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SEOUL, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
Patent number
11,852,583
Issue date
Dec 26, 2023
Samsung Electronics Co., Ltd.
Jongju Park
G01 - MEASURING TESTING
Information
Patent Grant
Phase shift masks for extreme ultraviolet lithography
Patent number
11,774,846
Issue date
Oct 3, 2023
Samsung Electronics Co., Ltd.
Seongsue Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
Patent number
11,635,371
Issue date
Apr 25, 2023
Samsung Electronics Co., Ltd.
Jongju Park
G01 - MEASURING TESTING
Information
Patent Grant
Phase shift masks for extreme ultraviolet lithography
Patent number
11,487,197
Issue date
Nov 1, 2022
Samsung Electronics Co., Ltd.
Seongsue Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shift mask for extreme ultraviolet lithography
Patent number
11,372,323
Issue date
Jun 28, 2022
Samsung Electronics Co., Ltd.
Hwanseok Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase-shift mask for extreme ultraviolet lithography
Patent number
10,719,008
Issue date
Jul 21, 2020
Samsung Electronics Co., Ltd.
Hwanseok Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV light generator including collecting mirror having drip hole
Patent number
10,401,602
Issue date
Sep 3, 2019
Samsung Electronics Co., Ltd.
Hoyeon Kim
G02 - OPTICS
Information
Patent Grant
Reflective photomask, method of fabricating the same, and exposure...
Patent number
10,126,642
Issue date
Nov 13, 2018
Samsung Electronics Co., Ltd.
Insung Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle and exposure apparatus including the same
Patent number
9,996,001
Issue date
Jun 12, 2018
Samsung Electronics Co., Ltd.
Insung Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam shapers, annealing systems employing the same, methods of heat...
Patent number
9,466,490
Issue date
Oct 11, 2016
Samsung Electronics Co., Ltd.
Sanghyun Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Beam shapers, annealing systems employing the same, methods of heat...
Patent number
9,087,698
Issue date
Jul 21, 2015
Samsung Electronics Co., Ltd.
Sanghyun Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...
Publication number
20230236124
Publication date
Jul 27, 2023
Samsung Electronics Co., Ltd.
Jongju Park
G01 - MEASURING TESTING
Information
Patent Application
PHASE SHIFT MASKS FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20230018819
Publication date
Jan 19, 2023
Samsung Electronics Co., Ltd.
SEONGSUE KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE SHIFT MASKS FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20210318608
Publication date
Oct 14, 2021
Samsung Electronics Co., Ltd.
SEONGSUE KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...
Publication number
20210293701
Publication date
Sep 23, 2021
Samsung Electronics Co., Ltd.
Jongju Park
G01 - MEASURING TESTING
Information
Patent Application
PHASE-SHIFT MASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20200209732
Publication date
Jul 2, 2020
Samsung Electronics Co., Ltd.
Hwanseok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHASE-SHIFT MASK FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20180143527
Publication date
May 24, 2018
Samsung Electronics Co., Ltd.
Hwanseok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RETICLE AND EXPOSURE APPARATUS INCLUDING THE SAME
Publication number
20170131638
Publication date
May 11, 2017
Samsung Electronics Co., Ltd.
INSUNG KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE PHOTOMASK, METHOD OF FABRICATING THE SAME, AND EXPOSURE...
Publication number
20170108767
Publication date
Apr 20, 2017
Samsung Electronics Co., Ltd.
INSUNG KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT GENERATOR INCLUDING COLLECTING MIRROR HAVING DRIP HOLE
Publication number
20170059837
Publication date
Mar 2, 2017
Samsung Electronics Co., Ltd.
Hoyeon KIM
G02 - OPTICS
Information
Patent Application
BEAM SHAPERS, ANNEALING SYSTEMS EMPLOYING THE SAME, METHODS OF HEAT...
Publication number
20150311078
Publication date
Oct 29, 2015
Sanghyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASKS AND METHODS OF FABRICATING SEMICONDUCTOR DEVICES USING T...
Publication number
20140220481
Publication date
Aug 7, 2014
Samsung Electronics Co., Ltd.
Mun Ja Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BEAM SHAPERS, ANNEALING SYSTEMS EMPLOYING THE SAME, METHODS OF HEAT...
Publication number
20140076867
Publication date
Mar 20, 2014
Sanghyun Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR