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Shamouil Shamouliam
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San Jose, CA, US
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last 30 patents
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Patent Grant
Reduction of contaminant buildup in semiconductor apparatus
Patent number
5,622,565
Issue date
Apr 22, 1997
Applied Materials, Inc.
Yan Ye
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Reduction of contaminant buildup in semiconductor processing apparatus
Patent number
5,578,131
Issue date
Nov 26, 1996
Yan Ye
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...