Sen-Nan Lee

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of planarization
- Patent number 6,277,751
- Issue date Aug 21, 2001
- Worldwide Semiconductor Manufacturing Corp.
- Pao-Kang Niu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation for improving chemical-mechanical polishing operation
- Patent number 6,116,991
- Issue date Sep 12, 2000
- Worldwide Semiconductor Manufacturing Corp.
- Ying-Chih Liu
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer cleaning device
- Patent number 6,101,656
- Issue date Aug 15, 2000
- Worldwide Semiconductor Manufacturing Corp.
- Sen-Nan Lee
- B08 - CLEANING
Information Patent Grant
Method of forming barrier layer for tungsten plugs in interlayer di...
- Patent number 6,022,800
- Issue date Feb 8, 2000
- Worldwide Semiconductor Manufacturing Corporation
- Wen-Yu Ho
- H01 - BASIC ELECTRIC ELEMENTS