Scott T. Barusso

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Gloucester, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Bellows liner for an ion beam implanter
- Patent number 7,205,556
- Issue date Apr 17, 2007
- Axcelis Technologies, Inc.
- Lyudmila Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal filament for plasma generation
- Patent number 6,204,508
- Issue date Mar 20, 2001
- Axcelis Technologies, Inc.
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Bellows liner for an ion beam implanter
- Publication number 20060071181
- Publication date Apr 6, 2006
- Axcelis Technologies, Inc.
- Lyudmila Stone
- H01 - BASIC ELECTRIC ELEMENTS