Shankar Muthukrishnan

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature offset and zone control tuning
- Patent number 12,080,573
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Ole Luckner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogenation and nitridization processes for reducing oxygen conte...
- Patent number 10,504,779
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Johanes S. Swenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogenation and nitridization processes for reducing oxygen conte...
- Patent number 10,236,207
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Johanes S. Swenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crystallization of amorphous films and grain growth using combinati...
- Patent number 9,263,265
- Issue date Feb 16, 2016
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stabilization of high-k dielectric materials
- Patent number 8,323,754
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Christopher Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of gas flow and delivery to suppress the formation of parti...
- Patent number 7,794,544
- Issue date Sep 14, 2010
- Applied Materials, Inc.
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE OFFSET AND ZONE CONTROL TUNING
- Publication number 20200251362
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Ole LUCKNER
- G05 - CONTROLLING REGULATING
Information Patent Application
HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTE...
- Publication number 20190157143
- Publication date May 23, 2019
- Applied Materials, Inc.
- Johanes S. SWENBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTE...
- Publication number 20170365512
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Johanes S. SWENBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MILLISECOND ANNEALING IN AMMONIA AMBIENT FOR PRECISE PLACEMENT OF N...
- Publication number 20150311067
- Publication date Oct 29, 2015
- Applied Materials, Inc.
- Shashank SHARMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTALLIZATION OF AMORPHOUS FILMS AND GRAIN GROWTH USING COMBINATI...
- Publication number 20150064933
- Publication date Mar 5, 2015
- Applied Materials, Inc.
- Shashank SHARMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nitrogen profile engineering in HI-K nitridation for device perform...
- Publication number 20070049043
- Publication date Mar 1, 2007
- APPLIED MATERIALS, INC.
- Shankar Muthukrishnan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a dielectric stack
- Publication number 20060153995
- Publication date Jul 13, 2006
- APPLIED MATERIALS, INC.
- Pravin K. Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor deposition of hafnium silicate materials with tris(dimethylam...
- Publication number 20060062917
- Publication date Mar 23, 2006
- Shankar Muthukrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment of hafnium-containing materials
- Publication number 20060019033
- Publication date Jan 26, 2006
- APPLIED MATERIALS, INC.
- Shankar Muthukrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Stabilization of high-k dielectric materials
- Publication number 20050260357
- Publication date Nov 24, 2005
- APPLIED MATERIALS, INC.
- Christopher Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Control of gas flow and delivery to suppress the formation of parti...
- Publication number 20050252449
- Publication date Nov 17, 2005
- Son T. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shankar Muthukrishnan

Person

Patents Grantslast 30 patents

Temperature offset and zone control tuning

Hydrogenation and nitridization processes for reducing oxygen conte...

Hydrogenation and nitridization processes for reducing oxygen conte...

Crystallization of amorphous films and grain growth using combinati...

Stabilization of high-k dielectric materials

Control of gas flow and delivery to suppress the formation of parti...

Patents Applicationslast 30 patents

TEMPERATURE OFFSET AND ZONE CONTROL TUNING

HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTE...

HYDROGENATION AND NITRIDIZATION PROCESSES FOR REDUCING OXYGEN CONTE...

MILLISECOND ANNEALING IN AMMONIA AMBIENT FOR PRECISE PLACEMENT OF N...

CRYSTALLIZATION OF AMORPHOUS FILMS AND GRAIN GROWTH USING COMBINATI...

Nitrogen profile engineering in HI-K nitridation for device perform...

Method for fabricating a dielectric stack

Vapor deposition of hafnium silicate materials with tris(dimethylam...

Plasma treatment of hafnium-containing materials

Stabilization of high-k dielectric materials

Control of gas flow and delivery to suppress the formation of parti...