Seiji Nakano

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,142,483
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Transfer device, substrate processing system, transfer method and s...
- Patent number 11,837,487
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,545,377
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,916,463
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,615,065
- Issue date Apr 7, 2020
- Tokyo Electron Limited
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method and storage medium
- Patent number 10,128,138
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 9,627,238
- Issue date Apr 18, 2017
- Tokyo Electron Limited
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 8,707,805
- Issue date Apr 29, 2014
- Tokyo Electron Limited
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Device and method for supporting a substrate
- Patent number 8,528,889
- Issue date Sep 10, 2013
- Tokyo Electron Limited
- Seiji Nakano
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240379370
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Yoshihiro KAWAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230207344
- Publication date Jun 29, 2023
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEPARATING APPARATUS AND SEPARATING METHOD
- Publication number 20220266312
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B08 - CLEANING
Information Patent Application
SEPARATING APPARATUS AND SEPARATING METHOD
- Publication number 20220270895
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Seiji NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220234160
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210391177
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yoshihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20210118711
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM, TRANSFER METHOD AND S...
- Publication number 20200234990
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Takeshi TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200203202
- Publication date Jun 25, 2020
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180366356
- Publication date Dec 20, 2018
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM
- Publication number 20170178935
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...
- Publication number 20140178162
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Katsuhiro Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20130166064
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE
- Publication number 20100243168
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Seiji Nakano
- H01 - BASIC ELECTRIC ELEMENTS

Seiji Nakano

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Transfer device, substrate processing system, transfer method and s...

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus, substrate processing method and rec...

Substrate transfer method and storage medium

Substrate transfer apparatus, substrate transfer method, and storag...

Transfer apparatus and transfer method

Device and method for supporting a substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEPARATING APPARATUS AND SEPARATING METHOD

SEPARATING APPARATUS AND SEPARATING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM, TRANSFER METHOD AND S...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND STORAG...

TRANSFER APPARATUS AND TRANSFER METHOD

DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE