Shambhu N. ROY

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucking force measurement tool for process chamber c...
- Patent number 10,879,094
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Srinivas D. Nemani
- G01 - MEASURING TESTING
Information Patent Grant
High temperature chuck for plasma processing systems
- Patent number 10,468,285
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ plasma clean for removal of residue from pedestal surface w...
- Patent number 9,818,585
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Richard J. Green
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature chuck for plasma processing systems
- Patent number 9,728,437
- Issue date Aug 8, 2017
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for spacer deposition and selective removal i...
- Patent number 9,484,202
- Issue date Nov 1, 2016
- Applied Materials, Inc.
- Jie Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
- Patent number 9,447,499
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma source based cyclic CVD process for nanocrystalline d...
- Patent number 9,382,625
- Issue date Jul 5, 2016
- Applied Materials, Inc.
- Jun Xue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature electrostatic chuck with radial thermal chokes
- Patent number 9,337,067
- Issue date May 10, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated cooling plate for E-chucks and pedestals
- Patent number 9,064,911
- Issue date Jun 23, 2015
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ plasma clean for removal of residue from pedestal surface w...
- Patent number 8,900,471
- Issue date Dec 2, 2014
- Applied Materials, Inc.
- Richard J. Green
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and methods of use thereof
- Patent number 8,559,159
- Issue date Oct 15, 2013
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly
- Patent number 8,390,980
- Issue date Mar 5, 2013
- Applied Materials, Inc.
- Steven V. Sansoni
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCKING FORCE MEASUREMENT TOOL FOR PROCESS CHAMBER C...
- Publication number 20180144959
- Publication date May 24, 2018
- Applied Materials, Inc.
- Srinivas D. Nemani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRESS BALANCED ELECTROSTATIC SUBSTRATE CARRIER WITH CONTACTS
- Publication number 20180122679
- Publication date May 3, 2018
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH IN SITU WAFER ROTATION
- Publication number 20180033673
- Publication date Feb 1, 2018
- Applied Materials, Inc.
- Srinivas D. Nemani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSED WAFER AS TOP PLATE OF A WORKPIECE CARRIER IN SEMICONDUCTO...
- Publication number 20180025931
- Publication date Jan 25, 2018
- Applied Materials, Inc.
- Srinivas D. Nemani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
- Publication number 20170309509
- Publication date Oct 26, 2017
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
- Publication number 20160225651
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Toan Q. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE PLASMA SOURCE BASED CYCLIC CVD PROCESS FOR NANOCRYSTALLINE D...
- Publication number 20150315707
- Publication date Nov 5, 2015
- Applied Materials, Inc.
- Jun XUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU PLASMA CLEAN FOR REMOVAL OF RESIDUE FROM PEDESTAL SURFACE W...
- Publication number 20140366912
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- Richard J. GREEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY
- Publication number 20130341433
- Publication date Dec 26, 2013
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES
- Publication number 20120285658
- Publication date Nov 15, 2012
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF
- Publication number 20120033340
- Publication date Feb 9, 2012
- Applied Materials, Inc.
- SHAMBHU N. ROY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIASABLE COOLING PEDESTAL
- Publication number 20100247804
- Publication date Sep 30, 2010
- Applied Materials, Inc.
- Shambhu Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU PLASMA CLEAN FOR REMOVAL OF RESIDUE FROM PEDESTAL SURFACE W...
- Publication number 20100218785
- Publication date Sep 2, 2010
- Applied Materials, Inc.
- Richard J. Green
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED COOLING PLATE FOR E-CHUCKS AND PEDESTALS
- Publication number 20100101771
- Publication date Apr 29, 2010
- Applied Materials, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY
- Publication number 20100039747
- Publication date Feb 18, 2010
- Applied Materials, Inc.
- Steven V. Sansoni
- H01 - BASIC ELECTRIC ELEMENTS

Shambhu N. ROY

Person

Patents Grantslast 30 patents

Electrostatic chucking force measurement tool for process chamber c...

High temperature chuck for plasma processing systems

In situ plasma clean for removal of residue from pedestal surface w...

High temperature chuck for plasma processing systems

Apparatus and methods for spacer deposition and selective removal i...

Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

Remote plasma source based cyclic CVD process for nanocrystalline d...

High temperature electrostatic chuck with radial thermal chokes

Heated cooling plate for E-chucks and pedestals

In situ plasma clean for removal of residue from pedestal surface w...

Electrostatic chuck and methods of use thereof

Electrostatic chuck assembly

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCKING FORCE MEASUREMENT TOOL FOR PROCESS CHAMBER C...

STRESS BALANCED ELECTROSTATIC SUBSTRATE CARRIER WITH CONTACTS

SUBSTRATE SUPPORT WITH IN SITU WAFER ROTATION

PROCESSED WAFER AS TOP PLATE OF A WORKPIECE CARRIER IN SEMICONDUCTO...

HIGH TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS

HIGH TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS

REMOTE PLASMA SOURCE BASED CYCLIC CVD PROCESS FOR NANOCRYSTALLINE D...

IN SITU PLASMA CLEAN FOR REMOVAL OF RESIDUE FROM PEDESTAL SURFACE W...

DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY

HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES

ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF

BIASABLE COOLING PEDESTAL

IN SITU PLASMA CLEAN FOR REMOVAL OF RESIDUE FROM PEDESTAL SURFACE W...

HEATED COOLING PLATE FOR E-CHUCKS AND PEDESTALS

ELECTROSTATIC CHUCK ASSEMBLY