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Scott J. Bukofsky
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Hopewell Junction, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Generating mask patterns for alternating phase-shift mask lithography
Patent number
7,475,380
Issue date
Jan 6, 2009
International Business Machines Corporation
Lars W. Liebmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Single exposure of mask levels having a lines and spaces array usin...
Patent number
7,413,833
Issue date
Aug 19, 2008
Infineon Technologies AG
Shahid Butt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Topography compensated film application methods
Patent number
7,354,779
Issue date
Apr 8, 2008
International Business Machines Corporation
Colin J. Brodsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Density-aware dynamic leveling in scanning exposure systems
Patent number
7,239,371
Issue date
Jul 3, 2007
International Business Machines Corporation
Bernhard R. Liegl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to reduce photoresist pattern collapse by controlled surface...
Patent number
7,229,936
Issue date
Jun 12, 2007
International Business Machines Corporation
Colin J. Brodsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for phase/amplitude error detection of alternatin...
Patent number
7,171,034
Issue date
Jan 30, 2007
International Business Machines Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Layout impact reduction with angled phase shapes
Patent number
7,135,255
Issue date
Nov 14, 2006
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Generating mask patterns for alternating phase-shift mask lithography
Patent number
6,993,741
Issue date
Jan 31, 2006
International Business Machines Corporation
Lars W. Liebmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron beam array write head system and method
Patent number
6,891,169
Issue date
May 10, 2005
International Business Machines Corporation
Scott Josef Bukofsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned alternating phase shift mask patterning process
Patent number
6,824,932
Issue date
Nov 30, 2004
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for evaluating the effects of multiple exposure processes in...
Patent number
6,777,147
Issue date
Aug 17, 2004
International Business Machines Corporation
Carlos A. Fonseca
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and compositions for imaging acids in chemically amplified...
Patent number
6,566,030
Issue date
May 20, 2003
Yale University
Robert David Grober
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for printing semiconductor patterns using an opti...
Patent number
6,563,566
Issue date
May 13, 2003
International Business Machines Corporation
Alan E. Rosenbluth
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multiple exposure process for formation of dense rectangular arrays
Patent number
6,511,791
Issue date
Jan 28, 2003
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plural interleaved exposure process for increased feature aspect ra...
Patent number
6,451,508
Issue date
Sep 17, 2002
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to overcome image shortening by use of sub-resolution reticl...
Patent number
6,451,490
Issue date
Sep 17, 2002
International Business Machines Corporation
William H. Advocate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and compositions for imaging acids in chemically amplified...
Patent number
6,376,149
Issue date
Apr 23, 2002
Yale University
Robert David Grober
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optimization of reticle rotation for critical dimension and overlay...
Patent number
6,327,023
Issue date
Dec 4, 2001
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
TOPOGRAPHY COMPENSATED FILM APPLICATION METHODS
Publication number
20070249070
Publication date
Oct 25, 2007
Colin J. Brodsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DENSITY-AWARE DYNAMIC LEVELING IN SCANNING EXPOSURE SYSTEMS
Publication number
20070085991
Publication date
Apr 19, 2007
International Business Machines Corporation
Bernhard R. Liegl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTOMATED SUB-FIELD BLADING FOR LEVELING OPTIMIZATION IN LITHOGRAPH...
Publication number
20060160037
Publication date
Jul 20, 2006
International Business Machines Corporation
Colin J. Brodsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Generating mask patterns for alternating phase-shift mask lithography
Publication number
20060107248
Publication date
May 18, 2006
Lars W. Liebmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Single exposure of mask levels having a lines and spaces array usin...
Publication number
20050255387
Publication date
Nov 17, 2005
Infineon Technologies North America Corp.
Shahid Butt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD TO REDUCE PHOTORESIST PATTERN COLLAPSE BY CONTROLLED SURFACE...
Publication number
20050245094
Publication date
Nov 3, 2005
International Business Machines Corporation
Colin J. Brodsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GENERATING MASK PATTERNS FOR ALTERNATING PHASE-SHIFT MASK LITHOGRAPHY
Publication number
20050014074
Publication date
Jan 20, 2005
International Business Machines Corporation
Lars W. Liebmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LAYOUT IMPACT REDUCTION WITH ANGLED PHASE SHAPES
Publication number
20040191638
Publication date
Sep 30, 2004
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electron beam array write head system and method
Publication number
20040140437
Publication date
Jul 22, 2004
International Business Machines Corporation
Scott Josef Bukofsky
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method and system for phase/amplitude error detection of alternatin...
Publication number
20040105577
Publication date
Jun 3, 2004
International Business Machines Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Self-aligned alternating phase shift mask patterning process
Publication number
20030228526
Publication date
Dec 11, 2003
International Business Machines Corporation
Scott J. Bukofsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for printing semiconductor patterns using an opti...
Publication number
20020140920
Publication date
Oct 3, 2002
International Business Machines Corporation,
Alan E. Rosenbluth
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Methods and compositions for imaging acids in chemically amplified...
Publication number
20020042019
Publication date
Apr 11, 2002
Robert David Grober
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND COMPOSITIONS FOR IMAGING ACIDS IN CHEMICALLY AMPLIFIED...
Publication number
20010001698
Publication date
May 24, 2001
Robert David Grober
ROBERT D. GROBER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY