The present disclosure applies broadly to the field of plasma processing equipment. More specifically, systems and methods for providing spatially uniform plasma processing on a workpiece are disclosed.
Integrated circuits and other semiconductor products are often fabricated on surfaces of substrates called “wafers.” Sometimes processing is performed on groups of wafers held in a carrier, while other times processing and testing are performed on one wafer at a time. When single wafer processing or testing is performed, the wafer may be positioned on a wafer chuck. Other workpieces may also be processed on similar chucks.
In an embodiment, a wafer chuck assembly includes a puck, a shaft and a base. The puck includes an electrically insulating material that defines a top surface of the puck, a heater element embedded within the electrically insulating material, and an electrically conductive plate disposed proximate to the electrically insulating material. The shaft includes an electrically conductive shaft housing that is electrically coupled with the plate, and a plurality of connectors, including electrical connectors for the heater element and electrical connectors for the electrodes. The base includes an electrically conductive base housing that is electrically coupled with the shaft housing, and an electrically insulating terminal block disposed within the base housing, the plurality of connectors passing through the terminal block.
In an embodiment, a method of plasma processing includes loading a workpiece onto a chuck having an electrically insulating top surface, providing a DC voltage differential across two spatially separated electrodes within the electrically insulating top surface, to clamp the workpiece to the chuck, and heating the chuck and the workpiece by passing current through heater elements embedded in the chuck. The method further includes providing process gases in a chamber surrounding the chuck, and providing an RF voltage between a conductive plate beneath the chuck, and one or more walls of the chamber, to ignite a plasma from the process gases.
The present disclosure may be understood by reference to the following detailed description taken in conjunction with the drawings described below, wherein like reference numerals are used throughout the several drawings to refer to similar components. It is noted that, for purposes of illustrative clarity, certain elements in the drawings may not be drawn to scale. Specific instances of an item may be referred to by use of a numeral in parentheses (e.g., connectors 230(1), 230(2), etc.) while numerals without parentheses refer to any such item (e.g., connectors 230). In instances where multiple instances of an item are shown, only some of the instances may be labeled, for clarity of illustration.
Embodiments herein provide new and useful functionality for wafer processing systems. Semiconductor wafer sizes have increased while feature sizes have decreased significantly over the years, so that more integrated circuits with greater functionality can be harvested per wafer processed. Typical wafer diameters increased from about 2 or 3 inches in the 1970s to 12 inches or more in the 2010s. Over the same time frame, typical minimum feature sizes of commercial integrated circuits decreased from about 5 microns to about 0.015 microns. Processing smaller features while wafers grow larger requires significant improvements in processing uniformity. Because chemical reaction rates are often temperature sensitive, point to point temperature control across wafers during processing is becoming more important. For example, in certain types of processing, point to point temperature differences within a wafer of a few degrees Celsius may have been acceptable in the past, but now such differences may need to be held to about a degree or less. Certain materials used in fabrication of integrated circuits and other devices may also require very high temperature processing in very corrosive plasma environments. Plasma processing of workpieces other than wafers may also benefit from improved processing uniformity, and are considered within the scope of the present disclosure. Thus, characterization of the chucks herein as “wafer chucks” for holding “wafers” should be understood as equivalent to chucks for holding workpieces of any sort, and “wafer processing systems” as similarly equivalent to processing systems.
Wafer processing system 100 is serviced by one or more utilities such as process fluid(s) 10, external power 20, and vacuum 30. Wafer processing system 100 includes a housing 110 and a wafer interface 115 that receives wafers 50 from external sources and positions them within a processing location 160. Wafer processing system 100 may also include a user interface 145, and a controller 135 that typically includes a microprocessor, memory and the like, may take input from user interface 145 and/or other sources, and provides computer based control over the hardware elements of wafer processing system 100. Controller 135 may interface with external networks and/or computers over one or more data links 40 that may be physical (wires or optical connectors) or wireless connections. Wafer processing system 100 may also include one or more internal power supplies 150 that transform or condition power supplied by external power 20 for use by the hardware elements of the system.
Processing location 160 receives each wafer 50 onto a wafer chuck 170 that, in embodiments, includes three portions: a puck 175, a shaft 180 that supports puck 175, and a base 185 that supports shaft 180. Wafer 50 is physically positioned on, and in embodiments is heated, cooled and/or mechanically held by, puck 175. Wafer chuck 170 is also configured to couple radio frequency (RF) and/or direct current (DC) voltages to wafer 50, for electrostatic clamping of wafer 50 to puck 175, for generating a plasma within processing location 160 and/or for directing reactive ions from the plasma to wafer 50. Processing location 160 thus exposes wafer 50 to “plasma products,” defined herein as any material that is, or has at one time been, part of a plasma. Plasma products may include any or all of ions, radicals, molecular fragments of source gases, other activated species, and/or source gas atoms or molecules that were part of a plasma but were not transformed into ions, radicals and so forth. Gases that have not formed part of a plasma at any time are defined herein as “unactivated gases.”
Puck 175 and/or shaft 180 are also, in embodiments, configured to manipulate wafer 50 for access to wafer handling tools. For example, in embodiments, shaft 180 may raise puck 175 for a wafer 50 to be received thereon, and subsequently lower puck 175 to another height for processing, or the reverse. In these or other embodiments, puck 175 and/or shaft 180 may include actuators that raise or lower wafer 50 relative to a top surface of puck 175, such as lift pins that can extend from or retract within puck 175, such that a wafer tool may be inserted between wafer 50 and the top surface. Shaft 180 may also facilitate electrical and/or fluid connections with puck 175. Base 185 mechanically anchors shaft 180 within housing 110 and, in embodiments, provides interfaces for electrical utilities and/or fluids to shaft 180. Portions of base 185, shaft 180 and puck 175, or any combination thereof, may be formed monolithically with one another, or may be assembled partially or completely from component parts, as further described below.
An electrically conductive plate 220 that may be formed of metal, for example, of aluminum or alloys thereof, is disposed beneath and proximate to top 205. In embodiments, top 205 and plate 220 are separated by a gap 217 to allow for differing thermal expansion of the two across a wide temperature range (e.g., from room temperature when chuck 170 is out of use, up to about 450C for certain processes). It is not necessary for gap 217 to be continuous, that is, top 205 and/or plate 220 may form ridges or channels for mechanical support therebetween, with a gap being considered to exist even if such ridges or channels are present. Gap 217 is thus exposed to process gases and/or plasma products at outer edges of top 205 and plate 220. An inert gas such as nitrogen or helium may be provided as a purge gas for gap 217, providing positive pressure within gap 217 with respect to the surrounding process chamber, to keep the gases and/or plasma products away from internal surfaces of top 205, plate 220 and corresponding surfaces within shaft 180. In embodiments, gap 217 separates top 205 and plate 220 by about 0.5 to 1.5 millimeters.
In shaft 180, an electrically conductive shaft housing 222 is below top 205 and forms a housing for shaft 180. Shaft housing 222 may also be made, for example, of aluminum; plate 220 and shaft housing 222 are electrically coupled and may be integrally formed, as shown in
Shaft 180 also houses a variety of connectors 230 among power supplies and other facilities of equipment in which chuck 170 is located, and features of puck 175. Exemplary connectors 230 shown in
Connectors 230 may also be fluid conduits. Additionally, or instead of connectors 230 being configured as fluid conduits, shaft housing 222, insulating liner 225 and/or spaces between them may be configured with fluid passages. For example,
The number and arrangement of connectors 230 in
Base 185 of chuck 170 includes an electrically conductive base housing 270 that may be made of metal (for example, of aluminum) and may be may be integrally formed with shaft housing 222 or assembled to it by fasteners, welding or the like. In embodiments, base housing 270 includes an electrically insulating terminal block 275 through which connectors 230-265 pass. Terminal block 275 serves to align connectors 230-265 such that their respective distal ends are arranged to mate with corresponding sockets within puck 175. Terminal block 275 may be formed of an insulator such as polyether ether ketone (PEEK) or ceramic, which both provide good electrical resistance and stability at high temperatures.
Base housing 270 may include channels such as channel 280 therein for heating/cooling fluids, as shown. Heating/cooling fluids passed through channel 280 may be either gases or liquids. In embodiments, a heating/cooling fluid passed through channel 280 is a mixture of water and ethylene glycol or propylene glycol, having a mix ratio of approximately 50% water, 50% glycol. In embodiments, cooling provided through channel 280 cools not only base housing 270, but also shaft housing 222 and conductive plate 220 mechanically connected therewith. Advantageously, gap 217 and the purge gas provided therein serve to insulate plate 220 from the highest temperatures reached within top 220; also, metal of shaft housing 222 may be thicker than would be required for mechanical purposes only, to provide high heat transfer from plate 220 down to base housing 270, where the heat is removed by the cooling fluids passed through channel 280. For example, in embodiments, shaft housing 222 may be 1.5 mm, 2.0 mm, 2.5 mm or thicker.
Base 185 may be fixed within an associated piece of wafer processing equipment, or may be movably mounted using slides, hinges, stages or other devices to position puck 175 to send or receive a wafer or other workpiece, and/or to align the wafer or workpiece as needed.
A second power supply 150(2) is controllably configured to provide RF energy and/or DC bias to electrodes 210(1) and 210(2) within chuck 170, through connectors 230(1) and 230(2), as schematically shown, and to other parts of processing system 300. Specific connections of the RF energy and/or DC bias may vary, as discussed further below. Power supply 150(2) may provide, for example, DC bias across electrodes 210(1) and 210(2), and may provide RF energy and/or DC bias between electrodes 210(1) and 210(2) and other parts of processing system 300, as indicated by connection 151 between power supply 150(2) and diffuser 350. Providing both RF energy and DC bias is especially useful for both electrostatically clamping wafer 50 (or any other workpiece) to chuck 170, for generating a plasma within process chamber 305, and for directing ions of the plasma to certain processing sites on wafer 50, as discussed further below. Typical DC clamping voltages are ±200V delivered to opposite electrodes 210(1) and 210(2), while typical RF voltages are ±75V across process chamber 305 (RF power applied to the plasma is about 100 W-500 W). A portion of processing system 300 is shown in greater detail in
All of the components of, and integrated with, wafer chuck 170 are compatible with very high temperature operation, in contrast to earlier systems that may utilize materials that are not compatible with high temperatures, such as certain polymers or plastics, rubber, and the like. The components that are exposed to plasma are also capable of surviving very harsh plasma environments, such as H* or F* radicals, and others, produced when NH3 or NF3 respectively are utilized as source gases. O2 is also commonly added as a source gas (to supply electrons, facilitating plasma initiation) creating further ionic species and radicals. Earlier systems often used stainless steel chucks, but stainless generally corrodes in such environments, causing particulate contamination. The arrangement of wafer chuck 170 within processing system 300 is unique in that it allows for processing to take place at a uniform, high temperature while also providing firm electrostatic clamping for heat transfer, and the ability to steer reactive ionic species toward the workpiece, without corrosion or thermal degradation. For example, with proper sizing of components (e.g., thickness of shaft housing 222, and flow rate of purge gas within gap 217) embodiments herein are capable of operating up to 500C, facilitating plasma etching of certain metallic and/or ceramic materials on wafer 50.
The design and types of materials used in wafer chucks described herein are not those that would be normally considered for wafer chucks. In the past, wafer chucks have often been quite simple affairs ranging from mere slabs of metal to slightly more complicated systems that provide vacuum or electrostatic clamping, adjustable wafer alignment/positioning, and the like. Designs that retain all of these functions and yet operate at very high temperatures in highly corrosive plasma environments without degradation, are not known.
Having described several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the invention. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Accordingly, the above description should not be taken as limiting the scope of the invention.
Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.
As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a process” includes a plurality of such processes and reference to “the electrode” includes reference to one or more electrodes and equivalents thereof known to those skilled in the art, and so forth. Also, the words “comprise,” “comprising,” “include,” “including,” and “includes” when used in this specification and in the following claims are intended to specify the presence of stated features, integers, components, or steps, but they do not preclude the presence or addition of one or more other features, integers, components, steps, acts, or groups.
Number | Name | Date | Kind |
---|---|---|---|
2369620 | Sullivan et al. | Feb 1945 | A |
3451840 | Hough | Jun 1969 | A |
3537474 | Rohrer | Nov 1970 | A |
3756511 | Shinroku | Sep 1973 | A |
3937857 | Brummett et al. | Feb 1976 | A |
3969077 | Hill | Jul 1976 | A |
4006047 | Brummett et al. | Feb 1977 | A |
4209357 | Gorin et al. | Jun 1980 | A |
4214946 | Forget et al. | Jul 1980 | A |
4232060 | Mallory, Jr. | Nov 1980 | A |
4234628 | DuRose | Nov 1980 | A |
4265943 | Goldstein et al. | May 1981 | A |
4340462 | Koch | Jul 1982 | A |
4341592 | Shortes et al. | Jul 1982 | A |
4361418 | Tscheppe | Nov 1982 | A |
4364803 | Nidola et al. | Dec 1982 | A |
4368223 | Kobayashi et al. | Jan 1983 | A |
4374698 | Sanders et al. | Feb 1983 | A |
4381441 | Desmarais et al. | Apr 1983 | A |
4397812 | Mallory, Jr. | Aug 1983 | A |
4468413 | Bachmann | Aug 1984 | A |
4565601 | Kakehi et al. | Jan 1986 | A |
4579618 | Celestino et al. | Apr 1986 | A |
4585920 | Hoog et al. | Apr 1986 | A |
4610775 | Phifer | Sep 1986 | A |
4625678 | Shloya et al. | Dec 1986 | A |
4632857 | Mallory, Jr. | Dec 1986 | A |
4656052 | Satou et al. | Apr 1987 | A |
4656076 | Vetanen et al. | Apr 1987 | A |
4668335 | Mockler | May 1987 | A |
4690746 | McInerney et al. | Sep 1987 | A |
4715937 | Moslehi et al. | Dec 1987 | A |
4749440 | Blackwood et al. | Jun 1988 | A |
4753898 | Parrillo et al. | Jun 1988 | A |
4786360 | Cote et al. | Nov 1988 | A |
4793897 | Dunfield et al. | Dec 1988 | A |
4807016 | Douglas | Feb 1989 | A |
4810520 | Wu | Mar 1989 | A |
4816638 | Ukai et al. | Mar 1989 | A |
4820377 | Davis et al. | Apr 1989 | A |
4828649 | Davis | May 1989 | A |
4838990 | Jucha et al. | Jun 1989 | A |
4851370 | Doklan et al. | Jul 1989 | A |
4857140 | Loewenstein | Aug 1989 | A |
4865685 | Palmour | Sep 1989 | A |
4868071 | Walsh et al. | Sep 1989 | A |
4872947 | Wang et al. | Oct 1989 | A |
4878994 | Jucha et al. | Nov 1989 | A |
4886570 | Davis et al. | Dec 1989 | A |
4892753 | Wang et al. | Jan 1990 | A |
4894352 | Lane et al. | Jan 1990 | A |
4904341 | Blaugher et al. | Feb 1990 | A |
4904621 | Loewenstein et al. | Feb 1990 | A |
4913929 | Moslehi et al. | Apr 1990 | A |
4946903 | Gardella et al. | Aug 1990 | A |
4951601 | Maydan et al. | Aug 1990 | A |
4960488 | Law et al. | Oct 1990 | A |
4980018 | Mu et al. | Dec 1990 | A |
4981551 | Palmour | Jan 1991 | A |
4985372 | Narita et al. | Jan 1991 | A |
4991542 | Kohmura et al. | Feb 1991 | A |
4992136 | Tachi et al. | Feb 1991 | A |
4994404 | Sheng et al. | Feb 1991 | A |
5000113 | Wang et al. | Mar 1991 | A |
5006192 | Deguchi | Apr 1991 | A |
5013691 | Lory et al. | May 1991 | A |
5028565 | Chang | Jul 1991 | A |
5030319 | Nishino et al. | Jul 1991 | A |
5038713 | Kawakami et al. | Aug 1991 | A |
5045244 | Marlett | Sep 1991 | A |
5061838 | Lane et al. | Oct 1991 | A |
5083030 | Stavov | Jan 1992 | A |
5089441 | Moslehi | Feb 1992 | A |
5089442 | Olmer | Feb 1992 | A |
5147692 | Bengston | Sep 1992 | A |
5156881 | Okano et al. | Oct 1992 | A |
5180435 | Markunas et al. | Jan 1993 | A |
5186718 | Tepman et al. | Feb 1993 | A |
5188706 | Hori et al. | Feb 1993 | A |
5198034 | deBoer et al. | Mar 1993 | A |
5203911 | Sricharoenchaikit et al. | Apr 1993 | A |
5215787 | Homma | Jun 1993 | A |
5228501 | Tepman et al. | Jul 1993 | A |
5231690 | Soma et al. | Jul 1993 | A |
5235139 | Bengston et al. | Aug 1993 | A |
5238499 | van de Ven et al. | Aug 1993 | A |
5240497 | Shacham et al. | Aug 1993 | A |
5248371 | Maher et al. | Sep 1993 | A |
5248527 | Uchida et al. | Sep 1993 | A |
5252178 | Moslehi | Oct 1993 | A |
5266157 | Kadomura | Nov 1993 | A |
5269881 | Sekiya | Dec 1993 | A |
5270125 | America et al. | Dec 1993 | A |
5271972 | Kwok et al. | Dec 1993 | A |
5275977 | Otsubo et al. | Jan 1994 | A |
5277750 | Wolgang | Jan 1994 | A |
5279669 | Lee | Jan 1994 | A |
5279865 | Chebi et al. | Jan 1994 | A |
5288518 | Homma | Feb 1994 | A |
5290382 | Zarowin et al. | Mar 1994 | A |
5292370 | Tsai et al. | Mar 1994 | A |
5300463 | Cathey et al. | Apr 1994 | A |
5302233 | Kim et al. | Apr 1994 | A |
5306530 | Strongin et al. | Apr 1994 | A |
5314724 | Tsukune et al. | May 1994 | A |
5319247 | Matsuura | Jun 1994 | A |
5326427 | Jerbic | Jul 1994 | A |
5328558 | Kawamura et al. | Jul 1994 | A |
5328810 | Lowrey et al. | Jul 1994 | A |
5330578 | Sakama | Jul 1994 | A |
5334552 | Homma | Aug 1994 | A |
5345999 | Hosokawa | Sep 1994 | A |
5352636 | Beinglass | Oct 1994 | A |
5356478 | Chen et al. | Oct 1994 | A |
5362526 | Wang et al. | Nov 1994 | A |
5368897 | Kurihara et al. | Nov 1994 | A |
5380560 | Kaja et al. | Jan 1995 | A |
5382311 | Ishikawa et al. | Jan 1995 | A |
5384284 | Doan et al. | Jan 1995 | A |
5385763 | Okano et al. | Jan 1995 | A |
5399237 | Keswick et al. | Mar 1995 | A |
5399529 | Homma | Mar 1995 | A |
5403434 | Moslehi | Apr 1995 | A |
5413670 | Langan et al. | May 1995 | A |
5413967 | Matsuda et al. | May 1995 | A |
5415890 | Kloiber et al. | May 1995 | A |
5416048 | Blalock et al. | May 1995 | A |
5420075 | Homma et al. | May 1995 | A |
5429995 | Nishiyama et al. | Jul 1995 | A |
5439553 | Grant et al. | Aug 1995 | A |
5451259 | Krogh | Sep 1995 | A |
5464499 | Moslehi | Nov 1995 | A |
5468342 | Nulty et al. | Nov 1995 | A |
5474589 | Ohga et al. | Dec 1995 | A |
5478403 | Shinagawa et al. | Dec 1995 | A |
5478462 | Walsh | Dec 1995 | A |
5483920 | Pryor | Jan 1996 | A |
5500249 | Telford et al. | Mar 1996 | A |
5505816 | Barnes et al. | Apr 1996 | A |
5510216 | Calabrese et al. | Apr 1996 | A |
5516367 | Lei et al. | May 1996 | A |
5518962 | Murao | May 1996 | A |
5531835 | Fodor et al. | Jul 1996 | A |
5534070 | Okamura et al. | Jul 1996 | A |
5536360 | Nguyen et al. | Jul 1996 | A |
5549780 | Koinuma et al. | Aug 1996 | A |
5558717 | Zhao et al. | Sep 1996 | A |
5560779 | Knowles et al. | Oct 1996 | A |
5563105 | Dobuzinsky et al. | Oct 1996 | A |
5567243 | Foster et al. | Oct 1996 | A |
5571576 | Qian et al. | Nov 1996 | A |
5575853 | Arami et al. | Nov 1996 | A |
5578130 | Hayashi et al. | Nov 1996 | A |
5578161 | Auda | Nov 1996 | A |
5580421 | Hiatt et al. | Dec 1996 | A |
5591269 | Arami et al. | Jan 1997 | A |
5592358 | Shamouilian | Jan 1997 | A |
5599740 | Jang et al. | Feb 1997 | A |
5614055 | Fairbairn et al. | Mar 1997 | A |
5616518 | Foo et al. | Apr 1997 | A |
5624582 | Cain | Apr 1997 | A |
5626922 | Miyanaga et al. | May 1997 | A |
5628829 | Foster et al. | May 1997 | A |
5635086 | Warren, Jr. | Jun 1997 | A |
5645645 | Zhang et al. | Jul 1997 | A |
5648125 | Cane | Jul 1997 | A |
5648175 | Russell et al. | Jul 1997 | A |
5656093 | Burkhart et al. | Aug 1997 | A |
5661093 | Ravi et al. | Aug 1997 | A |
5670066 | Barnes et al. | Sep 1997 | A |
5674787 | Zhao et al. | Oct 1997 | A |
5676758 | Hasegawa et al. | Oct 1997 | A |
5679606 | Wang et al. | Oct 1997 | A |
5685946 | Fathauer et al. | Nov 1997 | A |
5688331 | Aruga et al. | Nov 1997 | A |
5695810 | Dubin et al. | Dec 1997 | A |
5712185 | Tsai et al. | Jan 1998 | A |
5716500 | Bardos et al. | Feb 1998 | A |
5716506 | Maclay et al. | Feb 1998 | A |
5719085 | Moon et al. | Feb 1998 | A |
5733816 | Iyer et al. | Mar 1998 | A |
5747373 | Yu | May 1998 | A |
5753886 | Iwamura et al. | May 1998 | A |
5755859 | Brusic et al. | May 1998 | A |
5756400 | Ye et al. | May 1998 | A |
5756402 | Jimbo et al. | May 1998 | A |
5772770 | Suda et al. | Jun 1998 | A |
5781693 | Ballance et al. | Jul 1998 | A |
5786276 | Brooks et al. | Jul 1998 | A |
5788825 | Park et al. | Aug 1998 | A |
5789300 | Fulford | Aug 1998 | A |
5792376 | Kanai et al. | Aug 1998 | A |
5800686 | Littau et al. | Sep 1998 | A |
5804259 | Robles | Sep 1998 | A |
5812403 | Fong et al. | Sep 1998 | A |
5814238 | Ashby et al. | Sep 1998 | A |
5814365 | Mahawill | Sep 1998 | A |
5820723 | Benjamin et al. | Oct 1998 | A |
5824599 | Schacham-Diamand et al. | Oct 1998 | A |
5830805 | Shacham-Diamand et al. | Nov 1998 | A |
5835334 | McMillin et al. | Nov 1998 | A |
5843538 | Ehrsam et al. | Dec 1998 | A |
5843847 | Pu et al. | Dec 1998 | A |
5844195 | Fairbairn et al. | Dec 1998 | A |
5846332 | Zhao et al. | Dec 1998 | A |
5846373 | Pirkle et al. | Dec 1998 | A |
5846375 | Gilchrist et al. | Dec 1998 | A |
5846598 | Semkow et al. | Dec 1998 | A |
5849639 | Molloy et al. | Dec 1998 | A |
5850105 | Dawson et al. | Dec 1998 | A |
5855681 | Maydan et al. | Jan 1999 | A |
5855685 | Tobe et al. | Jan 1999 | A |
5856240 | Sinha et al. | Jan 1999 | A |
5858876 | Chew | Jan 1999 | A |
5865896 | Nowak | Feb 1999 | A |
5866483 | Shiau et al. | Feb 1999 | A |
5872052 | Iyer | Feb 1999 | A |
5872058 | Van Cleemput et al. | Feb 1999 | A |
5882424 | Taylor et al. | Mar 1999 | A |
5882786 | Nassau et al. | Mar 1999 | A |
5883012 | Chiou | Mar 1999 | A |
5885404 | Kim et al. | Mar 1999 | A |
5885749 | Huggins et al. | Mar 1999 | A |
5888906 | Sandhu et al. | Mar 1999 | A |
5891349 | Tobe et al. | Apr 1999 | A |
5891513 | Dubin et al. | Apr 1999 | A |
5897751 | Makowiecki | Apr 1999 | A |
5899752 | Hey et al. | May 1999 | A |
5900163 | Yi et al. | May 1999 | A |
5904827 | Reynolds | May 1999 | A |
5907790 | Kellam | May 1999 | A |
5910340 | Uchida et al. | Jun 1999 | A |
5913147 | Dubin et al. | Jun 1999 | A |
5915190 | Pirkle | Jun 1999 | A |
5918116 | Chittipeddi | Jun 1999 | A |
5920792 | Lin | Jul 1999 | A |
5926737 | Ameen et al. | Jul 1999 | A |
5932077 | Reynolds | Aug 1999 | A |
5933757 | Yoshikawa et al. | Aug 1999 | A |
5935334 | Fong et al. | Aug 1999 | A |
5937323 | Orczyk et al. | Aug 1999 | A |
5939831 | Fong et al. | Aug 1999 | A |
5942075 | Nagahata et al. | Aug 1999 | A |
5944049 | Beyer et al. | Aug 1999 | A |
5944902 | Redeker et al. | Aug 1999 | A |
5948702 | Rotondaro | Sep 1999 | A |
5951601 | Lesinski et al. | Sep 1999 | A |
5951776 | Selyutin et al. | Sep 1999 | A |
5951896 | Mahawill | Sep 1999 | A |
5953591 | Ishihara et al. | Sep 1999 | A |
5953635 | Andideh | Sep 1999 | A |
5968610 | Liu et al. | Oct 1999 | A |
5969422 | Ting et al. | Oct 1999 | A |
5976327 | Tanaka | Nov 1999 | A |
5990000 | Hong et al. | Nov 1999 | A |
5990013 | Berenguer et al. | Nov 1999 | A |
5993916 | Zhao et al. | Nov 1999 | A |
5997962 | Ogasawara | Dec 1999 | A |
6004884 | Abraham | Dec 1999 | A |
6007635 | Mahawill | Dec 1999 | A |
6007785 | Liou | Dec 1999 | A |
6010962 | Liu et al. | Jan 2000 | A |
6013191 | Nasser-Faili et al. | Jan 2000 | A |
6013584 | M'Saad | Jan 2000 | A |
6015724 | Yamazaki et al. | Jan 2000 | A |
6015747 | Lopatin et al. | Jan 2000 | A |
6017414 | Koemtzopoulos et al. | Jan 2000 | A |
6020271 | Yanagida | Feb 2000 | A |
6030666 | Lam et al. | Feb 2000 | A |
6030881 | Papasouliotis et al. | Feb 2000 | A |
6035101 | Sajoto et al. | Mar 2000 | A |
6037018 | Jang et al. | Mar 2000 | A |
6037266 | Tao et al. | Mar 2000 | A |
6039851 | Iyer | Mar 2000 | A |
6053982 | Halpin et al. | Apr 2000 | A |
6059643 | Hu et al. | May 2000 | A |
6063683 | Wu et al. | May 2000 | A |
6063712 | Gilton et al. | May 2000 | A |
6065424 | Shacham-Diamand et al. | May 2000 | A |
6072147 | Koshiishi | Jun 2000 | A |
6072227 | Yau et al. | Jun 2000 | A |
6074512 | Collins et al. | Jun 2000 | A |
6077780 | Dubin | Jun 2000 | A |
6080529 | Ye et al. | Jun 2000 | A |
6081414 | Flanigan et al. | Jun 2000 | A |
6083344 | Hanawa et al. | Jul 2000 | A |
6083844 | Bui-Le et al. | Jul 2000 | A |
6086677 | Umotoy et al. | Jul 2000 | A |
6087278 | Kim et al. | Jul 2000 | A |
6090212 | Mahawill | Jul 2000 | A |
6093457 | Okumura | Jul 2000 | A |
6093594 | Yeap et al. | Jul 2000 | A |
6099697 | Hausmann | Aug 2000 | A |
6107199 | Allen et al. | Aug 2000 | A |
6110530 | Chen et al. | Aug 2000 | A |
6110832 | Morgan et al. | Aug 2000 | A |
6110836 | Cohen et al. | Aug 2000 | A |
6110838 | Loewenstein | Aug 2000 | A |
6113771 | Landau et al. | Sep 2000 | A |
6117245 | Mandrekar et al. | Sep 2000 | A |
6120640 | Shih et al. | Sep 2000 | A |
6136163 | Cheung et al. | Oct 2000 | A |
6136685 | Narwankar et al. | Oct 2000 | A |
6136693 | Chan et al. | Oct 2000 | A |
6140234 | Uzoh et al. | Oct 2000 | A |
6144099 | Lopatin et al. | Nov 2000 | A |
6147009 | Grill et al. | Nov 2000 | A |
6149828 | Vaartstra | Nov 2000 | A |
6150628 | Smith et al. | Nov 2000 | A |
6153935 | Edelstein et al. | Nov 2000 | A |
6161576 | Maher et al. | Dec 2000 | A |
6162302 | Raghavan et al. | Dec 2000 | A |
6165912 | McConnell et al. | Dec 2000 | A |
6167834 | Wang et al. | Jan 2001 | B1 |
6169021 | Akram et al. | Jan 2001 | B1 |
6170428 | Redeker et al. | Jan 2001 | B1 |
6171661 | Zheng et al. | Jan 2001 | B1 |
6174450 | Patrick et al. | Jan 2001 | B1 |
6174812 | Hsiung et al. | Jan 2001 | B1 |
6176198 | Kao et al. | Jan 2001 | B1 |
6176667 | Fairbairn | Jan 2001 | B1 |
6177245 | Ward et al. | Jan 2001 | B1 |
6179924 | Zhao et al. | Jan 2001 | B1 |
6180523 | Lee et al. | Jan 2001 | B1 |
6182602 | Redeker et al. | Feb 2001 | B1 |
6184121 | Buchwalter et al. | Feb 2001 | B1 |
6186091 | Chu et al. | Feb 2001 | B1 |
6189483 | Ishikawa et al. | Feb 2001 | B1 |
6190233 | Hong et al. | Feb 2001 | B1 |
6194038 | Rossman | Feb 2001 | B1 |
6197181 | Chen | Mar 2001 | B1 |
6197364 | Paunovic et al. | Mar 2001 | B1 |
6197680 | Lin et al. | Mar 2001 | B1 |
6197688 | Simpson | Mar 2001 | B1 |
6197705 | Vassiliev | Mar 2001 | B1 |
6203863 | Liu et al. | Mar 2001 | B1 |
6204200 | Shieh et al. | Mar 2001 | B1 |
6210486 | Mizukami et al. | Apr 2001 | B1 |
6217658 | Orczyk et al. | Apr 2001 | B1 |
6220201 | Nowak | Apr 2001 | B1 |
6228233 | Lakshmikanthan et al. | May 2001 | B1 |
6228751 | Yamazaki et al. | May 2001 | B1 |
6228758 | Pellerin et al. | May 2001 | B1 |
6235643 | Mui et al. | May 2001 | B1 |
6237527 | Kellerman et al. | May 2001 | B1 |
6238513 | Arnold et al. | May 2001 | B1 |
6238582 | Williams et al. | May 2001 | B1 |
6241845 | Gadgil et al. | Jun 2001 | B1 |
6242349 | Nogami et al. | Jun 2001 | B1 |
6244211 | Nishikawa et al. | Jun 2001 | B1 |
6245396 | Nogami | Jun 2001 | B1 |
6245670 | Cheung et al. | Jun 2001 | B1 |
6251236 | Stevens | Jun 2001 | B1 |
6251802 | Moore et al. | Jun 2001 | B1 |
6258170 | Somekh et al. | Jul 2001 | B1 |
6258220 | Dordi et al. | Jul 2001 | B1 |
6258223 | Cheung et al. | Jul 2001 | B1 |
6258270 | Hilgendorff et al. | Jul 2001 | B1 |
6261637 | Oberle | Jul 2001 | B1 |
6277733 | Smith | Aug 2001 | B1 |
6277752 | Chen | Aug 2001 | B1 |
6277763 | Kugimiya et al. | Aug 2001 | B1 |
6281072 | Li et al. | Aug 2001 | B1 |
6281135 | Han et al. | Aug 2001 | B1 |
6284146 | Kim et al. | Sep 2001 | B1 |
6291282 | Wilk et al. | Sep 2001 | B1 |
6291348 | Lopatin et al. | Sep 2001 | B1 |
6303044 | Koemtzopoulos | Oct 2001 | B1 |
6303418 | Cha et al. | Oct 2001 | B1 |
6306772 | Lin | Oct 2001 | B1 |
6312554 | Ye | Nov 2001 | B1 |
6312995 | Yu | Nov 2001 | B1 |
6319387 | Krishnamoorthy et al. | Nov 2001 | B1 |
6321587 | Laush | Nov 2001 | B1 |
6322716 | Qiao et al. | Nov 2001 | B1 |
6323128 | Sambucetti et al. | Nov 2001 | B1 |
6335288 | Kwan et al. | Jan 2002 | B1 |
6340435 | Bjorkman et al. | Jan 2002 | B1 |
6342733 | Hu et al. | Jan 2002 | B1 |
RE37546 | Mahawill | Feb 2002 | E |
6344410 | Lopatin et al. | Feb 2002 | B1 |
6348407 | Gupta et al. | Feb 2002 | B1 |
6350320 | Sherstinsky et al. | Feb 2002 | B1 |
6350697 | Richardson | Feb 2002 | B1 |
6351013 | Luning et al. | Feb 2002 | B1 |
6352081 | Lu et al. | Mar 2002 | B1 |
6355573 | Okumura | Mar 2002 | B1 |
6364949 | Or et al. | Apr 2002 | B1 |
6364954 | Umotoy et al. | Apr 2002 | B2 |
6364957 | Schneider et al. | Apr 2002 | B1 |
6375748 | Yudovsky et al. | Apr 2002 | B1 |
6376386 | Oshima | Apr 2002 | B1 |
6379575 | Yin et al. | Apr 2002 | B1 |
6383896 | Kirimura et al. | May 2002 | B1 |
6383951 | Li | May 2002 | B1 |
6387207 | Janakiraman et al. | May 2002 | B1 |
6391753 | Yu | May 2002 | B1 |
6395150 | Van Cleemput et al. | May 2002 | B1 |
6403491 | Liu et al. | Jun 2002 | B1 |
6415736 | Hao et al. | Jul 2002 | B1 |
6416647 | Dordi et al. | Jul 2002 | B1 |
6418874 | Cox et al. | Jul 2002 | B1 |
6423284 | Arno | Jul 2002 | B1 |
6427623 | Ko | Aug 2002 | B2 |
6432819 | Pavate et al. | Aug 2002 | B1 |
6432831 | Dhindsa et al. | Aug 2002 | B2 |
6436193 | Kasai et al. | Aug 2002 | B1 |
6436816 | Lee et al. | Aug 2002 | B1 |
6440863 | Tsai et al. | Aug 2002 | B1 |
6441492 | Cunningham | Aug 2002 | B1 |
6446572 | Brcka | Sep 2002 | B1 |
6448537 | Nering | Sep 2002 | B1 |
6458718 | Todd | Oct 2002 | B1 |
6461974 | Ni et al. | Oct 2002 | B1 |
6462371 | Weimer et al. | Oct 2002 | B1 |
6465051 | Sahin et al. | Oct 2002 | B1 |
6465366 | Nemani et al. | Oct 2002 | B1 |
6477980 | White et al. | Nov 2002 | B1 |
6479373 | Dreybrodt et al. | Nov 2002 | B2 |
6488984 | Wada et al. | Dec 2002 | B1 |
6494959 | Samoilov et al. | Dec 2002 | B1 |
6499425 | Sandhu et al. | Dec 2002 | B1 |
6500728 | Wang | Dec 2002 | B1 |
6503843 | Xia et al. | Jan 2003 | B1 |
6506291 | Tsai et al. | Jan 2003 | B2 |
6509623 | Zhao | Jan 2003 | B2 |
6516815 | Stevens et al. | Feb 2003 | B1 |
6518548 | Sugaya et al. | Feb 2003 | B2 |
6527968 | Wang et al. | Mar 2003 | B1 |
6528409 | Lopatin et al. | Mar 2003 | B1 |
6528751 | Hoffman et al. | Mar 2003 | B1 |
6537707 | Lee | Mar 2003 | B1 |
6537733 | Campana et al. | Mar 2003 | B2 |
6541397 | Bencher | Apr 2003 | B1 |
6541671 | Martinez et al. | Apr 2003 | B1 |
6544340 | Yudovsky | Apr 2003 | B2 |
6547977 | Yan et al. | Apr 2003 | B1 |
6551924 | Dalton et al. | Apr 2003 | B1 |
6558564 | Loewenhardt | May 2003 | B1 |
6565729 | Chen et al. | May 2003 | B2 |
6569773 | Gellrich et al. | May 2003 | B1 |
6573030 | Fairbairn et al. | Jun 2003 | B1 |
6573606 | Sambucetti et al. | Jun 2003 | B2 |
6585851 | Ohmi et al. | Jul 2003 | B1 |
6586163 | Okabe et al. | Jul 2003 | B1 |
6596599 | Guo | Jul 2003 | B1 |
6596654 | Bayman et al. | Jul 2003 | B1 |
6602434 | Hung et al. | Aug 2003 | B1 |
6603269 | Vo et al. | Aug 2003 | B1 |
6605874 | Leu et al. | Aug 2003 | B2 |
6616967 | Test | Sep 2003 | B1 |
6627532 | Gaillard et al. | Sep 2003 | B1 |
6635578 | Xu et al. | Oct 2003 | B1 |
6638810 | Bakli et al. | Oct 2003 | B2 |
6645301 | Sainty et al. | Nov 2003 | B2 |
6645550 | Cheung et al. | Nov 2003 | B1 |
6656831 | Lee et al. | Dec 2003 | B1 |
6656837 | Xu et al. | Dec 2003 | B2 |
6656848 | Scanlan et al. | Dec 2003 | B1 |
6663715 | Yuda et al. | Dec 2003 | B1 |
6677242 | Liu et al. | Jan 2004 | B1 |
6679981 | Pan et al. | Jan 2004 | B1 |
6688375 | Turner | Feb 2004 | B1 |
6713356 | Skotnicki et al. | Mar 2004 | B1 |
6713835 | Horak et al. | Mar 2004 | B1 |
6717189 | Inoue et al. | Apr 2004 | B2 |
6720213 | Gambino et al. | Apr 2004 | B1 |
6740585 | Yoon et al. | May 2004 | B2 |
6740977 | Ahn et al. | May 2004 | B2 |
6743473 | Parkhe et al. | Jun 2004 | B1 |
6743732 | Lin et al. | Jun 2004 | B1 |
6756235 | Liu et al. | Jun 2004 | B1 |
6759261 | Shimokohbe et al. | Jul 2004 | B2 |
6762127 | Boiteux et al. | Jul 2004 | B2 |
6762435 | Towle | Jul 2004 | B2 |
6764958 | Nemani et al. | Jul 2004 | B1 |
6765273 | Chau et al. | Jul 2004 | B1 |
6767834 | Chung et al. | Jul 2004 | B2 |
6768079 | Kosakai | Jul 2004 | B2 |
6770166 | Fischer | Aug 2004 | B1 |
6772827 | Keller et al. | Aug 2004 | B2 |
6792889 | Nakano et al. | Sep 2004 | B2 |
6794290 | Papasouliotis et al. | Sep 2004 | B1 |
6794311 | Huang et al. | Sep 2004 | B2 |
6796314 | Graff et al. | Sep 2004 | B1 |
6797189 | Hung et al. | Sep 2004 | B2 |
6800336 | Fornsel et al. | Oct 2004 | B1 |
6800830 | Mahawili | Oct 2004 | B2 |
6802944 | Ahmad et al. | Oct 2004 | B2 |
6808564 | Dietze | Oct 2004 | B2 |
6808748 | Kapoor et al. | Oct 2004 | B2 |
6821571 | Huang | Nov 2004 | B2 |
6823589 | White et al. | Nov 2004 | B2 |
6830624 | Janakiraman et al. | Dec 2004 | B2 |
6835995 | Li | Dec 2004 | B2 |
6846745 | Papasouliotis et al. | Jan 2005 | B1 |
6849854 | Sainty | Feb 2005 | B2 |
6852550 | Tuttle et al. | Feb 2005 | B2 |
6858153 | Bjorkman et al. | Feb 2005 | B2 |
6861097 | Goosey et al. | Mar 2005 | B1 |
6861332 | Park et al. | Mar 2005 | B2 |
6869880 | Krishnaraj et al. | Mar 2005 | B2 |
6875280 | Ikeda et al. | Apr 2005 | B2 |
6878206 | Tzu et al. | Apr 2005 | B2 |
6879981 | Rothschild et al. | Apr 2005 | B2 |
6886491 | Kim et al. | May 2005 | B2 |
6892669 | Xu et al. | May 2005 | B2 |
6893967 | Wright et al. | May 2005 | B1 |
6897532 | Schwarz et al. | May 2005 | B1 |
6900596 | Yang et al. | May 2005 | B2 |
6903511 | Chistyakov | Jun 2005 | B2 |
6908862 | Li et al. | Jun 2005 | B2 |
6911112 | An | Jun 2005 | B2 |
6911401 | Khandan et al. | Jun 2005 | B2 |
6921556 | Shimizu et al. | Jul 2005 | B2 |
6924191 | Liu et al. | Aug 2005 | B2 |
6930047 | Yamazaki et al. | Aug 2005 | B2 |
6935269 | Lee et al. | Aug 2005 | B2 |
6942753 | Choi et al. | Sep 2005 | B2 |
6946033 | Tsuel et al. | Sep 2005 | B2 |
6951821 | Hamelin et al. | Oct 2005 | B2 |
6958175 | Sakamoto et al. | Oct 2005 | B2 |
6958286 | Chen et al. | Oct 2005 | B2 |
6995073 | Liou | Feb 2006 | B2 |
7017269 | White et al. | Mar 2006 | B2 |
7018941 | Cui et al. | Mar 2006 | B2 |
7030034 | Fucsko et al. | Apr 2006 | B2 |
7049200 | Arghavani et al. | May 2006 | B2 |
7052553 | Shih et al. | May 2006 | B1 |
7071532 | Geffken et al. | Jul 2006 | B2 |
7084070 | Lee et al. | Aug 2006 | B1 |
7115525 | Abatchev et al. | Oct 2006 | B2 |
7122949 | Strikovski | Oct 2006 | B2 |
7145725 | Hasel et al. | Dec 2006 | B2 |
7148155 | Tarafdar et al. | Dec 2006 | B1 |
7166233 | Johnson et al. | Jan 2007 | B2 |
7183214 | Nam et al. | Feb 2007 | B2 |
7196342 | Ershov et al. | Mar 2007 | B2 |
7226805 | Hallin et al. | Jun 2007 | B2 |
7235137 | Kitayama et al. | Jun 2007 | B2 |
7244474 | Hanawa et al. | Jul 2007 | B2 |
7252011 | Traverso | Aug 2007 | B2 |
7252716 | Kim et al. | Aug 2007 | B2 |
7253123 | Arghavani et al. | Aug 2007 | B2 |
7256370 | Guiver | Aug 2007 | B2 |
7288482 | Panda et al. | Oct 2007 | B2 |
7291360 | Hanawa et al. | Nov 2007 | B2 |
7316761 | Doan et al. | Jan 2008 | B2 |
7329608 | Babayan et al. | Feb 2008 | B2 |
7341633 | Lubomirsky et al. | Mar 2008 | B2 |
7344912 | Okoronyanwu | Mar 2008 | B1 |
7358192 | Merry et al. | Apr 2008 | B2 |
7361865 | Maki et al. | Apr 2008 | B2 |
7364956 | Saito | Apr 2008 | B2 |
7365016 | Ouellet et al. | Apr 2008 | B2 |
7396480 | Kao et al. | Jul 2008 | B2 |
7416989 | Liu et al. | Aug 2008 | B1 |
7465358 | Weidman et al. | Dec 2008 | B2 |
7468319 | Lee | Dec 2008 | B2 |
7484473 | Keller et al. | Feb 2009 | B2 |
7488688 | Chung et al. | Feb 2009 | B2 |
7494545 | Lam et al. | Feb 2009 | B2 |
7500445 | Zhao et al. | Mar 2009 | B2 |
7513214 | Okumura et al. | Apr 2009 | B2 |
7520957 | Kao et al. | Apr 2009 | B2 |
7553756 | Hayashi et al. | Jun 2009 | B2 |
7575007 | Tang et al. | Aug 2009 | B2 |
7581511 | Mardian et al. | Sep 2009 | B2 |
7604708 | Wood et al. | Oct 2009 | B2 |
7611980 | Wells | Nov 2009 | B2 |
7628897 | Mungekar et al. | Dec 2009 | B2 |
7682518 | Chandrachood et al. | Mar 2010 | B2 |
7695590 | Hanawa et al. | Apr 2010 | B2 |
7708859 | Huang et al. | May 2010 | B2 |
7722925 | White et al. | May 2010 | B2 |
7723221 | Hayashi | May 2010 | B2 |
7749326 | Kim et al. | Jul 2010 | B2 |
7785672 | Choi et al. | Aug 2010 | B2 |
7790634 | Munro et al. | Sep 2010 | B2 |
7806077 | Lee et al. | Oct 2010 | B2 |
7806078 | Yoshida | Oct 2010 | B2 |
7807578 | Bencher et al. | Oct 2010 | B2 |
7825038 | Ingle et al. | Nov 2010 | B2 |
7837828 | Ikeda et al. | Nov 2010 | B2 |
7845309 | Condrashoff et al. | Dec 2010 | B2 |
7867926 | Satoh et al. | Jan 2011 | B2 |
7915139 | Lang et al. | Mar 2011 | B1 |
7932181 | Singh et al. | Apr 2011 | B2 |
7939422 | Ingle et al. | May 2011 | B2 |
7968441 | Xu | Jun 2011 | B2 |
7976631 | Burrows | Jul 2011 | B2 |
7981806 | Jung | Jul 2011 | B2 |
7989365 | Park et al. | Aug 2011 | B2 |
8008166 | Sanchez et al. | Aug 2011 | B2 |
8048811 | Feustel et al. | Nov 2011 | B2 |
8058179 | Draeger et al. | Nov 2011 | B1 |
8071482 | Kawada | Dec 2011 | B2 |
8074599 | Choi et al. | Dec 2011 | B2 |
8076198 | Lee et al. | Dec 2011 | B2 |
8083853 | Choi et al. | Dec 2011 | B2 |
8114245 | Ohmi et al. | Feb 2012 | B2 |
8119530 | Hori et al. | Feb 2012 | B2 |
8133349 | Panagopoulos | Mar 2012 | B1 |
8187486 | Liu et al. | May 2012 | B1 |
8211808 | Sapre et al. | Jul 2012 | B2 |
8272346 | Bettencourt et al. | Sep 2012 | B2 |
8298627 | Minami et al. | Oct 2012 | B2 |
8309440 | Sanchez et al. | Nov 2012 | B2 |
8312839 | Baek | Nov 2012 | B2 |
8313610 | Dhindsa | Nov 2012 | B2 |
8328939 | Choi et al. | Dec 2012 | B2 |
8336188 | Monteen | Dec 2012 | B2 |
8357435 | Lubomirsky | Jan 2013 | B2 |
8368308 | Banna et al. | Feb 2013 | B2 |
8390980 | Sansoni et al. | Mar 2013 | B2 |
8427067 | Espiau et al. | Apr 2013 | B2 |
8435902 | Tang et al. | May 2013 | B2 |
8475674 | Thadani et al. | Jul 2013 | B2 |
8480850 | Tyler et al. | Jul 2013 | B2 |
8491805 | Kushibiki et al. | Jul 2013 | B2 |
8501629 | Tang et al. | Aug 2013 | B2 |
8506713 | Takagi | Aug 2013 | B2 |
8512509 | Bera et al. | Aug 2013 | B2 |
8528889 | Nakano et al. | Sep 2013 | B2 |
8540844 | Hudson et al. | Sep 2013 | B2 |
8551891 | Liang | Oct 2013 | B2 |
8573152 | De La Llera | Nov 2013 | B2 |
8622021 | Taylor et al. | Jan 2014 | B2 |
8623148 | Mitchell et al. | Jan 2014 | B2 |
8623471 | Tyler et al. | Jan 2014 | B2 |
8633423 | Lin et al. | Jan 2014 | B2 |
8642481 | Wang et al. | Feb 2014 | B2 |
8652298 | Dhindsa et al. | Feb 2014 | B2 |
8679982 | Wang et al. | Mar 2014 | B2 |
8679983 | Wang et al. | Mar 2014 | B2 |
8702902 | Blom et al. | Apr 2014 | B2 |
8741778 | Yang et al. | Jun 2014 | B2 |
8747680 | Deshpande | Jun 2014 | B1 |
8765574 | Zhang et al. | Jul 2014 | B2 |
8771536 | Zhang et al. | Jul 2014 | B2 |
8771539 | Zhang et al. | Jul 2014 | B2 |
8772888 | Jung et al. | Jul 2014 | B2 |
8778079 | Begarney et al. | Jul 2014 | B2 |
8801952 | Wang et al. | Aug 2014 | B1 |
8808563 | Wang et al. | Aug 2014 | B2 |
8846163 | Kao et al. | Sep 2014 | B2 |
8869742 | Dhindsa | Oct 2014 | B2 |
8871651 | Choi et al. | Oct 2014 | B1 |
8888087 | Okabe et al. | Nov 2014 | B2 |
8895449 | Zhu et al. | Nov 2014 | B1 |
8900364 | Wright | Dec 2014 | B2 |
8921234 | Liu et al. | Dec 2014 | B2 |
8927390 | Sapre et al. | Jan 2015 | B2 |
8951429 | Liu et al. | Feb 2015 | B1 |
8956980 | Chen et al. | Feb 2015 | B1 |
8969212 | Ren et al. | Mar 2015 | B2 |
8980005 | Carlson et al. | Mar 2015 | B2 |
8980758 | Ling et al. | Mar 2015 | B1 |
8980763 | Wang et al. | Mar 2015 | B2 |
8992723 | Sorensen et al. | Mar 2015 | B2 |
8999839 | Su et al. | Apr 2015 | B2 |
8999856 | Zhang et al. | Apr 2015 | B2 |
9012302 | Sapre et al. | Apr 2015 | B2 |
9017481 | Pettinger et al. | Apr 2015 | B1 |
9023732 | Wang et al. | May 2015 | B2 |
9023734 | Chen et al. | May 2015 | B2 |
9034770 | Park et al. | May 2015 | B2 |
9040422 | Wang et al. | May 2015 | B2 |
9064815 | Zhang et al. | Jun 2015 | B2 |
9064816 | Kim et al. | Jun 2015 | B2 |
9072158 | Ikeda et al. | Jun 2015 | B2 |
9093371 | Wang et al. | Jul 2015 | B2 |
9093390 | Wang et al. | Jul 2015 | B2 |
9111877 | Chen et al. | Aug 2015 | B2 |
9111907 | Kamineni | Aug 2015 | B2 |
9114438 | Hoinkis et al. | Aug 2015 | B2 |
9117855 | Cho et al. | Aug 2015 | B2 |
9132436 | Liang et al. | Sep 2015 | B2 |
9136273 | Purayath et al. | Sep 2015 | B1 |
9144147 | Yang et al. | Sep 2015 | B2 |
9153442 | Wang et al. | Oct 2015 | B2 |
9159606 | Purayath et al. | Oct 2015 | B1 |
9165786 | Purayath et al. | Oct 2015 | B1 |
9184055 | Wang et al. | Nov 2015 | B2 |
9190293 | Wang et al. | Nov 2015 | B2 |
9190302 | Ni | Nov 2015 | B2 |
9209012 | Chen et al. | Dec 2015 | B2 |
9236265 | Korolik et al. | Jan 2016 | B2 |
9236266 | Zhang et al. | Jan 2016 | B2 |
9245762 | Zhang et al. | Jan 2016 | B2 |
9263278 | Purayath et al. | Feb 2016 | B2 |
9269590 | Luere et al. | Feb 2016 | B2 |
9275834 | Park et al. | Mar 2016 | B1 |
9275887 | Matyushkin et al. | Mar 2016 | B2 |
9287095 | Nguyen et al. | Mar 2016 | B2 |
9287134 | Wang et al. | Mar 2016 | B2 |
9293568 | Ko | Mar 2016 | B2 |
9299537 | Kobayashi et al. | Mar 2016 | B2 |
9299538 | Kobayashi et al. | Mar 2016 | B2 |
9299575 | Park et al. | Mar 2016 | B2 |
9299582 | Ingle et al. | Mar 2016 | B2 |
9299583 | Wang et al. | Mar 2016 | B1 |
9309598 | Wang et al. | Apr 2016 | B2 |
9324576 | Zhang et al. | Apr 2016 | B2 |
9343272 | Pandit et al. | May 2016 | B1 |
9343327 | Zhang et al. | May 2016 | B2 |
9349605 | Xu et al. | May 2016 | B1 |
9355856 | Wang et al. | May 2016 | B2 |
9355862 | Pandit et al. | May 2016 | B2 |
9355863 | Chen et al. | May 2016 | B2 |
9355922 | Park et al. | May 2016 | B2 |
9362130 | Ingle et al. | Jun 2016 | B2 |
9368364 | Park et al. | Jun 2016 | B2 |
9373517 | Yang et al. | Jun 2016 | B2 |
9373522 | Wang et al. | Jun 2016 | B1 |
9378969 | Hsu et al. | Jun 2016 | B2 |
9378978 | Purayath et al. | Jun 2016 | B2 |
9384997 | Ren et al. | Jul 2016 | B2 |
9385028 | Nemani et al. | Jul 2016 | B2 |
9390937 | Chen et al. | Jul 2016 | B2 |
9396989 | Purayath et al. | Jul 2016 | B2 |
9406523 | Chen et al. | Aug 2016 | B2 |
9412608 | Wang et al. | Aug 2016 | B2 |
9418858 | Wang et al. | Aug 2016 | B2 |
9425058 | Kim et al. | Aug 2016 | B2 |
9437451 | Chen et al. | Sep 2016 | B2 |
9449845 | Liu et al. | Sep 2016 | B2 |
9449846 | Liu et al. | Sep 2016 | B2 |
9449850 | Wang et al. | Sep 2016 | B2 |
9472412 | Zhang et al. | Oct 2016 | B2 |
9472417 | Ingle et al. | Oct 2016 | B2 |
9478432 | Chen et al. | Oct 2016 | B2 |
9478434 | Wang et al. | Oct 2016 | B2 |
9493879 | Hoinkis et al. | Nov 2016 | B2 |
9496167 | Purayath et al. | Nov 2016 | B2 |
9499898 | Nguyen et al. | Nov 2016 | B2 |
9502258 | Xue et al. | Nov 2016 | B2 |
9520303 | Wang et al. | Dec 2016 | B2 |
9564296 | Kobayashi et al. | Feb 2017 | B2 |
9576809 | Korolik et al. | Feb 2017 | B2 |
20010006093 | Tabuchi | Jul 2001 | A1 |
20010008803 | Takamatsu et al. | Jul 2001 | A1 |
20010015261 | Kobayashi et al. | Aug 2001 | A1 |
20010028093 | Yamazaki et al. | Oct 2001 | A1 |
20010028922 | Sandhu | Oct 2001 | A1 |
20010030366 | Nakano et al. | Oct 2001 | A1 |
20010034106 | Moise et al. | Oct 2001 | A1 |
20010034121 | Fu et al. | Oct 2001 | A1 |
20010035124 | Okayama et al. | Nov 2001 | A1 |
20010036706 | Kitamura | Nov 2001 | A1 |
20010037856 | Park | Nov 2001 | A1 |
20010037941 | Thompson | Nov 2001 | A1 |
20010039921 | Rolfson et al. | Nov 2001 | A1 |
20010041444 | Shields et al. | Nov 2001 | A1 |
20010047760 | Mosiehl | Dec 2001 | A1 |
20010053585 | Kikuchi et al. | Dec 2001 | A1 |
20010053610 | Athavale | Dec 2001 | A1 |
20010054381 | Umotoy et al. | Dec 2001 | A1 |
20010055842 | Uh et al. | Dec 2001 | A1 |
20020000202 | Yuda et al. | Jan 2002 | A1 |
20020011210 | Satoh et al. | Jan 2002 | A1 |
20020011214 | Kamarehi et al. | Jan 2002 | A1 |
20020016080 | Khan et al. | Feb 2002 | A1 |
20020016085 | Huang et al. | Feb 2002 | A1 |
20020023899 | Khater et al. | Feb 2002 | A1 |
20020028582 | Nallan et al. | Mar 2002 | A1 |
20020028585 | Chung et al. | Mar 2002 | A1 |
20020029747 | Powell et al. | Mar 2002 | A1 |
20020033233 | Savas | Mar 2002 | A1 |
20020036143 | Segawa et al. | Mar 2002 | A1 |
20020040764 | Kwan et al. | Apr 2002 | A1 |
20020040766 | Takahashi | Apr 2002 | A1 |
20020043690 | Doyle et al. | Apr 2002 | A1 |
20020045966 | Lee et al. | Apr 2002 | A1 |
20020054962 | Huang | May 2002 | A1 |
20020069820 | Yudovsky | Jun 2002 | A1 |
20020070414 | Drescher et al. | Jun 2002 | A1 |
20020074573 | Takeuchi et al. | Jun 2002 | A1 |
20020090781 | Skotnicki et al. | Jul 2002 | A1 |
20020090835 | Chakravarti et al. | Jul 2002 | A1 |
20020094378 | O'Donnell | Jul 2002 | A1 |
20020094591 | Sill et al. | Jul 2002 | A1 |
20020096493 | Hattori | Jul 2002 | A1 |
20020098681 | Hu et al. | Jul 2002 | A1 |
20020106845 | Chao et al. | Aug 2002 | A1 |
20020112819 | Kamarehi et al. | Aug 2002 | A1 |
20020124867 | Kim et al. | Sep 2002 | A1 |
20020129769 | Kim et al. | Sep 2002 | A1 |
20020129902 | Babayan et al. | Sep 2002 | A1 |
20020144657 | Chiang et al. | Oct 2002 | A1 |
20020153808 | Skotnicki et al. | Oct 2002 | A1 |
20020164885 | Lill et al. | Nov 2002 | A1 |
20020177322 | Li et al. | Nov 2002 | A1 |
20020182878 | Hirose et al. | Dec 2002 | A1 |
20020187280 | Johnson et al. | Dec 2002 | A1 |
20020187655 | Tan et al. | Dec 2002 | A1 |
20030003757 | Naltan et al. | Jan 2003 | A1 |
20030007910 | Lazarovich et al. | Jan 2003 | A1 |
20030010645 | Ting et al. | Jan 2003 | A1 |
20030019428 | Ku et al. | Jan 2003 | A1 |
20030019580 | Strang | Jan 2003 | A1 |
20030026060 | Hiramatsu et al. | Feb 2003 | A1 |
20030027428 | Ng et al. | Feb 2003 | A1 |
20030029566 | Roth | Feb 2003 | A1 |
20030029567 | Dhindsa et al. | Feb 2003 | A1 |
20030029715 | Yu et al. | Feb 2003 | A1 |
20030032284 | Enomoto et al. | Feb 2003 | A1 |
20030038127 | Liu et al. | Feb 2003 | A1 |
20030038305 | Wasshuber | Feb 2003 | A1 |
20030054608 | Tseng et al. | Mar 2003 | A1 |
20030071035 | Brailove | Apr 2003 | A1 |
20030072639 | White et al. | Apr 2003 | A1 |
20030075808 | Inoue et al. | Apr 2003 | A1 |
20030077909 | Jiwari | Apr 2003 | A1 |
20030079686 | Chen et al. | May 2003 | A1 |
20030087531 | Kang et al. | May 2003 | A1 |
20030091938 | Fairbairn et al. | May 2003 | A1 |
20030094134 | Minami et al. | May 2003 | A1 |
20030098125 | An | May 2003 | A1 |
20030109143 | Hsieh et al. | Jun 2003 | A1 |
20030116087 | Nguyen et al. | Jun 2003 | A1 |
20030116439 | Seo et al. | Jun 2003 | A1 |
20030121608 | Chen et al. | Jul 2003 | A1 |
20030121609 | Ohmi et al. | Jul 2003 | A1 |
20030124465 | Lee et al. | Jul 2003 | A1 |
20030124842 | Hytros et al. | Jul 2003 | A1 |
20030127740 | Hsu et al. | Jul 2003 | A1 |
20030129106 | Sorensen et al. | Jul 2003 | A1 |
20030129827 | Lee et al. | Jul 2003 | A1 |
20030131494 | Lubomirsky et al. | Jul 2003 | A1 |
20030132319 | Hytros et al. | Jul 2003 | A1 |
20030140844 | Maa et al. | Jul 2003 | A1 |
20030141018 | Stevens et al. | Jul 2003 | A1 |
20030143328 | Chen et al. | Jul 2003 | A1 |
20030148035 | Lingampalli | Aug 2003 | A1 |
20030152691 | Baude | Aug 2003 | A1 |
20030159307 | Sago et al. | Aug 2003 | A1 |
20030168439 | Kanno | Sep 2003 | A1 |
20030170945 | Igeta et al. | Sep 2003 | A1 |
20030173333 | Wang et al. | Sep 2003 | A1 |
20030173347 | Guiver | Sep 2003 | A1 |
20030173675 | Watanabe | Sep 2003 | A1 |
20030181040 | Ivanov et al. | Sep 2003 | A1 |
20030183244 | Rossman | Oct 2003 | A1 |
20030190426 | Padhi et al. | Oct 2003 | A1 |
20030199170 | Li | Oct 2003 | A1 |
20030200929 | Otsuki | Oct 2003 | A1 |
20030205329 | Gujer et al. | Nov 2003 | A1 |
20030215963 | AmRhein et al. | Nov 2003 | A1 |
20030216044 | Lin et al. | Nov 2003 | A1 |
20030221780 | Lei et al. | Dec 2003 | A1 |
20030224217 | Byun et al. | Dec 2003 | A1 |
20030224617 | Baek et al. | Dec 2003 | A1 |
20040005726 | Huang | Jan 2004 | A1 |
20040016637 | Yang et al. | Jan 2004 | A1 |
20040016648 | Lubomirsky et al. | Jan 2004 | A1 |
20040018304 | Chung et al. | Jan 2004 | A1 |
20040020801 | Zhao et al. | Feb 2004 | A1 |
20040026371 | Nguyen et al. | Feb 2004 | A1 |
20040033678 | Arghavani et al. | Feb 2004 | A1 |
20040033684 | Li | Feb 2004 | A1 |
20040050328 | Kumagai et al. | Mar 2004 | A1 |
20040055893 | Lubomirsky et al. | Mar 2004 | A1 |
20040058293 | Nguyen et al. | Mar 2004 | A1 |
20040069225 | Fairbairn et al. | Apr 2004 | A1 |
20040070346 | Choi | Apr 2004 | A1 |
20040072446 | Liu et al. | Apr 2004 | A1 |
20040076529 | Gnauck et al. | Apr 2004 | A1 |
20040083967 | Yuda et al. | May 2004 | A1 |
20040087139 | Yeh et al. | May 2004 | A1 |
20040089420 | Ng et al. | May 2004 | A1 |
20040099378 | Kim et al. | May 2004 | A1 |
20040101667 | O'Loughlin et al. | May 2004 | A1 |
20040107908 | Collins et al. | Jun 2004 | A1 |
20040108067 | Fischione et al. | Jun 2004 | A1 |
20040108068 | Senzaki et al. | Jun 2004 | A1 |
20040115876 | Goundar et al. | Jun 2004 | A1 |
20040129671 | Ji et al. | Jul 2004 | A1 |
20040137161 | Segawa et al. | Jul 2004 | A1 |
20040144490 | Zhao et al. | Jul 2004 | A1 |
20040147126 | Yamashita et al. | Jul 2004 | A1 |
20040149394 | Doan et al. | Aug 2004 | A1 |
20040152342 | Li | Aug 2004 | A1 |
20040154535 | Chen et al. | Aug 2004 | A1 |
20040154915 | Kovarsky et al. | Aug 2004 | A1 |
20040157444 | Chiu | Aug 2004 | A1 |
20040161921 | Ryu | Aug 2004 | A1 |
20040163590 | Tran et al. | Aug 2004 | A1 |
20040173454 | Olgado et al. | Sep 2004 | A1 |
20040175913 | Johnson et al. | Sep 2004 | A1 |
20040175929 | Schmitt et al. | Sep 2004 | A1 |
20040182315 | Laflamme et al. | Sep 2004 | A1 |
20040192032 | Ohmori et al. | Sep 2004 | A1 |
20040194799 | Kim et al. | Oct 2004 | A1 |
20040200499 | Harvey | Oct 2004 | A1 |
20040211357 | Gadgil et al. | Oct 2004 | A1 |
20040219006 | Tran et al. | Nov 2004 | A1 |
20040219737 | Quon | Nov 2004 | A1 |
20040219789 | Wood et al. | Nov 2004 | A1 |
20040231706 | Bhatnagar et al. | Nov 2004 | A1 |
20040263827 | Xu | Dec 2004 | A1 |
20050001276 | Gao et al. | Jan 2005 | A1 |
20050003676 | Ho et al. | Jan 2005 | A1 |
20050009340 | Saijo et al. | Jan 2005 | A1 |
20050009358 | Choi et al. | Jan 2005 | A1 |
20050026430 | Kim et al. | Feb 2005 | A1 |
20050026431 | Kazumi et al. | Feb 2005 | A1 |
20050035455 | Hu et al. | Feb 2005 | A1 |
20050051094 | Schaepkens et al. | Mar 2005 | A1 |
20050073051 | Yamamoto et al. | Apr 2005 | A1 |
20050079706 | Kumar et al. | Apr 2005 | A1 |
20050081785 | Lubomirsky et al. | Apr 2005 | A1 |
20050084615 | Weidman et al. | Apr 2005 | A1 |
20050090078 | Ishihara | Apr 2005 | A1 |
20050090120 | Hasegawa et al. | Apr 2005 | A1 |
20050098111 | Shimizu et al. | May 2005 | A1 |
20050105991 | Hofmeister et al. | May 2005 | A1 |
20050112876 | Wu | May 2005 | A1 |
20050112901 | Ji et al. | May 2005 | A1 |
20050164479 | Perng et al. | Jul 2005 | A1 |
20050167394 | Liu et al. | Aug 2005 | A1 |
20050176258 | Hirose et al. | Aug 2005 | A1 |
20050181226 | Weidman et al. | Aug 2005 | A1 |
20050181588 | Kim | Aug 2005 | A1 |
20050196967 | Savas et al. | Sep 2005 | A1 |
20050199489 | Stevens et al. | Sep 2005 | A1 |
20050205110 | Kao et al. | Sep 2005 | A1 |
20050205862 | Koemtzopoulos et al. | Sep 2005 | A1 |
20050208215 | Eguchi et al. | Sep 2005 | A1 |
20050214477 | Hanawa et al. | Sep 2005 | A1 |
20050217586 | Lubomirsky et al. | Oct 2005 | A1 |
20050218507 | Kao et al. | Oct 2005 | A1 |
20050219786 | Brown | Oct 2005 | A1 |
20050221552 | Kao et al. | Oct 2005 | A1 |
20050230350 | Kao et al. | Oct 2005 | A1 |
20050236694 | Wu et al. | Oct 2005 | A1 |
20050239282 | Chen et al. | Oct 2005 | A1 |
20050251990 | Choi et al. | Nov 2005 | A1 |
20050260345 | Lubomirsky et al. | Nov 2005 | A1 |
20050266622 | Arghavani et al. | Dec 2005 | A1 |
20050266650 | Ahn et al. | Dec 2005 | A1 |
20050266691 | Gu et al. | Dec 2005 | A1 |
20050269030 | Kent et al. | Dec 2005 | A1 |
20050274324 | Takahashi et al. | Dec 2005 | A1 |
20050279454 | Snijders | Dec 2005 | A1 |
20050287755 | Bachmann | Dec 2005 | A1 |
20050287771 | Seamons et al. | Dec 2005 | A1 |
20060000802 | Kumar et al. | Jan 2006 | A1 |
20060000805 | Todorow et al. | Jan 2006 | A1 |
20060005856 | Sun et al. | Jan 2006 | A1 |
20060005930 | Ikeda et al. | Jan 2006 | A1 |
20060006057 | Laermer | Jan 2006 | A1 |
20060011298 | Lim et al. | Jan 2006 | A1 |
20060011299 | Condrashoff et al. | Jan 2006 | A1 |
20060016783 | Wu et al. | Jan 2006 | A1 |
20060019456 | Bu et al. | Jan 2006 | A1 |
20060019486 | Yu et al. | Jan 2006 | A1 |
20060021574 | Armour et al. | Feb 2006 | A1 |
20060024954 | Wu et al. | Feb 2006 | A1 |
20060024956 | Zhijian et al. | Feb 2006 | A1 |
20060033678 | Lubomirsky et al. | Feb 2006 | A1 |
20060040055 | Nguyen et al. | Feb 2006 | A1 |
20060043066 | Kamp | Mar 2006 | A1 |
20060046412 | Nguyen et al. | Mar 2006 | A1 |
20060046419 | Sandhu et al. | Mar 2006 | A1 |
20060046470 | Becknell | Mar 2006 | A1 |
20060051966 | Or et al. | Mar 2006 | A1 |
20060051968 | Joshi et al. | Mar 2006 | A1 |
20060054184 | Mozetic et al. | Mar 2006 | A1 |
20060060942 | Minixhofer et al. | Mar 2006 | A1 |
20060062897 | Gu et al. | Mar 2006 | A1 |
20060087644 | McMillin et al. | Apr 2006 | A1 |
20060093756 | Rajagopalan et al. | May 2006 | A1 |
20060097397 | Russell et al. | May 2006 | A1 |
20060102076 | Smith et al. | May 2006 | A1 |
20060102587 | Kimura | May 2006 | A1 |
20060118178 | Desbiolles et al. | Jun 2006 | A1 |
20060121724 | Yue et al. | Jun 2006 | A1 |
20060124242 | Kanarik et al. | Jun 2006 | A1 |
20060124468 | Kovarsky et al. | Jun 2006 | A1 |
20060130971 | Chang et al. | Jun 2006 | A1 |
20060157449 | Takahashi et al. | Jul 2006 | A1 |
20060162661 | Jung et al. | Jul 2006 | A1 |
20060166107 | Chen et al. | Jul 2006 | A1 |
20060166515 | Karim et al. | Jul 2006 | A1 |
20060169327 | Shajii et al. | Aug 2006 | A1 |
20060178008 | Yeh et al. | Aug 2006 | A1 |
20060185592 | Matsuura | Aug 2006 | A1 |
20060191479 | Mizukami et al. | Aug 2006 | A1 |
20060191637 | Zajac et al. | Aug 2006 | A1 |
20060207504 | Hasebe et al. | Sep 2006 | A1 |
20060207595 | Ohmi et al. | Sep 2006 | A1 |
20060210723 | Ishizaka | Sep 2006 | A1 |
20060216878 | Lee | Sep 2006 | A1 |
20060222481 | Foree | Oct 2006 | A1 |
20060226121 | Aoi | Oct 2006 | A1 |
20060228889 | Edelberg et al. | Oct 2006 | A1 |
20060240661 | Annapragada et al. | Oct 2006 | A1 |
20060244107 | Sugihara | Nov 2006 | A1 |
20060246217 | Weidman et al. | Nov 2006 | A1 |
20060251800 | Weidman et al. | Nov 2006 | A1 |
20060251801 | Weidman et al. | Nov 2006 | A1 |
20060252252 | Zhu et al. | Nov 2006 | A1 |
20060252265 | Jin et al. | Nov 2006 | A1 |
20060254716 | Mosden et al. | Nov 2006 | A1 |
20060260750 | Rueger | Nov 2006 | A1 |
20060261490 | Su et al. | Nov 2006 | A1 |
20060264043 | Stewart et al. | Nov 2006 | A1 |
20060266288 | Choi | Nov 2006 | A1 |
20060292846 | Pinto et al. | Dec 2006 | A1 |
20070025907 | Rezeq | Feb 2007 | A1 |
20070048977 | Lee et al. | Mar 2007 | A1 |
20070056925 | Liu et al. | Mar 2007 | A1 |
20070062453 | Ishikawa | Mar 2007 | A1 |
20070071888 | Shanmugasundram et al. | Mar 2007 | A1 |
20070072408 | Enomoto et al. | Mar 2007 | A1 |
20070090325 | Hwang et al. | Apr 2007 | A1 |
20070099428 | Shamiryan et al. | May 2007 | A1 |
20070099431 | Li | May 2007 | A1 |
20070099438 | Ye et al. | May 2007 | A1 |
20070107750 | Sawin et al. | May 2007 | A1 |
20070108404 | Stewart et al. | May 2007 | A1 |
20070111519 | Lubomirsky et al. | May 2007 | A1 |
20070117396 | Wu et al. | May 2007 | A1 |
20070119370 | Ma et al. | May 2007 | A1 |
20070119371 | Ma et al. | May 2007 | A1 |
20070123051 | Arghavani et al. | May 2007 | A1 |
20070131274 | Stollwerck et al. | Jun 2007 | A1 |
20070145023 | Holber et al. | Jun 2007 | A1 |
20070154838 | Lee | Jul 2007 | A1 |
20070163440 | Kim et al. | Jul 2007 | A1 |
20070175861 | Hwang et al. | Aug 2007 | A1 |
20070181057 | Lam et al. | Aug 2007 | A1 |
20070193515 | Jeon et al. | Aug 2007 | A1 |
20070197028 | Byun et al. | Aug 2007 | A1 |
20070207275 | Nowak et al. | Sep 2007 | A1 |
20070212288 | Holst | Sep 2007 | A1 |
20070227554 | Satoh et al. | Oct 2007 | A1 |
20070231109 | Pak et al. | Oct 2007 | A1 |
20070235134 | Iimuro | Oct 2007 | A1 |
20070238199 | Yamashita | Oct 2007 | A1 |
20070238321 | Futase et al. | Oct 2007 | A1 |
20070243685 | Jiang et al. | Oct 2007 | A1 |
20070243714 | Shin et al. | Oct 2007 | A1 |
20070259467 | Tweet et al. | Nov 2007 | A1 |
20070264820 | Liu | Nov 2007 | A1 |
20070266946 | Choi | Nov 2007 | A1 |
20070277734 | Lubomirsky et al. | Dec 2007 | A1 |
20070281106 | Lubomirsky et al. | Dec 2007 | A1 |
20070287292 | Li et al. | Dec 2007 | A1 |
20070289534 | Lubomirsky et al. | Dec 2007 | A1 |
20070296967 | Gupta et al. | Dec 2007 | A1 |
20080017104 | Matyushkin et al. | Jan 2008 | A1 |
20080020570 | Naik | Jan 2008 | A1 |
20080029484 | Park et al. | Feb 2008 | A1 |
20080044990 | Lee | Feb 2008 | A1 |
20080063810 | Park et al. | Mar 2008 | A1 |
20080075668 | Goldstein | Mar 2008 | A1 |
20080081483 | Wu | Apr 2008 | A1 |
20080085604 | Hoshino et al. | Apr 2008 | A1 |
20080099147 | Myo et al. | May 2008 | A1 |
20080099431 | Kumar et al. | May 2008 | A1 |
20080099876 | Seto | May 2008 | A1 |
20080102570 | Fischer et al. | May 2008 | A1 |
20080102640 | Hassan et al. | May 2008 | A1 |
20080104782 | Hughes | May 2008 | A1 |
20080115726 | Ingle et al. | May 2008 | A1 |
20080121179 | Park et al. | May 2008 | A1 |
20080121970 | Aritome | May 2008 | A1 |
20080124937 | Xu et al. | May 2008 | A1 |
20080124944 | Park et al. | May 2008 | A1 |
20080142483 | Hua et al. | Jun 2008 | A1 |
20080153306 | Cho et al. | Jun 2008 | A1 |
20080156771 | Jeon et al. | Jul 2008 | A1 |
20080157225 | Datta et al. | Jul 2008 | A1 |
20080160210 | Yang et al. | Jul 2008 | A1 |
20080171407 | Nakabayashi et al. | Jul 2008 | A1 |
20080173906 | Zhu | Jul 2008 | A1 |
20080176412 | Komeda | Jul 2008 | A1 |
20080182381 | Kiyotoshi | Jul 2008 | A1 |
20080182383 | Lee et al. | Jul 2008 | A1 |
20080185284 | Chen et al. | Aug 2008 | A1 |
20080188087 | Chen et al. | Aug 2008 | A1 |
20080188090 | Chen et al. | Aug 2008 | A1 |
20080202892 | Smith et al. | Aug 2008 | A1 |
20080230519 | Takahashi | Sep 2008 | A1 |
20080233709 | Conti et al. | Sep 2008 | A1 |
20080236751 | Aramaki et al. | Oct 2008 | A1 |
20080254635 | Benzel et al. | Oct 2008 | A1 |
20080261404 | Kozuka et al. | Oct 2008 | A1 |
20080268645 | Kao et al. | Oct 2008 | A1 |
20080292798 | Huh et al. | Nov 2008 | A1 |
20080293248 | Park et al. | Nov 2008 | A1 |
20090001480 | Cheng | Jan 2009 | A1 |
20090004849 | Eun | Jan 2009 | A1 |
20090014127 | Shah et al. | Jan 2009 | A1 |
20090014323 | Yendler et al. | Jan 2009 | A1 |
20090017227 | Fu et al. | Jan 2009 | A1 |
20090031955 | Lu et al. | Feb 2009 | A1 |
20090034147 | Narendrnath et al. | Feb 2009 | A1 |
20090034148 | Lubomirsky et al. | Feb 2009 | A1 |
20090034149 | Lubomirsky et al. | Feb 2009 | A1 |
20090045167 | Maruyama | Feb 2009 | A1 |
20090072401 | Arnold et al. | Mar 2009 | A1 |
20090081878 | Dhindsa | Mar 2009 | A1 |
20090084317 | Wu et al. | Apr 2009 | A1 |
20090087960 | Cho et al. | Apr 2009 | A1 |
20090087979 | Raghuram | Apr 2009 | A1 |
20090093129 | Park et al. | Apr 2009 | A1 |
20090095621 | Kao et al. | Apr 2009 | A1 |
20090098706 | Kim et al. | Apr 2009 | A1 |
20090104738 | Ring et al. | Apr 2009 | A1 |
20090104782 | Lu et al. | Apr 2009 | A1 |
20090111280 | Kao et al. | Apr 2009 | A1 |
20090120368 | Lubomirsky et al. | May 2009 | A1 |
20090120464 | Rasheed et al. | May 2009 | A1 |
20090170221 | Jacques et al. | Jul 2009 | A1 |
20090170331 | Cheng et al. | Jul 2009 | A1 |
20090179300 | Arai | Jul 2009 | A1 |
20090189246 | Wu et al. | Jul 2009 | A1 |
20090194810 | Kiyotoshi et al. | Aug 2009 | A1 |
20090197418 | Sago | Aug 2009 | A1 |
20090202721 | Nogami et al. | Aug 2009 | A1 |
20090255902 | Satoh et al. | Oct 2009 | A1 |
20090258162 | Furuta et al. | Oct 2009 | A1 |
20090266299 | Rasheed et al. | Oct 2009 | A1 |
20090269934 | Kao et al. | Oct 2009 | A1 |
20090274590 | Willwerth et al. | Nov 2009 | A1 |
20090275146 | Takano et al. | Nov 2009 | A1 |
20090275205 | Kiehlbauch et al. | Nov 2009 | A1 |
20090275206 | Katz et al. | Nov 2009 | A1 |
20090277587 | Lubomirsky et al. | Nov 2009 | A1 |
20090277874 | Rui et al. | Nov 2009 | A1 |
20090280650 | Lubomirsky et al. | Nov 2009 | A1 |
20090283217 | Lubomirsky et al. | Nov 2009 | A1 |
20090286400 | Heo et al. | Nov 2009 | A1 |
20090294898 | Feustel et al. | Dec 2009 | A1 |
20090317978 | Higashi | Dec 2009 | A1 |
20090320756 | Tanaka | Dec 2009 | A1 |
20100003824 | Kadkhodayan et al. | Jan 2010 | A1 |
20100022030 | Ditizio | Jan 2010 | A1 |
20100041207 | Lee et al. | Feb 2010 | A1 |
20100047080 | Bruce | Feb 2010 | A1 |
20100048027 | Cheng et al. | Feb 2010 | A1 |
20100048028 | Rasheed et al. | Feb 2010 | A1 |
20100055408 | Lee et al. | Mar 2010 | A1 |
20100055917 | Kim | Mar 2010 | A1 |
20100059889 | Gosset et al. | Mar 2010 | A1 |
20100062603 | Ganguly et al. | Mar 2010 | A1 |
20100075503 | Bencher | Mar 2010 | A1 |
20100093151 | Arghavani et al. | Apr 2010 | A1 |
20100093168 | Naik | Apr 2010 | A1 |
20100096367 | Jeon et al. | Apr 2010 | A1 |
20100098882 | Lubomirsky et al. | Apr 2010 | A1 |
20100099236 | Kwon et al. | Apr 2010 | A1 |
20100099263 | Kao et al. | Apr 2010 | A1 |
20100101727 | Ji | Apr 2010 | A1 |
20100105209 | Winniczek et al. | Apr 2010 | A1 |
20100130001 | Noguchi | May 2010 | A1 |
20100144140 | Chandrashekar et al. | Jun 2010 | A1 |
20100147219 | Hsieh et al. | Jun 2010 | A1 |
20100164422 | Shu et al. | Jul 2010 | A1 |
20100173499 | Tao et al. | Jul 2010 | A1 |
20100178748 | Subramanian | Jul 2010 | A1 |
20100178755 | Lee et al. | Jul 2010 | A1 |
20100180819 | Hatanaka et al. | Jul 2010 | A1 |
20100183825 | Becker et al. | Jul 2010 | A1 |
20100187534 | Nishi et al. | Jul 2010 | A1 |
20100187588 | Kim et al. | Jul 2010 | A1 |
20100187694 | Yu et al. | Jul 2010 | A1 |
20100190352 | Jaiswal | Jul 2010 | A1 |
20100197143 | Nishimura | Aug 2010 | A1 |
20100203739 | Becker et al. | Aug 2010 | A1 |
20100207205 | Grebs et al. | Aug 2010 | A1 |
20100240205 | Son | Sep 2010 | A1 |
20100258913 | Lue | Oct 2010 | A1 |
20100288369 | Chang et al. | Nov 2010 | A1 |
20100294199 | Tran et al. | Nov 2010 | A1 |
20100330814 | Yokota et al. | Dec 2010 | A1 |
20110005607 | Desbiolles et al. | Jan 2011 | A1 |
20110005679 | Hanawa et al. | Jan 2011 | A1 |
20110008950 | Xu | Jan 2011 | A1 |
20110011338 | Chuc et al. | Jan 2011 | A1 |
20110034035 | Liang et al. | Feb 2011 | A1 |
20110039407 | Nishizuka | Feb 2011 | A1 |
20110045676 | Park | Feb 2011 | A1 |
20110053380 | Sapre et al. | Mar 2011 | A1 |
20110058303 | Migita | Mar 2011 | A1 |
20110061810 | Ganguly et al. | Mar 2011 | A1 |
20110061812 | Ganguly et al. | Mar 2011 | A1 |
20110065276 | Ganguly et al. | Mar 2011 | A1 |
20110081782 | Liang et al. | Apr 2011 | A1 |
20110100489 | Orito | May 2011 | A1 |
20110111596 | Kanakasabapathy | May 2011 | A1 |
20110114601 | Lubomirsky et al. | May 2011 | A1 |
20110115378 | Lubomirsky et al. | May 2011 | A1 |
20110124144 | Schlemm et al. | May 2011 | A1 |
20110127156 | Foad et al. | Jun 2011 | A1 |
20110143542 | Feurprier et al. | Jun 2011 | A1 |
20110151674 | Tang et al. | Jun 2011 | A1 |
20110151677 | Wang et al. | Jun 2011 | A1 |
20110151678 | Ashtiani et al. | Jun 2011 | A1 |
20110155181 | Inatomi | Jun 2011 | A1 |
20110159690 | Chandrashekar et al. | Jun 2011 | A1 |
20110165057 | Honda et al. | Jul 2011 | A1 |
20110165771 | Ring et al. | Jul 2011 | A1 |
20110180847 | Ikeda et al. | Jul 2011 | A1 |
20110195575 | Wang | Aug 2011 | A1 |
20110217851 | Liang et al. | Sep 2011 | A1 |
20110226734 | Sumiya et al. | Sep 2011 | A1 |
20110227028 | Sekar et al. | Sep 2011 | A1 |
20110230052 | Tang et al. | Sep 2011 | A1 |
20110232737 | Ruletzki et al. | Sep 2011 | A1 |
20110266252 | Thadani et al. | Nov 2011 | A1 |
20110266682 | Edelstein et al. | Nov 2011 | A1 |
20110294300 | Zhang et al. | Dec 2011 | A1 |
20110298061 | Siddiqui et al. | Dec 2011 | A1 |
20120003782 | Byun et al. | Jan 2012 | A1 |
20120009796 | Cui et al. | Jan 2012 | A1 |
20120025289 | Liang et al. | Feb 2012 | A1 |
20120031559 | Dhindsa et al. | Feb 2012 | A1 |
20120034786 | Dhindsa et al. | Feb 2012 | A1 |
20120035766 | Shajii et al. | Feb 2012 | A1 |
20120052683 | Kim et al. | Mar 2012 | A1 |
20120068242 | Shin et al. | Mar 2012 | A1 |
20120073501 | Lubomirsky et al. | Mar 2012 | A1 |
20120074126 | Bang et al. | Mar 2012 | A1 |
20120091108 | Lin et al. | Apr 2012 | A1 |
20120103518 | Kakimoto | May 2012 | A1 |
20120103970 | Lubomirsky et al. | May 2012 | A1 |
20120104564 | Won et al. | May 2012 | A1 |
20120129354 | Luong | May 2012 | A1 |
20120135576 | Lee et al. | May 2012 | A1 |
20120148369 | Michalski et al. | Jun 2012 | A1 |
20120149200 | Culp et al. | Jun 2012 | A1 |
20120161405 | Mohn et al. | Jun 2012 | A1 |
20120164839 | Nishimura | Jun 2012 | A1 |
20120180954 | Yang et al. | Jul 2012 | A1 |
20120181599 | Lung | Jul 2012 | A1 |
20120182808 | Lue et al. | Jul 2012 | A1 |
20120196447 | Yang et al. | Aug 2012 | A1 |
20120202408 | Shajii et al. | Aug 2012 | A1 |
20120208361 | Ha | Aug 2012 | A1 |
20120211462 | Zhang et al. | Aug 2012 | A1 |
20120223048 | Paranjpe et al. | Sep 2012 | A1 |
20120223418 | Stowers et al. | Sep 2012 | A1 |
20120225557 | Serry et al. | Sep 2012 | A1 |
20120228642 | Aube et al. | Sep 2012 | A1 |
20120238102 | Zhang et al. | Sep 2012 | A1 |
20120238103 | Zhang et al. | Sep 2012 | A1 |
20120241411 | Darling et al. | Sep 2012 | A1 |
20120247390 | Sawada et al. | Oct 2012 | A1 |
20120247670 | Dobashi et al. | Oct 2012 | A1 |
20120247671 | Sugawara | Oct 2012 | A1 |
20120258600 | Godet et al. | Oct 2012 | A1 |
20120267346 | Kao et al. | Oct 2012 | A1 |
20120282779 | Arnold et al. | Nov 2012 | A1 |
20120285619 | Matyushkin et al. | Nov 2012 | A1 |
20120285621 | Tan | Nov 2012 | A1 |
20120292664 | Kanike | Nov 2012 | A1 |
20120309204 | Kang et al. | Dec 2012 | A1 |
20120325773 | Lee et al. | Dec 2012 | A1 |
20130001899 | Hwang et al. | Jan 2013 | A1 |
20130005103 | Liu et al. | Jan 2013 | A1 |
20130005140 | Jeng et al. | Jan 2013 | A1 |
20130012032 | Liu et al. | Jan 2013 | A1 |
20130032574 | Liu et al. | Feb 2013 | A1 |
20130034666 | Liang et al. | Feb 2013 | A1 |
20130034968 | Zhang et al. | Feb 2013 | A1 |
20130045605 | Wang et al. | Feb 2013 | A1 |
20130048605 | Sapre et al. | Feb 2013 | A1 |
20130052827 | Wang et al. | Feb 2013 | A1 |
20130052833 | Ranjan et al. | Feb 2013 | A1 |
20130059440 | Wang et al. | Mar 2013 | A1 |
20130062675 | Thomas | Mar 2013 | A1 |
20130065398 | Ohsawa et al. | Mar 2013 | A1 |
20130082197 | Yang et al. | Apr 2013 | A1 |
20130084654 | Gaylord et al. | Apr 2013 | A1 |
20130089988 | Wang et al. | Apr 2013 | A1 |
20130098868 | Nishimura et al. | Apr 2013 | A1 |
20130105088 | Pal et al. | May 2013 | A1 |
20130105948 | Kewley | May 2013 | A1 |
20130107415 | Banna et al. | May 2013 | A1 |
20130119016 | Kagoshima | May 2013 | A1 |
20130119457 | Lue et al. | May 2013 | A1 |
20130119483 | Alptekin et al. | May 2013 | A1 |
20130130507 | Wang et al. | May 2013 | A1 |
20130150303 | Kungl et al. | Jun 2013 | A1 |
20130161726 | Kim et al. | Jun 2013 | A1 |
20130175654 | Muckenhirn et al. | Jul 2013 | A1 |
20130187220 | Surthi | Jul 2013 | A1 |
20130193108 | Zheng | Aug 2013 | A1 |
20130217243 | Underwood et al. | Aug 2013 | A1 |
20130224960 | Payyapilly et al. | Aug 2013 | A1 |
20130260533 | Sapre et al. | Oct 2013 | A1 |
20130260564 | Sapre et al. | Oct 2013 | A1 |
20130273313 | Sun et al. | Oct 2013 | A1 |
20130273327 | Sun et al. | Oct 2013 | A1 |
20130279066 | Lubomirsky et al. | Oct 2013 | A1 |
20130284369 | Kobayashi et al. | Oct 2013 | A1 |
20130284370 | Kobayashi et al. | Oct 2013 | A1 |
20130284373 | Sun et al. | Oct 2013 | A1 |
20130284374 | Lubomirsky | Oct 2013 | A1 |
20130286530 | Lin | Oct 2013 | A1 |
20130295297 | Chou et al. | Nov 2013 | A1 |
20130298942 | Ren et al. | Nov 2013 | A1 |
20130302980 | Chandrashekar et al. | Nov 2013 | A1 |
20130337655 | Lee et al. | Dec 2013 | A1 |
20130343829 | Benedetti et al. | Dec 2013 | A1 |
20140004707 | Thedjoisworo et al. | Jan 2014 | A1 |
20140004708 | Thedjoisworo | Jan 2014 | A1 |
20140008880 | Miura et al. | Jan 2014 | A1 |
20140020708 | Kim et al. | Jan 2014 | A1 |
20140021673 | Chen et al. | Jan 2014 | A1 |
20140026813 | Wang et al. | Jan 2014 | A1 |
20140030486 | Sun et al. | Jan 2014 | A1 |
20140030533 | Sun et al. | Jan 2014 | A1 |
20140057447 | Yang et al. | Feb 2014 | A1 |
20140065842 | Anthis et al. | Mar 2014 | A1 |
20140080308 | Chen et al. | Mar 2014 | A1 |
20140080309 | Park | Mar 2014 | A1 |
20140080310 | Chen et al. | Mar 2014 | A1 |
20140083362 | Lubomirsky et al. | Mar 2014 | A1 |
20140087488 | Nam et al. | Mar 2014 | A1 |
20140097270 | Liang et al. | Apr 2014 | A1 |
20140099794 | Ingle et al. | Apr 2014 | A1 |
20140124364 | Yoo et al. | May 2014 | A1 |
20140134847 | Seya | May 2014 | A1 |
20140141621 | Ren et al. | May 2014 | A1 |
20140152312 | Snow | Jun 2014 | A1 |
20140165912 | Kao et al. | Jun 2014 | A1 |
20140166617 | Chen | Jun 2014 | A1 |
20140166618 | Tadigadapa et al. | Jun 2014 | A1 |
20140177123 | Thach et al. | Jun 2014 | A1 |
20140186772 | Pohlers et al. | Jul 2014 | A1 |
20140190410 | Kim | Jul 2014 | A1 |
20140199851 | Nemani et al. | Jul 2014 | A1 |
20140209245 | Yamamoto et al. | Jul 2014 | A1 |
20140209596 | Lubomirsky et al. | Jul 2014 | A1 |
20140225504 | Kaneko et al. | Aug 2014 | A1 |
20140227881 | Lubomirsky et al. | Aug 2014 | A1 |
20140234466 | Gao et al. | Aug 2014 | A1 |
20140248773 | Tsai et al. | Sep 2014 | A1 |
20140248780 | Ingle et al. | Sep 2014 | A1 |
20140256131 | Wang et al. | Sep 2014 | A1 |
20140256145 | Abdallah et al. | Sep 2014 | A1 |
20140262031 | Belostotskiy et al. | Sep 2014 | A1 |
20140262032 | Collins et al. | Sep 2014 | A1 |
20140262038 | Wang et al. | Sep 2014 | A1 |
20140263272 | Duan et al. | Sep 2014 | A1 |
20140264533 | Simsek-Ege | Sep 2014 | A1 |
20140265910 | Kobayashi et al. | Sep 2014 | A1 |
20140271097 | Wang et al. | Sep 2014 | A1 |
20140273373 | Makala et al. | Sep 2014 | A1 |
20140273406 | Wang et al. | Sep 2014 | A1 |
20140273451 | Wang et al. | Sep 2014 | A1 |
20140273462 | Simsek-Ege et al. | Sep 2014 | A1 |
20140273481 | Wang et al. | Sep 2014 | A1 |
20140273488 | Wang et al. | Sep 2014 | A1 |
20140273489 | Wang et al. | Sep 2014 | A1 |
20140273491 | Zhang et al. | Sep 2014 | A1 |
20140273492 | Anthis et al. | Sep 2014 | A1 |
20140273496 | Kao | Sep 2014 | A1 |
20140288528 | Py et al. | Sep 2014 | A1 |
20140302678 | Paterson et al. | Oct 2014 | A1 |
20140308758 | Nemani et al. | Oct 2014 | A1 |
20140308816 | Wang et al. | Oct 2014 | A1 |
20140311581 | Belostotskiy et al. | Oct 2014 | A1 |
20140334060 | Parkhe et al. | Nov 2014 | A1 |
20140342532 | Zhu | Nov 2014 | A1 |
20140342569 | Zhu et al. | Nov 2014 | A1 |
20140349477 | Chandrashekar et al. | Nov 2014 | A1 |
20150011096 | Chandrasekharan et al. | Jan 2015 | A1 |
20150014152 | Hoinkis et al. | Jan 2015 | A1 |
20150031211 | Sapre et al. | Jan 2015 | A1 |
20150037980 | Rha | Feb 2015 | A1 |
20150060265 | Cho et al. | Mar 2015 | A1 |
20150076110 | Wu et al. | Mar 2015 | A1 |
20150076586 | Rabkin et al. | Mar 2015 | A1 |
20150079797 | Chen et al. | Mar 2015 | A1 |
20150118858 | Takaba | Apr 2015 | A1 |
20150126035 | Diao et al. | May 2015 | A1 |
20150126039 | Korolik et al. | May 2015 | A1 |
20150126040 | Korolik et al. | May 2015 | A1 |
20150129541 | Wang et al. | May 2015 | A1 |
20150129545 | Ingle et al. | May 2015 | A1 |
20150129546 | Ingle et al. | May 2015 | A1 |
20150132953 | Nowling | May 2015 | A1 |
20150132968 | Ren et al. | May 2015 | A1 |
20150152072 | Cantat et al. | Jun 2015 | A1 |
20150155177 | Zhang et al. | Jun 2015 | A1 |
20150170879 | Nguyen et al. | Jun 2015 | A1 |
20150170920 | Purayath et al. | Jun 2015 | A1 |
20150170924 | Nguyen et al. | Jun 2015 | A1 |
20150170926 | Michalak | Jun 2015 | A1 |
20150170935 | Wang et al. | Jun 2015 | A1 |
20150170943 | Nguyen et al. | Jun 2015 | A1 |
20150171008 | Luo | Jun 2015 | A1 |
20150179464 | Wang et al. | Jun 2015 | A1 |
20150187625 | Busche et al. | Jul 2015 | A1 |
20150206764 | Wang et al. | Jul 2015 | A1 |
20150214066 | Luere et al. | Jul 2015 | A1 |
20150214067 | Zhang et al. | Jul 2015 | A1 |
20150214092 | Purayath et al. | Jul 2015 | A1 |
20150214337 | Ko et al. | Jul 2015 | A1 |
20150221541 | Nemani et al. | Aug 2015 | A1 |
20150235809 | Ito et al. | Aug 2015 | A1 |
20150235863 | Chen | Aug 2015 | A1 |
20150235865 | Wang et al. | Aug 2015 | A1 |
20150235867 | Nishizuka | Aug 2015 | A1 |
20150247231 | Nguyen et al. | Sep 2015 | A1 |
20150270140 | Gupta et al. | Sep 2015 | A1 |
20150275375 | Kim et al. | Oct 2015 | A1 |
20150294980 | Lee et al. | Oct 2015 | A1 |
20150332930 | Wang et al. | Nov 2015 | A1 |
20150340225 | Kim et al. | Nov 2015 | A1 |
20150357201 | Chen et al. | Dec 2015 | A1 |
20150357205 | Wang et al. | Dec 2015 | A1 |
20150371861 | Li et al. | Dec 2015 | A1 |
20150371864 | Hsu et al. | Dec 2015 | A1 |
20150371865 | Chen et al. | Dec 2015 | A1 |
20150371866 | Chen et al. | Dec 2015 | A1 |
20150380431 | Kanamori et al. | Dec 2015 | A1 |
20160005572 | Liang et al. | Jan 2016 | A1 |
20160005833 | Collins et al. | Jan 2016 | A1 |
20160027654 | Kim et al. | Jan 2016 | A1 |
20160027673 | Wang et al. | Jan 2016 | A1 |
20160035586 | Purayath et al. | Feb 2016 | A1 |
20160035614 | Purayath et al. | Feb 2016 | A1 |
20160042968 | Purayath et al. | Feb 2016 | A1 |
20160056167 | Wang et al. | Feb 2016 | A1 |
20160064233 | Wang et al. | Mar 2016 | A1 |
20160079072 | Wang et al. | Mar 2016 | A1 |
20160086807 | Park et al. | Mar 2016 | A1 |
20160086808 | Zhang et al. | Mar 2016 | A1 |
20160086815 | Pandit et al. | Mar 2016 | A1 |
20160086816 | Wang et al. | Mar 2016 | A1 |
20160093505 | Chen et al. | Mar 2016 | A1 |
20160093506 | Chen et al. | Mar 2016 | A1 |
20160104606 | Park et al. | Apr 2016 | A1 |
20160118268 | Ingle et al. | Apr 2016 | A1 |
20160148821 | Singh et al. | May 2016 | A1 |
20160163512 | Lubomirsky | Jun 2016 | A1 |
20160163513 | Lubomirsky | Jun 2016 | A1 |
20160181112 | Xue et al. | Jun 2016 | A1 |
20160189933 | Kobayashi et al. | Jun 2016 | A1 |
20160204009 | Nguyen et al. | Jul 2016 | A1 |
20160222522 | Wang et al. | Aug 2016 | A1 |
20160225652 | Tran et al. | Aug 2016 | A1 |
20160240389 | Zhang et al. | Aug 2016 | A1 |
20160240402 | Park et al. | Aug 2016 | A1 |
20160260588 | Park et al. | Sep 2016 | A1 |
20160260616 | Li et al. | Sep 2016 | A1 |
20160260619 | Zhang et al. | Sep 2016 | A1 |
20160284556 | Ingle et al. | Sep 2016 | A1 |
20160300694 | Yang et al. | Oct 2016 | A1 |
20170040175 | Xu et al. | Feb 2017 | A1 |
20170040190 | Benjaminson et al. | Feb 2017 | A1 |
20170040191 | Benjaminson et al. | Feb 2017 | A1 |
20170040207 | Purayath | Feb 2017 | A1 |
Number | Date | Country |
---|---|---|
1675160 | Jun 2006 | EP |
S59-126778 | Jul 1984 | JP |
H01-200627 | Aug 1989 | JP |
H02-114525 | Apr 1990 | JP |
H07-153739 | Jun 1995 | JP |
H08-264510 | Oct 1996 | JP |
2003-174020 | Jun 2003 | JP |
2010-180458 | Aug 2010 | JP |
4763293 | Aug 2011 | JP |
2013-243418 | Dec 2013 | JP |
2003-0023964 | Mar 2003 | KR |
2005-0049903 | May 2005 | KR |
2007-0079870 | Aug 2007 | KR |
10-2008-0063988 | Jul 2008 | KR |
10-2009-0128913 | Dec 2009 | KR |
10-2011-0086540 | Jul 2011 | KR |
10-2011-0126675 | Nov 2011 | KR |
10-2012-0082640 | Jul 2012 | KR |
2012-07919 | Feb 2012 | TW |
2008-112673 | Sep 2008 | WO |
2009-084194 | Jul 2009 | WO |
2010-010706 | Jan 2010 | WO |
2012-118987 | Sep 2012 | WO |
Entry |
---|
Manual No. TQMA72E1. “Bayard-Alpert Pirani Gauge FRG-730: Short Operating Instructions” Mar. 2012. Agilent Technologies, Lexington, MA 02421, USA. pp. 1-45. |
International Search Report and Written Opinion of PCT/US2016/014079 mailed Apr. 25, 2016, all pages. |
International Search Report and Written Opinion of PCT/US2016/014106 mailed Apr. 26, 2016, all pages. |
H. Xiao, introduction to Semiconductor Manufacturing Technology, published by Prentice Hall, 2001, ISBN 0-13-022404-9, pp. 354-356. |
Instrument Manual: Vacuum Gauge Model MM200, Rev D. TELEVAC (website: www.televac.com), A Division of the Fredericks Company, Huntingdonvalley, PA, US. 2008. pp. 162. |
International Search Report and Written Opinion of PCT/US2016/045551 mailed Nov. 17, 2016, all pages. |
International Search Report and Written Opinion of PCT/US2016/045543 mailed Nov. 17, 2016, all pages. |
Number | Date | Country | |
---|---|---|---|
20160225651 A1 | Aug 2016 | US |