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Shane C. Nevil
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
10,854,425
Issue date
Dec 1, 2020
Applied Materials, Inc.
Chetan Mahadeswaraswamy
G05 - CONTROLLING REGULATING
Information
Patent Grant
Temperature management of aluminium nitride electrostatic chuck
Patent number
9,358,702
Issue date
Jun 7, 2016
Applied Materials, Inc.
Sumanth Banda
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
9,338,871
Issue date
May 10, 2016
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Multi-zoned plasma processing electrostatic chuck with improved tem...
Patent number
9,248,509
Issue date
Feb 2, 2016
Applied Materials, Inc.
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zoned plasma processing electrostatic chuck with improved tem...
Patent number
8,822,876
Issue date
Sep 2, 2014
Applied Materials, Inc.
Hamid Tavassoli
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Assembly for delivering RF power and DC voltage to a plasma process...
Patent number
8,629,370
Issue date
Jan 14, 2014
Applied Materials, Inc.
Hamid Tavassoli
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate support temperature control
Patent number
8,596,336
Issue date
Dec 3, 2013
Applied Materials, Inc.
Richard Fovell
F28 - HEAT EXCHANGE IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20160155612
Publication date
Jun 2, 2016
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...
Publication number
20140346743
Publication date
Nov 27, 2014
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK
Publication number
20140203526
Publication date
Jul 24, 2014
Applied Materials, Inc.
Sumanth Banda
B28 - WORKING CEMENT, CLAY, OR STONE
Information
Patent Application
TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP
Publication number
20130284369
Publication date
Oct 31, 2013
Applied Materials, Inc.
Satoru Kobayashi
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
PLASMA PROCESSING USING RF RETURN PATH VARIABLE IMPEDANCE CONTROLLE...
Publication number
20130277333
Publication date
Oct 24, 2013
Nipun Misra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FAST RESPONSE FLUID TEMPERATURE CONTROL SYSTEM
Publication number
20130240144
Publication date
Sep 19, 2013
Applied Materials, Inc.
Douglas A. Buchberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEM...
Publication number
20120091104
Publication date
Apr 19, 2012
Applied Materials, Inc.
Hamid Tavassoli
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ASSEMBLY FOR DELIVERING RF POWER AND DC VOLTAGE TO A PLASMA PROCESS...
Publication number
20110297650
Publication date
Dec 8, 2011
Applied Materials, Inc.
Hamid Tavassoli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20110186545
Publication date
Aug 4, 2011
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
G05 - CONTROLLING REGULATING
Information
Patent Application
FAST SUBSTRATE SUPPORT TEMPERATURE CONTROL
Publication number
20090294101
Publication date
Dec 3, 2009
Applied Materials, Inc.
RICHARD FOVELL
F28 - HEAT EXCHANGE IN GENERAL