21, 2004
Dinesh Chopra
B08 - CLEANING
Information
Patent Application
Planarization process for semiconductor substrates
Publication number
20040209475
Publication date
Oct 21, 2004
Trung T. Doan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Turbidity monitoring methods, apparatuses, and sensors
Publication number
20040198183
Publication date
Oct 7, 2004
Micron Technology, Inc.
Scott E. Moore
B24 - GRINDING POLISHING